Applied Chemistry for Engineering (공업화학)

The Korean Society of Industrial and Engineering Chemistry (한국공업화학회)
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Mechanical Analysis of High-Aspect Ratio Anodic Aluminum Oxide by Parylene Deposition

페럴린 증착에 따른 고종횡비 양극산화알루미늄의 기계적 특성 분석

  • Minkyo Jeong (Department of Intelligent Nano Semiconductor, Hanbat National University) ;
  • Hyun-Bin Kim (Department of Creative Convergence Engineering, Hanbat National University) ;
  • Seung-Yo Baek (Department of Creative Convergence Engineering, Hanbat National University) ;
  • Juhwan Lee (Department of Creative Convergence Engineering, Hanbat National University) ;
  • Eun-Jeong Jang (Department of Electronic Engineering, Hanbat National University) ;
  • Tae-Sun Kim (HEXAPRO Co., Ltd.) ;
  • Jae-Hyun Lee (Department of Creative Convergence Engineering, Hanbat National University)
  • 정민교 (한밭대학교 지능형나노반도체학과) ;
  • 김현빈 (한밭대학교 창의융합학과) ;
  • 백승요 (한밭대학교 창의융합학과) ;
  • 이주환 (한밭대학교 창의융합학과) ;
  • 장은정 (한밭대학교 전자공학과) ;
  • 김태선 (주식회사 헥사프로) ;
  • 이재현 (한밭대학교 창의융합학과)
  • Received : 2025.08.09
  • Accepted : 2025.09.01
  • Published : 2025.10.10
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Abstract

This study presents an approach to enhance the mechanical properties of anodic aluminum oxide (AAO) with high aspect ratio nanopores by depositing parylene-C. Using a chemical vapor deposition method, parylene-C was deposited into the AAO substrates. The structural and compositional properties were analyzed via scanning electron microscopy (SEM) and energy-dispersive X-ray spectroscopy. Mechanical properties were evaluated through three-point bending tests to measure fracture load and stress. The fracture stress increased by up to 3.7 times after parylene-C deposition, attributed to the reinforcement of pore walls. Specifically, the fracture stress improved from 39.4 MPa to over 80 MPa, which exceeds the mechanical threshold commonly required in industrial applications. These findings demonstrate that parylene-C effectively strengthens the nanostructure without clogging pores, offering a practical strategy to improve the mechanical stability of porous nanomaterials. This work makes a significant contribution by overcoming the inherent structural limitations of porous nanomaterials and is expected to serve as foundational data for the design of high-durability devices.

본 연구는 고종횡비의 나노기공을 갖는 양극산화알루미늄에 parylene-C를 증착하여 기계적 물성을 향상시키는 방안을 제시한다. 화학 기상 증착을 통해 parylene-C를 증착한 후, 주사전자현미경 및 에너지분산형 X선분광기를 이용해 구조 및 성분 변화를 분석하였다. 또한 3점 굽힘 시험을 통해 파단 하중과 응력을 정량적으로 측정하였다. 실험 결과, 증착량이 증가할수록 파단 응력이 최대 약 3.7 배 향상되었다. 이는 parylene-C가 기공 벽면을 따라 균일하게 증착되어 구조적 강성을 효과적으로 보강한 것으로 해석된다. 본 연구는 다공성 나노소재의 구조적 취약성을 극복할 수 있는 실용적인 접근법을 제시하며, 기존 응용의 한계였던 약 39.4 MPa 수준의 파단 응력을 산업적 요구 수준인 80 MPa 이상으로 향상시킨 점에서 높은 실용적 기여도를 갖는다. 이는 향후 고내구성 소자 설계에 있어 핵심 기초 자료로 활용될 수 있다.

Keywords

Acknowledgement

이 논문은 국가의 지원을 받아 수행된 연구입니다. (과제번호, RS-2024-00467414 2024년 디딤돌과제 창업성장기술개발사업)

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