Journal of the Microelectronics and Packaging Society (마이크로전자및패키징학회지)

The Korean Microelectronics and Packaging Society (한국마이크로전자및패키징학회)
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Effect of Metal Ni Atomic Layer Deposition Coating on Ni/YSZ, Anode of Solid Oxide Fuel Cells (SOFCs)

고체산화물 연료전지의 Anode인 Ni/YSZ에 Ni 원자층 증착 코팅의 효과

  • Kim, Jun Ho (School of Chemical Engineering, Chonnam National University) ;
  • Mo, Su In (School of Chemical Engineering, Chonnam National University) ;
  • Park, Gwang Seon (School of Chemical Engineering, Chonnam National University) ;
  • Kim, Hyung Soon (Haeyang Energy Co) ;
  • Kim, Do Heyoung (School of Chemical Engineering, Chonnam National University) ;
  • Yun, Jeong Woo (School of Chemical Engineering, Chonnam National University)
  • Received : 2022.03.16
  • Accepted : 2022.03.18
  • Published : 2022.03.30
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Abstract

This study is to increase the surface area and maximize the effect of the catalyst by coating a nanometersized metal catalyst material on the anode layer using atomic layer deposition (ALD) technology. ALD process is known to produce uniform films with well-controlled thickness at the atomic level on substrates. We measured the performance by coating metals (Ni) on Ni/YSZ, which is the most widely known anode material for solid oxide fuel cells. ALD coatings began to show a decrease in cell performance over 3 nm coatings.

이 연구는 원자층 증착(Atomic Layer Deposition, ALD) 기술을 사용하여 나노미터 크기의 금속 촉매 물질을 연료극 층에 코팅하여 표면적을 늘리고 촉매의 효과를 극대화시키기 위한 연구이다. ALD 공정은 기판 위에 원자 수준에서 잘 제어된 두께를 갖는 균일한 막을 제조하는 것으로 알려져 있다. 우리는 고체산화물 연료전지의 연료극 물질로 가장 널리 알려진 Ni/YSZ 위에 금속(Ni)을 코팅하여 성능을 측정하였다. ALD 코팅은 3 nm 이상의 코팅에서 전지 성능의 감소를 보이기 시작했다

Keywords

Acknowledgement

이 연구는 2021년도 산업통상자원부 및 산업기술평가관리원(KEIT) 연구비 지원에 의한 연구임('20012555').

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