한국전기전자재료학회논문지 (Journal of the Korean Institute of Electrical and Electronic Material Engineers)

  • 제37권2호
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  • Pages.169-174
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  • 2024
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  • 1226-7945(pISSN)
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  • 2288-3258(eISSN)
한국전기전자재료학회 (The Korean Institute of Electrical and Electronic Material Engineers)
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FTS로 증착된 AZO 박막의 두께에 따른 구조적, 전기적, 광학적 특성 변화

Changes in Structural, Electrical, and Optical Properties Depending on the Thickness of AZO Thin Films Deposited with FTS

  • Haechan Kim (Department of Electrical Engineering, Gachon University) ;
  • Hyungmin Kim (Department of Electrical Engineering, Gachon University) ;
  • Seongmin Shin (Department of Electrical Engineering, Gachon University) ;
  • Kyunghwan Kim (Department of Electrical Engineering, Gachon University) ;
  • Jeongsoo Hong (Department of Electrical Engineering, Gachon University)
  • 투고 : 2023.11.06
  • 심사 : 2023.12.05
  • 발행 : 2024.03.01
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초록

In this study, the structural, electrical, and optical properties of AZO films of various thicknesses are compared. The AZO films were deposited on a glass substrate by FTS (Facing-Target-Sputtering) This research was conducted to find the optimal thickness for Transparent Conductive Oxide (TCO). AZO has suitable properties for TCO such as low resistivity, and high transmittance. Thin films of all thicknesses showed a transmittance of over 80% in the visible light region and electrical properties improved as thickness increased. It was confirmed that the film of 300 nm thick had the best performance due to its low resistivity, and uniform surface. This research is expected to help find optimal conditions in various fields where TCO is used, such as solar cells, displays, and sensors in the future.

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과제정보

이 연구는 2023년도 산업통상자원부 및 산업기술평가관리원(KEIT) 연구비 지원(RS-2023-00227306) 및 2022년도 정부(산업통상자원부)의 재원으로 한국산업기술진흥원의 지원을 받아 수행된 연구임(P0012451, 2022년 산업혁신인재성장지원사업).

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