Korean Journal of Materials Research (한국재료학회지)

Materials Research Society of Korea (한국재료학회)
권호 표지
DOI QR코드

DOI QR Code

Influence of Fluorine Doping on Hardness and Compressive Stress of the Diamond-Like Carbon Thin Film

  • Sayed Mohammad Adel Aghili (Department of Materials Science and Engineering, Marvdasht Branch, Islamic Azad University) ;
  • Raheleh Memarzadeh (Department of Materials Science and Engineering, Marvdasht Branch, Islamic Azad University) ;
  • Reza Bazargan Lari (Department of Materials Science and Engineering, Marvdasht Branch, Islamic Azad University) ;
  • Akbar Eshaghi (Department of Materials Engineering, Malek Ashtar University of Technology)
  • Received : 2023.01.25
  • Accepted : 2023.03.22
  • Published : 2023.04.27
Download PDF
⟨ Previous Next ⟩

Abstract

This study assessed the influences of fluorine introduced into DLC films on the structural and mechanical properties of the sample. In addition, the effects of the fluorine incorporation on the compressive stress in DLC films were investigated. For this purpose, fluorinated diamond-like carbon (F-DLC) films were deposited on cobalt-chromium-molybdenum substrates using radio-frequency plasma-enhanced chemical vapor. The coatings were examined by Raman scattering (RS), Attenuated total reflectance Fourier transform infrared spectroscopic analysis (ATR-FTIR), and a combination of elastic recoil detection analysis and Rutherford backscattering (ERDA-RBS). Nano-indentation tests were performed to measure hardness. Also, the residual stress of the films was calculated by the Stony equation. The ATR-FTIR analysis revealed that F was present in the amorphous matrix mainly as C-F and C-F2 groups. Based on Raman spectroscopy results, it was determined that F made the DLC films more graphitic. Additionally, it was shown that adding F into the DLC coating resulted in weaker mechanical properties and the F-DLC coating exhibited lower stress than DLC films. These effects were attributed to the replacement of strong C = C by feebler C-F bonds in the F-DLC films. F-doping decreased the hardness of the DLC from 11.5 to 8.8 GPa. In addition, with F addition, the compressive stress of the DLC sample decreased from 1 to 0.7 GPa.

Keywords

References

  1. W. Liao, C. R. Lin, D. Wei, Y. R. Shen, Y. C. Li, J. A. Lee and C. Y. Liang, J. Biomed. Mater. Res., 100, 3151 (2012).
  2. G. Dearnaley and J. H. Arps, Surf. Coat. Technol., 200, 2518 (2005).
  3. J. Corona-Gomez, S. Shiri, M. Mohammadtaheri and Q. Yang, Surf. Coat. Technol., 332, 120 (2017).
  4. D. K. Rajak, A. Kumar, A. Behera and P. L. Menezes, Appl. Sci., 11, 4445 (2021).
  5. A. Muthuraja, S. Naik, D. K. Rajak and C. I. Pruncu, Diamond Relat. Mater., 100, 107588 (2019).
  6. K. Yonezawa, M. Kawaguchi, A. Kaneuji, T. Ichiseki, Y. Iinuma, K. Kawamura, K. Shintani, S. Oda, M. Taki and N. Kawahara, J. Antibiot., 9, 495 (2020).
  7. P. Safaie, A. Eshaghi and S. R. Bakhshi, Diamond Relat. Mater., 70, 91 (2016).
  8. P. Wang, X. Wang, T. Xu, W. Liu and J. Zhang, Thin Solid Films, 515, 6899 (2007).
  9. D. Koshel, H. Ji, B. Terreault, A. Cote, G. G. Ross, G. Abel and M. Bolduc, Surf. Coat. Technol., 173, 161 (2003).
  10. M. Toyonaga, T. Hasebe, S. Maegawa, T. Matsumoto, A. Hotta and T. Suzuki, Diamond Relat. Mater., 119, 108558 (2021).
  11. Z. Q. Yao, P. Yang, N. Huang, H. Sun and J. Wang, Appl. Surf. Sci., 230, 172 (2004).
  12. F. R. Marciano, E. C. Almeida, D. A. Lima-Oliveira, E. J. Corat and V. J. Trava-Airoldi, Diamond Relat. Mater., 19, 537 (2010).
  13. J. Wang, J. Ma, W. Huang, L. Wang, H. He and C. Liu, Surf. Coat. Technol., 316, 22 (2017).
  14. T. Imai, T. Harigai, T. Tanimoto, R. Isono, Y. Iijima, Y. Suda, H. Takikawa, M. Kamiya, M. Taki and Y. Hasegawa, Vacuum, 167, 536 (2019).
  15. S. Onodera, S. Fujii, H. Moriguchi, M. Tsujioka and K. Hirakuri, Diamond Relat. Mater., 107, 107835 (2020).
  16. D. Ren, Ph. D. Thesis (in English), p. 25-38, University of Dundee, Dundee, Scotland (2015).
  17. M. Ishihara, T. Kosaka, T. Nakamura, K. Tsugawa, M. Hasegawa, F. Kokai and Y. Koga, Diamond Relat. Mater., 15, 1011 (2006).
  18. T. Hasebe, S. Nagashima, A. Kamijo, T. Yoshimura, T. Ishimaru, Y. Yoshimoto, S. Yohena, H. Kodama, A. Hotta and K. Takahashi, Thin Solid Films, 516, 299 (2007).
  19. H. Schulz, M. Leonhardt, H. J. Scheibe and B. Schultrich, Surf. Coat. Technol., 200, 1123 (2005).
  20. H. Ishige, S. Akaike, T. Hayakawa, M. Hiratsuka and Y. Nakamura, Dent. Mater. J., 38, 424 (2019).
  21. L. Liu, W. Tang, Q. Ruan, Z. Wu, C. Yang, S. Cui, Z. Ma, R. Fu, X. Tian and R. Wang, Surf. Coat. Technol., 404, 126468 (2020).
  22. P. J. Martin, A. Bendavid, M. Swain, R. P. Netterfield, T. J. Kinder, W. G. Sainty, D. Drage and L. Wielunski, Thin Solid Films, 239, 181 (1994).
  23. L. Zhang, F. Wang, L. Qiang, K. Gao, B. Zhang and J. Zhang, RSC Adv., 5, 9635 (2015).
  24. G. D. Fu, E. T. Kang and K. G. Neoh, J. Phys. Chem., 107, 13902 (2003).
  25. K. P. Huang, P. Lin and H. C. Shih, J. Appl. Phys., 96, 354 (2004).
  26. N. M. Mackie, D. G. Castner and E. R. Fisher, Langmuir, 14, 1227 (1998).
  27. G. Chen, J. Zhang and S. Yang, Electrochem. Commun., 10, 7 (2008).
  28. D. C. Marra and E. S. Aydil, J. Vac. Sci. Technol., A, 15, 2508 (1997).
  29. A. C. Ferrari and J. Robertson, Philos. Trans. R. Soc., A, 362, 2477 (2004).
  30. A. C. Ferrari and J. Robertson, J. Phys., 61, 14095 (2000).
  31. J. Robertson, Phys. Rev. Lett., 68, 220 (1992).
  32. A. C. Ferrari, J. Robertson, M. G. Beghi, C. E. Bottani, R. Ferulano and R. Pastorelli, Appl. Phys. Lett., 75, 1893 (1999).
  33. M. Samadi, A. Eshaghi, S. R. Bakhshi and A. A. Aghaei, Opt. Quantum Electron., 50, 1 (2018).
  34. F. L. Freire Jr, M. Costa, L. G. Jacobsohn and D. F. Franceschini, Diamond Relat. Mater., 10, 125 (2001).
  35. X. Ma, G. Tang and M. Sun, Surf. Coat. Technol., 201, 7641 (2007).
  36. L. G. Jacobsohn, M. Costa, V. J. Trava-Airoldi and F. L. Freire, Diamond Relat. Mater., 12, 2037 (2003).
  37. A. Grill and D. Patel, Diamond Relat. Mater., 2, 1519 (1993).
  38. K. Q. Al-Hamad, M. Al-Omari, A. Al-Wahadni and A. Darwazeh, J. Contemp. Dent. Pract., 7, 29 (2006).
  39. K. Al Hamad, M. M. Qadan and A. M. Al Wahadni, J. Esthetic Restor. Dent., 28, S56 (2016).
  40. J. Mussig and N. Graupner, A Critical Review. Rev. Adhes. Adhes., 8, 68 (2021).
  41. P. Brown and P. Mazumder, Rev. Adhes. Adhes., 9, 123 (2021).
  42. C. Della Volpe and S. Siboni, Rev. Adhes. Adhes., 10, 47 (2022).
  43. M. Ghasemvand, B. Behjat and S. E. Ebrahimi, J. Adhes., 98, 1 (2022).
  44. A. K. Netam, V. P. Bhargava, R. Singh and P. Sharma, J. Complementary Med. Res., 12, 204 (2021).
  45. S. D. Wani and A. Mundada, Int. J. Pharm. Res. Technol., 11, 1 (2021).
  46. M. S. Sabzi, H. M. Anijdan, M. Shamsodin, M. Farzam, A. Hojjati-Najafabadi, P. Feng, N. Park and U. Lee, Coatings, 13, 188 (2023).