Journal of the Korean Crystal Growth and Crystal Technology (한국결정성장학회지)

The Korea Association of Crystal Growth (한국결정성장학회)
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Coating behavior of zirconia film fabricated by granule spray in vacuum

상온진공 과립분사에 의한 지르코니아 필름의 코팅거동

  • Tungalaltamir, Ochirkhuyag (Department of Materials Science and Engineering, Pukyong National University) ;
  • Kang, Young-Lim (Department of Materials Science and Engineering, Pukyong National University) ;
  • Park, Woon-Ik (Department of Materials Science and Engineering, Pukyong National University) ;
  • Park, Dong-Soo (Functional Materials Group, Korea Institute of Machinery and Materials) ;
  • Park, Chan (Department of Materials Science and Engineering, Pukyong National University)
  • ;
  • 강영림 (부경대학교 재료공학과) ;
  • 박운익 (부경대학교 재료공학과) ;
  • 박동수 (재료연구소 기능성재료그룹) ;
  • 박찬 (부경대학교 재료공학과)
  • Received : 2022.09.14
  • Accepted : 2022.09.22
  • Published : 2022.10.31
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Abstract

The Granule Spray in Vacuum (GSV) process is a method of forming a dense nanostructured ceramic coating film by spraying ceramic granules on a substrate at room temperature in a vacuum. In the Granule Spray, the granules made by agglomerating particles with the size from submicrometer to micrometer can be sprayed into the substrate. Once the granules were squashed upon collision with the substrate, they become several dozens of nanometer-sized crystals in vacuum process. The zirconia of the monoclinic phase transform into tetragonal phase at 1150℃. At this time, its volume is changed by about 6.5 %. For this reason, it is widely held that it is difficult to acquire a compact of monoclinic zirconia sinter. In this study, the effect of particle treatment temperature and standoff distance on the substrate of zirconia granules were investigated in GSV. Also, particle treatment temperature, standoff distance, coating efficiency, and microstructure of the film were considered in forming the monoclinic zirconia coating film in GSV without any heating process. The deposited films exhibited monoclinic zirconia phase without any other detectable phase by X-ray diffractometer (XRD).

GSV (Granule Spray in Vacuum)는 상온의 진공하에서 나노 크기의 치밀한 세라믹 코팅층을 형성하는 방법이다. 일반적으로, 단사정의 지르코니아는 1150℃에서 정방정으로 변태하며, 이때 6.5 %의 체적변화를 일으켜 치밀한 단사정의 지르코니아를 만들기 어렵다. 본 연구에서는 코팅 효율에 대한 두 가지 처리 변수의 효과를 조사하는 데 중점을 두었다. 아울러, 특별한 가열과정 없이 형성된 필름의 미세구조에 관찰하였다. 샘플 기판에 증착된 지르코니아 필름에 대한 X-ray diffractometer (XRD) 분석은 단사정 지르코니아 필름이 성공적으로 증착되었음을 보여주었다.

Keywords

Acknowledgement

이 논문은 부경대학교 자율창의학술연구비(2021년)에 의하여 연구되었음.

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