한국전기전자재료학회논문지 (Journal of the Korean Institute of Electrical and Electronic Material Engineers)

  • 제37권2호
  • /
  • Pages.188-194
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  • 2024
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  • 1226-7945(pISSN)
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  • 2288-3258(eISSN)
한국전기전자재료학회 (The Korean Institute of Electrical and Electronic Material Engineers)
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Optimized O2 Plasma Surface Treatment for Uniform Sphere Lithography on Hydrophobic Photoresist Surfaces

  • Yebin Ahn (Department of Chemical Engineering, Kangwon National University) ;
  • Jongchul Lee (Department of Chemical Engineering, Kangwon National University) ;
  • Hanseok Kwon (Department of Chemical Engineering, Kangwon National University) ;
  • Jungbin Hong (Department of Chemical Engineering, Kangwon National University) ;
  • Han-Don Um (Department of Chemical Engineering, Kangwon National University)
  • 투고 : 2023.12.17
  • 심사 : 2024.01.02
  • 발행 : 2024.03.01
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초록

This paper introduces an optimized oxygen (O2) plasma surface treatment technique to enhance sphere lithography on hydrophobic photoresist surfaces. The focus is on semiconductor manufacturing, particularly the creation of finer structures beyond the capabilities of traditional photolithography. The key breakthrough is a method that makes substrate surfaces hydrophilic without altering photoresist patterns. This is achieved by meticulously controlling the O2 plasma treatment duration. The result is the consistent formation of nano and microscale patterns across large areas. From an academic perspective, the study deepens our understanding of surface treatments in pattern formation. Industrially, it heralds significant progress in semiconductor and precision manufacturing sectors, promising enhanced capabilities and efficiency.

키워드

과제정보

This study was supported by 2021 Research Grant from Kangwon National University. This work was also supported by the National Research Foundation of Korea (NRF) grant funded by the Korea government (MSIT) (No.2022R1C1C1010025). Following are the results of a study on the 'Leaders in INdustry-university Cooperation 3.0' Project, supported by the Ministry of Education and National Research Foundation of Korea.

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