Journal of the Semiconductor & Display Technology (반도체디스플레이기술학회지)

The Korean Society Of Semiconductor & Display Technology (한국반도체디스플레이기술학회)
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Trajectory Tracking Controller for Semiconductor Equipment Motors based on PI Observer

PI 관측기 기반 반도체 장비 모터의 궤적 추종 제어기 설계

  • Yun Seong Cho (Department of Electrical Engineering, Myongji University) ;
  • Hyeon Jun Choi (Department of Electronics Engineering, Myongji University) ;
  • Sang Min Jeon (Department of Electrical Engineering, Myongji University) ;
  • Ji Hoon Shin (Department of Electrical Engineering, Myongji University) ;
  • Jae Young Lee (Department of Electrical Engineering, Myongji University) ;
  • Bum Joo Lee (Department of Electrical Engineering, Myongji University) ;
  • Young Ik Son (Department of Electrical Engineering, Myongji University)
  • 조윤성 (명지대학교 전기공학과) ;
  • 최현준 (명지대학교 전자공학과) ;
  • 전상민 (명지대학교 전기공학과) ;
  • 신지훈 (명지대학교 전기공학과) ;
  • 이재영 (명지대학교 전기공학과) ;
  • 이범주 (명지대학교 전기공학과) ;
  • 손영익 (명지대학교 전기공학과)
  • Received : 2023.06.04
  • Accepted : 2023.06.21
  • Published : 2023.06.30
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Abstract

This paper presents a robust position tracking controller for a motor used in semiconductor equipment, utilizing the motor angle measurement. Precise position control is challenging due to the presence of uncertainties in various motor applications. The proposed controller consists of a PD (Proportional-Derivative) controller and a PIO (Proportional-Integral Observer) to estimate the system's state and equivalent disturbance compensating for the uncertainties. Since the stability alternates as the observer gain increases, we have investigated it through the closedloop root locus under the system parameters change. The analysis has showed that the inertia of the motor is the main parameter that affects it, and by adjusting the control gain appropriately, the system can be rendered to be stable even when the inertia of the motor changes. The effectiveness of the proposed control algorithm is validated through computer simulations, followed by a comparison of its performance with the results of a previous study.

Keywords

Acknowledgement

이 논문은 2023년도 부처협업형 반도체전공트랙 사업을 통해 한국산업기술진흥원 (G02P18800005501) 의 지원을 받아 수행된 연구이며, 연구 수행에 도움을 주신 명지대학교 홍상진 교수님께 감사드립니다

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