연료전지는 화학에너지를 전기에너지로 직접 변환시키는 전력 변환 장치로써, 수명이 길고 에너지 밀도가 높아 기존의 축전지 대체 에너지원으로 많은 연구가 이루어지고 있다. 최근 소형 휴대용 전자기기용 전원으로 개발되고 있는 마이크로 직접메탄올 연료전지는 연료의 취급이 용이하고, 운전온도가 낮기 때문에 초소형화가 가능하다. 이러한 여러 가지 장점을 가진 직접메탄올 연료전지를 기반으로 하는 마이크로 연료 전지(Micro fuel cell)의 구성과 개발 현황 및 응용에 대하여 기술하였다.

휴대이동전화의 고성능화, 소형화에 따라서 전자부품들은 고집적화가 요구되고 있다. 이에 따라서 많은 수의 수동부품을 회로 기판 내에 내장화하기 위한 LTCC(Low Temperature Cofired Ceramic: 저온동시소성)기술이 적용된 부품의 출현이 계속되고 있다. 본 연구에서는 이러한 저온동시소성 기술을 활용하여 제품을 개발하기 위해서 고주파수 대역의 소자의 특성을 측정 하였다. 측정된 소자의 특성을 적용하기 위해서 소자 쿠폰을 제작하으며 고주파 회로 분석과 시뮬레이션 결과를 통해서 수동소자가 내장된 PAM( 전력증폭기), FBAR용 모듈 기판을 제작하였다.

Ozone is a strong and useful oxidizing gas for the fabrication of oxide thin films. In order to obtain high quality oxide thin films, higher ozone concentration is necessary. In this paper an ozone condensation system was evaluated from the viewpoint of an ozone supplier for oxide thin film growth. Ozone was condensed by an adsorption method and the ozone concentration reached 8.5 mol% in 2.5 h after the beginning of the ozone condensation process, indicating high effectiveness of the condensation process. Ozone was continuously desorbed from the silica gel by the negative pressure. We found the decomposition in the ozone concentration negligible if the condensed ozone is transferred from the ozone condensation system to the film growth chamber within a few minutes.

Recently, the development of diagnosis technique with high confidence is important on power equipment, for this reason is to use for measurement and analysis of PD with prior appearance of insulation breakdown In this paper, we presents the analysis of trouble signal to use both method of general analysis of $\Phi$-Q-N in PD and statistical parameter by this interpretation Equipment of simulation has made independently DS for 170kV GIS of one phase with same on field. The detected signal through the sensor of Induction and Acoustic Emission is classified which used to characteristic neural network algorithm and then it is analysis.

Endovaginal and endorectal receiver only surface coil were designed for MR imaging(MRI) and $^1H$ MR spectroscopy(MRS) for the uterine cervix and the prostate. The shape of endovaginal coil wire was rectangular with round comer. The shape of endorectal coil wire was long elliptic shape during insertion and circular shape after insertion. Conventional spin echo and fast spin echo sequences were used as T1 and T2 weighted imaging sequences, respectively. 3D volume localized in vivo $^1H$ MR spectroscopy of the human cervix and prostate was performed using PRESS or STEAM localization method. Using home-built endvaginal and endorectal coils, excellent T1 and T2 images were obtained to visualize early cervical and prostate tumors. 3D volume localized in vivo $^1H$ MRS was useful to differentiate the cancerous tissue from the normal tissue.

The use of VPI impregnated mica tape as high voltage insulation for large rotating electric machines requires a careful balance of processes and materials to obtain the desired electrical, mechanical and thermal characteristics. The stator insulation systems such as epoxy bonded high voltage mica tape have been produced for many years. One such system employing an epoxy and anhydride impregnating resin developed by Hyundai Heavy Industries, Co. (hereafter, HHI), to satisfy customer requests for an epoxy bonded insulation system. HHI applies the following electrical and thermal evaluations such as dielectric breakdown, voltage endurance, dissipation factor vs. temperature, isothermal weight loss, and so on. A detailed laboratory evaluation can describe specific physical limitations for an insulation system and permit development of long-term operation guidelines that permit full utilization of the proposed system. HHI has found these evaluations very helpful in qualifying insulation system for the repair of both large motors and generators.

BiSrCaCuO thin films were fabricated by atomic layer-by-layer deposition using an ion beam sputtering method. 10 wt% and 90 wt% ozone mixed with oxygen were used with ultraviolet light irradiation to assist oxidation. At early stages of the atomic layer by layer deposition, two dimensional epitaxial growth which covers the substrate surface would be suppressed by the stress and strain caused by the lattice misfit, then three dimensional growth takes place. Since Cu element is the most difficult to oxidize, only Sr and Bi react with each other predominantly, and forms a buffer layer on the substrate in an amorphous-like structure, which is changed to $SrBi_2O_4$ by in-situ anneal.

BiSrCaCuO superconducting thin films have been fabricated by co-deposition using IBS(Ion Beam Sputtering) method. Despite setting the composition of thin film Bi2212 or Bi2223, in both cased, Bi2201, Bi2212 and Bi2223 phase were appeared. It was confirmed the obtained field of stabilizing phase was represented in the diagonal direction of the right below end in the Arrhenius plot of temperature of the substrate and $PO_3$ and it was distributed in the reeone.

Blending effects for generating a pretilt angle in nematic liquid crystal (NLC) with negative dielectric anisotropy on the blended polyimide (PI) of homeotropic and homogeneous alignment surface were studied. Also, we investigated the EO performances for the advanced VA-$\pi$ cell using this homeotropic blended PI surface. A many decrease of tilt angle on the polymer surface to blend homeotropic PI and homogeneous PI with side chain type was measured, and the tilt angle decreased as blended ratio and rubbing strength increase. The blended effects for generating a pretilt angle were clearly observed, and the many decrease of tilt angle can be achieved by using the blended PI surface. The electro-optical (EO) characteristics using the advanced VA-$\pi$ cell using the homeotropic blended PI surface than that of conventional VA cell can be improved. We suggest that the developed advanced VA-$\pi$ cell on a homeotropic blended PI surface is a promising technique for the achievement of a fast response time, and a high contrast ratio.

Electro-Optical (EO) performances for the ion beam (IB) aligned twisted-nematic (TN)-liquid crystal display (LCD) with ion beam exposure on the new of diamond like carbon (DLC) thin film surface were investigated. Voltage-transmittance (V-T) curve and response time without backflow bounce in the ion beam aligned TN-LCD with ion beam exposure for 0.5 and 1min on the DLC thin film was observed. Also. the fast response time of ion beam aligned TN-LCD with ion beam exposure for 1min on the DLC thin film surface can be achieved. The residual DC voltage of the ion beam aligned TN-LCD on the DLC thin film surface was almost the same as that of the rubbing aligned TN-LCD on the polyimide(PI) surface.

This paper presents Bi thin films have been fabricated by atomic layer-by-layer deposition and co-deposition at an IBS method. The growth rates of the films was set in the region from 0.17 to 0.27 nm/min. Mg(100) was used as a substrate. In order to appreciate stable existing region of Bi 2212 phase with temperature and ozone pressure, the substrate temperature was varied between 655 and $820^{\circ}C$ and the highly condensed ozone gas pressure$(PO_3)$ in vacuum chamber was varied between $2.0{\times}10^{-6}$ and $2.3{\times}10^{-5}$ Torr. Bi 2212 phase appeared in the temperature range of 750 and $795^{\circ}C$ and single phase of Bi 2201 existed in the lower region than $785^{\circ}C$. Whereas, $O_3$ dependance on structural formation was scarcely observed regardless of the pressure variation. And high quality of c-axis oriented Bi 2212 thin film with $T_c$(onset) of about 90 K and $T_c$(zero) of about 45 K is obtained. Only a small amount of CuO in some films was observed as impurity, and no impurity phase such as $CaCuO_2$ was observed in all of the obtained films.

Recently, there is a growing concern on the photovoltaic effects using organic materials. This is a phenomena which converts the solar energy into the electrical one. We have fabricated a device structure of ITO/PEDOT:PSS/CuPc/$C_{60}$/BCP/Al. The PEDOT:PSS layer is made by spin coating. and the other organic layers are made by thermal vapor deposition. By measuring the current-voltage characteristics with an illumination of light. we have obtained a value of $V_{oc}$=0.358V and $J_{sc}$=0.338mA/$cm^2$. A fill factor and efficiency are about 0.271 and 0.033%, respectively. A 500W xenon lamp(ORIEL) was used for a light source, and the light intensity illuminated into the device was about 10mW.

Mechanical Properties, such as tensile strength, elongation, and tear strength, decreased according to increasing the load of ATH, volume resistivity, AC break down strength, and tracking resistance for HVI SC contained ATH treated by vinyl Silane were better than those for HVI SC were contained ATH treated by other surface treatment agent, such as stearic acid and acryl silane.

The $Sr_{0.7}Bi_{2.6}Ta_2O_9$(SBT) thin films are deposited on Pt-coated electrode(Pt/$TiO_2/SiO_2$/Si) using RF magnetron sputtering method. The structural and electrical properties of SBT capacitors were influenced with annealing atmosphere. In the XRD pattern, the SBT thin films in all annealed atmosphere had (105) orientation. In the SEM images, Bi-layered perovskite phase was crystallized in all annealing atmosphere and grains largely grew in oxygen annealing atmosphere. The maximum remanent polarization and the coercive electric field in oxygen annealing atmosphere are $12.40[{\mu}C/cm^2]$ and 30[kV/cm] respectively. The fatigue characteristics of SBT capacitors did not change up to $10^{10}$ switching cycles.

The $Sr_{0.7}Bi_{2.6}Ta_2O_9$(SBT) thin films are deposited on Pt-coated electrode(Pt/$TiO_2/SiO_2$/Si) using RF magnetron sputtering method. The structural and electrical properties of SBT capacitors were influenced with annealing atmosphere. In the XRD pattern, the SBT thin films in all annealed atmosphere had (105) orientation. In the SEM images, Bi-layered perovskite phase was crystallized in all annealing atmosphere and grains largely grew in oxygen annealing atmosphere. The dielectric constant and leakage current density of capacitors annealed oxygen atmosphere are 340 and $2.13{\times}10^{-9}[A/cm^2]$ respectively.

산업의 고도화 및 환경오염의 문제로 1970년대부터 실리콘고무를 이용한 애자의 사용이 시도되기 시작되었다. 그로 인해 실리콘 고무의 표면열화에 대한 수많은 연구가 현재까지 행해지고 있다. 그러나 고온성 형압즉방식으로 제작하는 유기애자의 경우 제조시 발생할 수 있는 내부보이드에 대한 연구는 미흡한 현실이다. 이에 본 연구에서는 실리콘고무의 내부보이드의 형태변화에 따른 전기적열화특성을 연구하기 위하여 3층으로 적층시킨 실리콘 고무의 중간층에 임의적으로 4가지형태의 내부보이드를 성형하여 전압을 변화시키면서 방전전류 및 방전전력을 측정하였다. 그 결과, 보이드의 존재로 방전전류 및 방전전력의 증가를 볼 수 있었으며, 보이드형상의 내부각이 좁을수록 방전전류 및 방전전력값이 커지는 것을 볼 수 있었다.

SBT thin film for semiconductor device that is made by RF magnetron sputtering method studied electrical properties under various temperature condition. Dielectric constant who differ annealing condition appears highest in $750[^{\circ}C]$ and it is 213. Also, C-V properties by annealing temperature of SBT thin film for semiconductor device is no change almost to $600[^{\circ}C]$ and shows non-linear butterfly shape more than $650[^{\circ}C]$ Maximum capacitance and difference of smallest capacitance show the biggest difference in $750[^{\circ}C]$ as degree that domain wall motion contributes in ferrelectric polarization value in C-V characteristic curve of ferroelectric that this shows typical ferroelectric properties. Therefore, SBT thin film for semiconductor device that is annealing in $750[^{\circ}C]$ expressed the most superior electrical and ferroelectric properties.

The present paper is to investigate the phase stability and soft magnetic properties of amorphous CoNbZr films when Pd is added as a substitution for CoNbZr alloys. The films were prepared by a RF magnetron sputtering method. The CoNbZrPd films deposited on Si wafers exhibited amorphous structures being independent upon the amount of Pd added in the films. On the addition of 4.34% Pd, the excellent soft magnetic characteristics of the films were observed with a coercive force of 0.54 Oe and an anisotropy field of 11 Oe, whereas a coercive force of 1 Oe and an anisotropy field of 3.5 Oe were shown in the film without the addition of Pd. The increased anisotropy field and low coercive force of the films may be attributed to the occupancy of Pd in the preferred sites parallel to the external magnetic field applied on the deposition process. A permeability of about 1100 was kept constant in the operation frequency ranging up to 100 MHz, which can be explained by the Landau-Lifshitz formula.

In this paper, it presents a method to calculate the escape frequency factor$(\nu)$ and its verification from TSC(Thermally Stimulated Current) equation and their simulation curves. To apply calculation method of $\nu$ using asymptotic estimation, it utilized TSC data with 1K interval. This method enables one to get the exact value of $\nu$ and activation energy at the same time by using computer programming. So, it regards their calculation method as a useful process to obtain the value of physical behavior.

$BaTiO_3$ ceramic thin films were manufactured by rf/dc magnetron sputter technique. We have investigated crystal structure, surface morphology and PTCR(positive-temperature coefficient of resistance) characteristics of the specimen depending on second heat-treatment temperatures. Second heat treatments of the specimen were performed in the temperature range of 400 to $1350^{\circ}C$. X-ray diffraction patterns of $BaTiO_3$ thin films show that the specimen heat treated below $600^{\circ}C$ is an amorphous phase and the one heat treated above $1100^{\circ}C$ forms a poly-crystallization. In the specimen heat-treated at $1300^{\circ}C$, a lattice constant ratio (c/a) was 1.188. Scanning electron microscope(SEM) image of $BaTiO_3$ thin films of the specimen heat treated in between 900 and $1100^{\circ}C$ shows a grain growth. At $1100^{\circ}C$, the specimen stops grain-growing and becomes a poly-crystallization.

CMP(chemical mechanical polishing) process has been attracted as an essential technology of multi-level interconnection. However, the COO(cost of ownership) is very high, because of high consumable cost. Especially, among the consumables, slurry dominates more than 40 %. So, we focused how to reduce the consumption of raw slurry. In this paper, We have studied the CMP (chemical mechanical polishing) characteristics of slurry by adding of raw alumina abrasive and annealed alumina abrasive. As a experimental results, we obtained the comparable slurry characteristics compared with original silica slurry in the view point of high removal rate and low non-uniformity. Therefore, we can reduce the cost of consumables(COC) of CMP process for ULSI applications.

Recently, CMP (Chemical mechanical polishing) technology has been widely used for global planarization of multi-level interconnection for ULSI applications. However, COO (cost of ownership) and COC (cost of consumables) were relatively increased because of expensive slurry. In this paper, we have studied the possibility of recycle of reused silica slurry in order to reduce the costs of CMP slurry. Also, we have collected the silica abrasive powders by filtering after subsequent CMP process for the purpose of abrasive particle recycling. And then, we annealed the collected abrasive powders to promote the mechanical strength of reduced abrasion force. Finally, we compared the CMP characteristics between self-developed KOH-based silica abrasive slurry and original slurry. As our experimental results, we obtained the comparable removal rate and good planarity with commercial products. Consequently, we can expect the saving of high cost slurry.

투어멀린(Tourmaline)은 비대칭 쌍극자를 가진 천연 유극성 결정체로 광물 중에서 영구전기분극을 띄고 있는 유일한 물질로써 일명 "전기석"이라고 알려져 있다. 분극에 의한 자체 미약전류(약 $60{\mu}A$)와 함께 음이온 및 원적외선의 발생으로 최근 우리주변에서 건강과 환경을 위한 관심고조의 대상인 육방정계의 압전성 및 초전성을 띄는 붕규산염(주요성분: Mg, Fe, B, Si, Ca)으로, 투어멀린 원석이나 그 복합세라믹체의 면역지수가 ~1000에서 ~400,000 이상인 점을 비롯하여 그 유용성을 이용하려는 새로운 아이디어 신상품들이 계속 개발되고 있다. 뿐만 아니라 물분자를 만나면 수소$(H^+)$와 수산기 $(OH^-)$로 전기분해 하여 친수기와 소수기 부분으로 구분하며, $H^+$와 $OH^-$는 각각 $H_2O$와 결합하여 활성이 강한 hydronium ion$(H_3O^+)$을 생성하고, 물 속에서 계속 불안정한 상태로 존재하는 수산기는 계면활성 작용이 있는 hydroxyl ion$(H_3O_2^-)$을 형성하여 물을 약 알카리성 (pH~7.4)으로 바꿔주며, 물분자 클러스터 세분화와 미네랄을 용출, 공급하여 이 물이 체내에 흡수되면 살균, 항균성의 면역기능을 갖게 되며, 혈액정화 기능과 자율신경 자극으로 교감신경의 흥분을 억제해 준다. 이와 함께 전기분극을 띈 투어멀린 입자는 다른 물질에 비하여 경이적 수치의 원적외선을 발생하여 강력한 열 효과와 높은 침투력으로 인체의 혈액순환 촉진과 혈전용해 작용을 주어 건강과 활력에 도움을 주는 것으로 확인되어 많은 관심을 끌고 있다. 따라서 유익한 이용가치를 인정받고 있는 천연 투어멀린을 단독 형태나 또는 서로 상승효과를 줄 수 있는 유용한 타 물질과 혼합물을 구성하여 성형 또는 EPD 방법으로 전착한 후 소결 처리하여, 소결체의 특성 분석과 함께 물에 대한 전기 화학적 작용 및 항균 효과를 조사, 확인하여 수질개선 효과를 분석하고 그 응용성을 개발, 확보하였다.

열을 발생하는 부품에 있어서 효과적으로 열방출 향상시키는 것은 부품의 신뢰성을 위해 중요한 사항이며, LTCC와 같은 고밀도 회로기판을 설계하는데 있어서 필수적으로 고려할 사항이다. 본 연구에서는 열전달을 향상시키기 위한 구조를 설계하였다. 또한, 열전달 효과를 조사하기 위해서 LTCC 기판 내에 열 비아 및 패드를 위치시킨 기판을 제작하였다. Laser Flash Method를 통해 재료의 열전도도 분석을 수행 하였다. 열비아 및 열방출을 위한 패드로 구성된 LTCC 기판의 열전도 특성은 순수 Ag 재료의 44%인 103 W/mK 특성 값을 나타내었다.