Journal of the Semiconductor & Display Technology (반도체디스플레이기술학회지)

The Korean Society Of Semiconductor & Display Technology (한국반도체디스플레이기술학회)
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A Study on the Development of Mist-CVD Equipment Using the ADRIGE Algorithm of the Problem-Solving Method TRIZ

문제해결기법 TRIZ의 ADRIGE 알고리즘을 이용한 초음파분무화학기상증착 장비 개발에 관한 연구

  • Joohwan Ha (Advanced Electronic Materials Laboratory, Advanced Institute of Convergence Technology, Seoul National University) ;
  • Seokyoon Shin (Advanced Electronic Materials Laboratory, Advanced Institute of Convergence Technology, Seoul National University) ;
  • Changwoo Byun (Advanced Electronic Materials Laboratory, Advanced Institute of Convergence Technology, Seoul National University)
  • 하주환 (서울대학교 차세대융합기술연구원 차세대전자재료연구실) ;
  • 신석윤 (서울대학교 차세대융합기술연구원 차세대전자재료연구실) ;
  • 변창우 (서울대학교 차세대융합기술연구원 차세대전자재료연구실)
  • Received : 2023.06.16
  • Accepted : 2023.06.20
  • Published : 2023.06.30
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Abstract

This study the problem of deposition uniformity observed during Mist-CVD deposition experiments. The TRIZ's ADRIGE algorithm, a problem-solving technique, is utilized to systematically analyze the issue and propose solutions. Through problem and resource analysis, technical contradictions are identified regarding the precursor's volume and its path when it encounters the substrate. To resolve these contradictions, the concept of applying the principle of dimensional change to transform the precursor's three-dimensional path into a one-dimensional path is suggested. The chosen solution involves the design of an enhanced Mist-CVD system, which is evaluated for feasibility and analyzed using computational fluid dynamics. The analysis confirms that the deposition uniformity consistently follows a pattern and demonstrates an improvement in uniformity. The improved Mist-CVD equipment is validated through analysis, providing evidence of its feasibility and yielding satisfactory results.

Keywords

References

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