한국결정성장학회지 (Journal of the Korean Crystal Growth and Crystal Technology)

  • 제33권6호
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  • Pages.261-267
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  • 2023
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  • 1225-1429(pISSN)
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  • 2234-5078(eISSN)
한국결정성장학회 (The Korea Association of Crystal Growth)
권호 표지
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MgO가 첨가된 (Ca,Sr)(Zr,Ti)O3의 결정구조, 미세구조 및 저손실 유전특성

Crystal structure, microstructure, and low-loss dielectric property of MgO-added (Ca,Sr)(Zr,Ti)O3

  • 이도혁 (경상국립대학교 나노.신소재공학부 세라믹공학전공) ;
  • 문경석 (경상국립대학교 나노.신소재공학부 세라믹공학전공)
  • Do-Hyeok Lee (School of Materials Science & Engineering, Gyeongsang National University) ;
  • Kyoung-Seok Moon (School of Materials Science & Engineering, Gyeongsang National University)
  • 투고 : 2023.10.17
  • 심사 : 2023.11.06
  • 발행 : 2023.12.31
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초록

마이크로파 유전체 적용을 위해 (Ca, Sr)(Zr, Ti)O3 (CSZT) 계에서 MgO 첨가에 따른 결정 구조, 미세 구조, 및 유전 특성을 연구하였다. 고상 반응법을 통해 합성된 CSZT 분말은 orthorhombic 단일상을 형성하였다. CSZT의 시편을 각각 1200℃, 1300℃ 및 1400℃에서 소결하였고, 소결 후 모든 시편은 orthorhombic 단일상을 확인하였다. 또한 모든 소결 시편은 온도가 증가함에 따라 입자 크기가 증가하였다. 1 mol% MgO를 첨가한 시편의 경우도 소결 이후에 orthorhombic 구조를 갖는 것을 확인하였다. EDS 분석을 통해 1400℃에서 소결 중에 이차상이 형성된 것을 확인하였다. MgO 첨가된 CSZT의 입자크기분포와 치밀화는 첨가하지 않은 경우와 거의 유사했으나, 입자크기분포가 좁아지며 균일해지는 것을 확인하였다. MgO 첨가된 CSZT는 1 k Hz에서 εr = 34.14, tanδ = 0.00047, τε = -3.58 ppm/℃로 우수한 저손실 유전 특성을 가졌다.

Crystal structure, microstructure, and dielectric properties of the (Ca, Sr)(Zr, Ti)O3 (CSZT) system has been studied as a function of sintering temperature and MgO addition for microwave applications. A single-phase CSZT powder with the orthorhombic crystal structure was obtained by the solid-state reaction method. The powder compacts were sintered at 1200℃, 1300℃, and 1400℃ respectively. All the sintered samples had a single-phase orthorhombic crystal structure and grain size increased with sintering temperature. In the case of 1 mol% MgO addition, the orthorhombic crystal structure was the main phase; however, a secondary phase appeared during sintering at 1400℃, as determined by EDS analysis. At 1400℃, the undoped and MgO-doped CSZT had almost similar grain size distribution and densification but the grain size distribution became slightly narrow. The MgO-doped CSZT showed excellent low-loss dielectric properties: εr = 34.14, tanδ = 0.00047, τε = -3.58 ppm/℃ at 1 MHz.

키워드

과제정보

본 연구는 산업통상자원부의 소재부품패키지형기술개발사업(Grant No. 20010938) 및 과학기술정보통신부의 정보통신기획평가원(IITP) 과제(Grant No. 2021-0-00793)의 지원을 받아 수행된 연구 결과로 이에 감사드립니다.

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