반도체디스플레이기술학회지 (Journal of the Semiconductor & Display Technology)

한국반도체디스플레이기술학회 (The Korean Society Of Semiconductor & Display Technology)
권호 표지

2차원 동역학 시뮬레이션을 활용한 부분적으로 자화된 용량성 결합 플라즈마 전산 모사

2D Kinetic Simulation of Partially Magnetized Capacitively Coupled Plasma Sources

  • 손성현 (서울대학교 에너지시스템공학부) ;
  • 박준범 (서울대학교 에너지시스템공학부) ;
  • 정경재 (서울대학교 에너지시스템공학부)
  • Sung Hyun Son (Department of Energy Systems Engineering, Seoul National University) ;
  • Junbeom Park (Department of Energy Systems Engineering, Seoul National University) ;
  • Kyoung-Jae Chung (Department of Energy Systems Engineering, Seoul National University)
  • 투고 : 2023.03.09
  • 심사 : 2023.03.16
  • 발행 : 2023.03.31
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초록

Partially magnetized capacitively coupled plasma (CCP) sources are investigated using a two-dimensional kinetic simulation code named EDIPIC-2D. A converging numerical solution was obtained for CCP with a 60 MHz power source, while properly capturing the dynamics of electrons and power absorption over a single RF period. The effects of magnetic fields with different orientations were evaluated. Axial magnetic fields caused changes in the spatial distribution of plasma density, affecting the loss channel. Transverse magnetic fields enhanced stochastic heating near the powered electrode, leading to an increase in plasma density while the significant E×B drift loss compensated for this rise.

키워드

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