DOI QR코드

DOI QR Code

Effectiveness of parylene coating on CdZnTe surface after optimal passivation

  • B. Park (Dept. of Health and Safety Convergence Science, Korea University) ;
  • Y. Kim (Interdisciplinary Program in Precision Public Health, Korea University) ;
  • J. Seo (Dept. of Health and Safety Convergence Science, Korea University) ;
  • K. Kim (School of Health and Environmental Science, Korea University)
  • Received : 2022.04.18
  • Accepted : 2022.08.16
  • Published : 2022.12.25

Abstract

Parylene coating was adopted on CdZnTe (CZT) detector as a mechanical protection layer after wet passivation with hydrogen peroxide (H2O2) and ammonium fluoride (NH4F). Wet chemical passivant lose their effectiveness when exposed to the ambient conditions for a long time. Parylene coating could protect the effectiveness of passivation, by mechanically blocking the exposure to the ambient conditions. Stability of CZT detector was tested with the measurement of leakage current density and response to radio-isotopes. When the enough thickness of parylene (>100 ㎛) is adopted, parylene is a promising protection layer thereby ensuring the performance and long-term stability of CZT detectors.

Keywords

Acknowledgement

This work was supported by the National Research Foundation of Korea (NRF) grant funded by the Korea government (MSIT) (No.2018M2A2B3A01072384) and by Korea Institute of Energy Technology Evaluation and Planning (KETEP) grant funded by the Korea government (MOTIE) (20214000000070, Promoting of expert for energy industry advancement in the field of radiation technology).

References

  1. R.B. James, T.E. Schlesinger, J. Lund, M. Schieber, Semiconductors and Semimetals Semiconductors for Room Temperature Nuclear Detector Applications, Elsevier, New York, 1995.
  2. K.H. Kim, R. Tappero, A.E. Bolotinikov, A. Hossain, G. Yang, R.B. James, P. Fochuk, Long-term stability of ammonium-sulfide-and ammonium-fluoride-passivated CdMnTe detectors, J. Korean Phys. Soc. 66 (2015) 1532.
  3. K.H. Kim, G.S. Camarda, A.E. Bolotnikov, R.B. James, J. Hong, S. Kim, Improved carrier-transport properties of passivated CdMnTe crystals, J. Appl. Phys. 105 (2009), 093705.
  4. K. Kim, J.H. Won, S.H. Cho, J.H. Suh, P.K. Cho, J. Hong, Y.R. Han, S.U. Kim, Passivation of semi-insulating polycrystalline CdZnTe films, J. Korean Phys. Soc. 53 (2008) 317.
  5. J. Zazvorka, J. Franc, M. Statelov, J. Pekarek, M. Veis, P. Moravec, K. Masek, Optical and electrical study of CdZnTe surfaces passivated by KOH and NH4F solutions, Appl. Surf. Sci. 389 (2016) 1214.
  6. S.U. Egarievwe, A. Hossain, I.O. Okwechime, A.A. Egarievwe, D.E. Jones, U.N. Roy, R.B. James, Effects of chemical treatments on CdZnTe X-ray and gamma-ray detectors, IEEE Trans. Nucl. Sci. 63 (2016) 1091.
  7. S.U. Egarievwe, U.N. Roy, C.A. Goree, B.A. Harrison, J. Jones, R.B. James, Ammonium fluoride passivation of CdZnTeSe sensors for applications in nuclear detection and medical imaging, Sensors 19 (2019) 3271.
  8. M.J. Harrison, A. Kargar, A.C. Brooks, K.H. Carpenter, D.S. McGregor, Improved techniques for the fabrication of Frisch collar CdZnTe gamma ray spectrometers, IEEE Trans. Nucl. Sci. 56 (2009) 1671.
  9. Y.S. Shin, K.C. Cho, S.H. Lim, S. Chung, S.J. Park, C.I. Chung, D.C. Han, J.K. Chang, PDMS-based micro PCR chip with parylene coating, J. Micromech. Microeng. 13 (2003) 768.
  10. K.T. Chen, D.T. Shi, H. Chen, B. Granderson, M.A. George, W.E. Collins, A. Burger, Study of oxidized cadmium zinc telluride surfaces, J. Vac. Sci. Technol. A. 15 (1997) 850.
  11. G.W. Wright, R.B. James, D. Chinn, B.A. Brunett, R.W. Olsen, J. Van Scyoc, M. Clift, A. Burger, K. Chattopadhyay, D. Shi, R. Wingfield, Evaluation of NH4F/H2O2 effectiveness as a surface passivation agent for Cd1-xZnxTe crystals, Proc. SPIE 4141 (2000) 324.
  12. M.E. Ozsan, P.J. Sellin, P. Veeramani, S.J. Hinder, M.L.T. Monnier, G. Prekas, A. Lohstroh, M.A. Baker, Chemical etching and surface oxidation studies of cadmium zinc telluride radiation detectors, Surf. Interface. Anal. 42 (2010) 795.
  13. L. Marchini, A. Zappettini, E. Gombia, R. Mosca, M. Pavesi, Study of surface treatment effects on the metal-CdZnTe interface, IEEE Trans. Nucl. Sci. 56 (2009) 1823.
  14. K.H. Kim, V. Carcelen, A.E. Bolotnikov, G.S. Camarda, R. Gul, A. Hossain, G. Yang, Y. Cui, R.B. James, Effective surface passivation of CdMnTe materials, J. Electron. Mater. 39 (2010) 1015.
  15. D.E. Jones, S.U. Egarievwe, A. Hossain, I.O. Okwechime, M.L. Drabo, J. Hall, A.L. Adams, S.O. Babalola, G.S. Camarda, A.E. Bolotnikov, W. Chan, R.B. James, Study of surface passivation and Contact Deposition Techniques in CdZnTe X-Ray and gamma-ray detectors, IEEE. Nucl. Sci. Conf. R. (2012) 4124.