• Title/Summary/Keyword: AMLCD

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A Study on the Electrical Characteristics of Low Temperature Polycrystalline Thin Film Transistor(TFT) using Silicide Mediated Crystallization(SMC) (금속유도 결정화를 이용한 저온 다결정 실리콘 TFT 특성에 관한 연구)

  • 김강석;남영민;손송호;정영균;주상민;박원규;김동환
    • Proceedings of the Materials Research Society of Korea Conference
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    • pp.129-129
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    • 2003
  • 최근에 능동 영역 액정 표시 소자(Active Matrix Liquid Crystal Display, AMLCD)에서 고해상도와 빠른 응답속도를 요구하게 되면서부터 다결정 실리콘(poly-Si) 박막 트랜지스터(Thin Film Transistor, TFT)가 쓰이게 되었다. 그리고 일반적으로 디스플레이의 기판을 상대적으로 저가의 유리를 사용하기 때문에 저온 공정이 필수적이다. 따라서 새로운 저온 결정화 방법과 부가적으로 최근 디스플레이 개발 동향 중 하나인 대화면에 적용 가능한 공정인 금속유도 결정화 (Silicide Mediated Crystallization, SMC)가 연구되고 있다. 이 소자는 top-gated coplanar구조로 설계되었다. (그림 1)(100) 실리콘 웨이퍼위에 3000$\AA$의 열산화막을 올리고, LPCVD로 55$0^{\circ}C$에서 비정질 실리콘(a-Si:H) 박막을 550$\AA$ 증착 시켰다. 그리고 시편은 SMC 방법으로 결정화 시켜 TEM(Transmission Electron Microscopy)으로 SMC 다결정 실리콘을 분석하였다. 그 위에 TFT의 게이트 산화막을 열산화막 만큼 우수한 TEOS(Tetraethoxysilane)소스로 사용하여 실리콘 산화막을 1000$\AA$ 형성하였고 게이트는 3000$\AA$ 두께로 몰리브덴을 스퍼터링을 통하여 형성하였다. 이 다결정 실리콘은 3$\times$10^15 cm^-2의 보론(B)을 도핑시켰다. 채널, 소스, 드래인을 정의하기 위해 플라즈마 식각이 이루어 졌으며, 실리콘 산화막과 실리콘 질화막으로 passivation하고, 알루미늄으로 전극을 형성하였다 그리고 마지막에 TFT의 출력특성과 전이특성을 측정함으로써 threshold voltage, the subthreshold slope 와 the field effect mobility를 계산하였다.

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Electrical and Optical Properties of Al-doped ZnO Thin Films (Al-doped ZnO 투명 전도성 박막(TCO)의 전기적 광학적 특성)

  • Hong, Youn-Jeong;Lee, Kyu-Mann;Kim, In-Woo
    • Journal of the Semiconductor & Display Technology
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    • v.6 no.3
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    • pp.35-39
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    • 2007
  • ITO(Indium Tin Oxide) is the most attractive TCO(Transparent Conducting Oxide) materials for LCD, PDP, OLEDs and solar cell, because of their high optical transparency and electrical conductivity. However due to the shortage of indium resource, hard processing at low temperature, and decrease of optical property during hydrogen plasma treatment, their applications to the display industries are limited. Thus, recently the Al-doped ZnO(AZO) has been studied to substitute ITO. In this study, we have investigated the effect of different substrate temperature(RT, $150^{\circ}C$, $225^{\circ}C$, $300^{\circ}C$) and working pressure(10 mTorr, 20 mTorr, 30 mTorr, 80 mTorr) on the characteristics of AZO(2 wt.% Al, 98 wt.% ZnO) films deposited by RF-magnetron sputtering. We have obtained AZO thin films deposited at low temperature and all the deposited AZO thin films are grown as colunmar. The average transmittance in the visible wavelength region is over 80% for all the films and transmittance improved with increasing substrate temperature. Electrical properties of the AZO films improved with increasing substrate temperature.

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용액공정 기반의 Zinc Oxide 박막 트랜지스터의 제작 및 특성 평가

  • Hwang, Yeong-Hwan;Seo, Seok-Jun;Jeon, Jun-Hyeok;Bae, Byeong-Su
    • Proceedings of the Materials Research Society of Korea Conference
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    • pp.25.2-25.2
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    • 2009
  • 최근 아연산화물과 같은 무기산화물 박막 트랜지스터를 디스플레이의 구동 소자, RFID, 스마트 창으로 활용하기 위한 연구가 많이 이루어지고 있다. 특히, 산화아연 박막 트랜지스터는 기존의 비정질 실리콘이나 저온 제작된 다결정 실리콘을 active layer로 사용해 제작된 소자에 비하여 AMOLED나 AMLCD를 구동하기 충분한 전자 이동도, 환경적으로 안정한 특성을 보이고 비교적 저렴한 가격으로 제작 가능하며 넓은 밴드갭으로 인하여 가시광선 영역에서 투명한 특성을 보인다. 본 연구에서는 Zinc acetate dehydrate를 전구체로 사용하고 ethanolamine 을 솔 안정화제로 사용하여 간단하고 경제적인 솔-젤 방법을 통하여 Zinc Oixde (ZnO)를 active layer로 사용한 박막 트랜지스터를 제작하였다. ZnO 박막 트랜지스터는 전구체 용액을 기판 위에 스핀 코팅한 후 열처리 과정을 통하여 제작되었고 제작된 ZnO 박막 트랜지스터는 가시광선 영역에서 높은 투과도 (>90%) 를 보였다. 산화 아연 박막 트랜지스터의 특성을 향상 시키기 위하여 전구체 용액의 농도 조절, ZnO 박막의 두께 조절, 열처리 온도의 조절 등과 같은 연구를 수행하였다. 여러 공정 조건의 변화를 통하여 최적화된 ZnO 박막 트랜지스터는 전하 이동도가 9.4 cm^2/Vs, sub-threshold slope이 3.3 V/dec 그리고 on-to-off current ratio가 5.5${\times}$10^5로 디스플레이 소자를 구동하기 충분한 특성을 보였다.

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Joul-heating induced crystallization (JIC) for LTPS TFT-Backplanes

  • Hong, Won-Ui;No, Jae-Sang
    • Proceedings of the Korean Vacuum Society Conference
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    • pp.244-244
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    • 2010
  • 최근 활발히 연구되고 있는 AMOLED는 평판 디스플레이 분야를 이끌어 갈 차세대 선두 주자로 크게 주목 받고 있다. AMOLED는 전압 구동 방식인 AMLCD와 다르게 전류 구동 방식으로 a-Si TFT 보다 LTPS-TFT 사용이 요구되며, 대면적 기판으로 갈수록 결정립의 균일도가 매우 중요한 인자로 작용한다. 현재 양산이 가능한 AMOLED는 핸드폰이나 15인치 TV정도로 크기가 소형이며 대형 TV나 컴퓨터 모니터 등을 양산하기 위해 많은 방법이 시도되고 있다. 양산체제에서 사용되는 결정화 방법으로는 ELC가 가장 많은 부분을 차지하고 있다. 그러나 레이저를 사용하는 ELC 방법은 대면적으로 갈수록 레이저 빔 자체의 불균일성, shot to shot 불균일성, 레이저빔 중첩의 부정확도 등으로 인한 균일도의 부정확성이 커짐으로 인한 mura 현상이 나타나고 레이저 장비의 사용에 대한 비용 부담을 피할 수 없다. 따라서 non-laser 방식에 결정화 방법이 요구되나 SPC 경우는 상대적으로 고온에서 장시간이 걸리고, MIC 뿐만 아니라 MIC 응용 방법들은 금속 오염에 대한 문제가 발생하고 있는 실정이다. 이러한 문제로 인하여 결정립 크기의 균일도가 우수한 다결정 실리콘 박막을 제조하는 신기술에 대한 필요성이 매우 높은 실정이다. 본 연구에서는 비정질 실리콘 박막 상부 혹은 하부에 도전층을 개재하고, 상기 도전층에 전계를 인가하여 그것의 주울 가열에 의해 발생한 고열로 비정질 실리콘 박막을 급속 고온 고상 결정화하는 방법에 관한 기술인 JIC (Joule-heating Induced Crystallization) 결정화 공정을 개발하였다. 본 공정은 상온에서 수 micro-second 내에 결정화를 수행하는 것이 가능하며 도전층과 실리콘 박막 사이에 barrier층 삽입를 통하여 금속 오염을 막을 수 있으며 공정적인 측면에서도 별도의 chamber가 필요하지 않는 장점을 가지고 있다. 본 논문에서는 JIC 결정화 공정 조건에 따른 결정화 기구 및 JIC poly-Si의 미세구조 및 물리적 특성에 관한 논의가 이루어질 것이다.

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Adsorption Stabilization of $TiC_{2}$ Particles in Water Soluble Block Copolymers (수용성 블록공중합물에서 산화티탄 분말의 흡착 안정화)

  • Kwan, Soun-Il;Jeong, Hwan-Kyeong;Choi, Seung-Ok;Nam, Ki-Dae
    • Journal of the Korean Applied Science and Technology
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    • v.18 no.2
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    • pp.118-126
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    • 2001
  • Micelle formation and adsorption at the $Ti0_{2}$ interface of a series of polystyrene-polythylene oxide(PS-PEO) block copolymer in aqueous solution was studied using fluorescence probing and small-angle X-ray methods. Further, the stability of aqueous $Ti0_{2}$ dispersion in the presence of copolymer was investigated by microelectrophoresis, optical density and sedimentation measurements. The dissolution of pyrene as fluorescent probe in aqueous surfactant solution leads to a slow decrease of the $I_{1}/I_{3}$ ratio, as the copolymer concentration increase; $I_{1}$ and $I_{3}$ are respectively the intensities of the first and third vibrionic peaks in the pyrene fluorescence emission. The behaviour was due to the characteristics of the copolymers and/or to the copolymer association efficiency in water. Moreover, the adsorption at the plateau level increases with decreasing PEO until chain length. The zeta potential of $TiO_{2}$ particles decreases with increasing copolymer concentration and reaches a plateau value. Finally, stabilization using block copolymers was more effective with samples having higher weight fractions of PS block.

Surface-Active Properties of Sodium bis-Alkyl Sulfonatosuccinate (술폰화된 호박산 알킬에스테르류의 계면성)

  • Kim, Myeong-Soo;Jeong, Hwan-Kyeong;Yoon, In-Young;Nam, Ki-Dae
    • Journal of the Korean Applied Science and Technology
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    • v.18 no.2
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    • pp.95-102
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    • 2001
  • Recently, there has been considerably interested in the development to new functional gemini type anionic surfactant, sodium bis-n-alkyl sulfonatosuccinate, had been synthesized through the addition reaction of sodium bisulfite to bis-n-alkyl maleate, in which water was azeotropically distilled by adding benzene to the reaction system, gave a good yield. All the surface activities including krafft point, surface tension, emulsion power and foaming were measure and cmc was evaluated in dilute solution. This results showed a lower ability in $27{\sim}30dyne/cm$ than single-chain surfactant with $32{\sim}35dyne/cm$ to surface tension. Also its cmc value much smaller in $(6.5{\sim}10){\times}10^{-4}mca{\ell}/{\ell}$ than single-chain surfactant with $(40{\sim}45){\times}10^{-4}mca{\ell}/{\ell}$ concentration. In foaming ability and foam stability of gemini surfactant had especially a good ability in approximately $100{\sim}150ml$, and in emulsing power they exhibited a good emulsing phase and stability, and Krafft points were $0{\sim}10^{\circ}C$.

The Cutaneous Protection for Detergent Formulation of Nature Wheat Protein Surfactant Complexes (천연 밀단백질/계면활성제 복합체의 세정에 있어 피부보호)

  • Jeong, Hwan-Kyeong;Park, Heung-Cho;Kim, Myung-Soo;Nam, Ki-Dae
    • Journal of the Korean Applied Science and Technology
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    • v.19 no.2
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    • pp.79-85
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    • 2002
  • The cutaneous tolerability of detergent formulations can be improved by means of suitable additives. They complex the surfactant molecules lowering the concentration of their free monomeric species. Proteins derivatives used as additives for detergency are usually prepared by partial hydrolysis of plant reserve proteins. The main purpose of the hydrolytic cleavage is to make them water soluble and suitable for liquid products. Water solubility and stability are obtained by means of complexation with surfactants which also increase their actual hydrophobicity, an important parameter affecting cosmetic properties of proteins. Transepidermal water loss (TEWL) and electric capacitance (EC) have been adopted as investigation technigues to evaluate the skin integrity/damage in vitro tests, The performance of native wheat protein / surfactant complexes has been compared with traditional protein hydrolysates as detergent additives. The results show a noticeable reduction of skin irritation in surfactant formulations with addition of native wheat protein.

N-Acyl Amino Acids Surfactant(14) Kinetics for Micelle Formation of sodium N-Acyl Sarcosinate Solution (N-아실아미노산계 계면활성제(제14보) Soium N-Acyl Sarcosinate 미셀형성에 있어 동력학적 고찰)

  • Kim, Myung-Soo;Kim, Hong-Soo;Jeong, Hwan-Kyeong;Nam, Ki-Dae
    • Journal of the Korean Applied Science and Technology
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    • v.17 no.2
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    • pp.105-112
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    • 2000
  • Surface tension as a function of concentration and temperature was measured for aquous solution of sodium N-acyl sarcosinate, $RCON(CH_{3})CH_{2}$ COONa, From the intersection points in the (${\gamma}-logC$) curves, the critical micelle concentration (cmc) was determined at 20, 30, 40, and $50^{\circ}C$. Structural effects on the cmc maximum and the minimum area per molecule at the aquous solution/air interface were discussed. The free energy, enthalpy, and entropy of micellization and adsorption of surfactant solution also were investigated. Numberous investigators have dealt with sodium N-acyl sarcosinates and their applications as wettings, flooding and reducing agents and as corrosion inhibitors.

Synthesis and Properties of Glucamine Derivatives with New Composition (새로운 조성을 갖는 글루카민 유도체의 합성 및 계면성)

  • Park, Seon-Young;Kim, Tae-Young;Jeong, Hwan-Kyeong;Nam, Ki-Dae
    • Journal of the Korean Applied Science and Technology
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    • v.17 no.3
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    • pp.149-157
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    • 2000
  • The synthesis of N-methyl glucamine was performed in two step reaction. The first step involves the amination between methylamine and glucose in methane. The N-methyl glucamine was obtained by the reduction of using Ni catalyst under the high pressure. The second step was glucamide anionic derivatives synthesis from N-methyl glucamine, maleic anhydride, lauryl alcohol and laurylamine by Schotten Banmann reaction respectively. Their molecular structures of N-methyl glucamine and glucamide (EG-MAS and AC-MAS) were investigated by IR and $^{1}H-NMR$. Basic physical properties and biodegradability of there glucamide anionic surfactant was investigated. The range of cmc values determined by measurements of surface tention was $10^{-5}{\sim}10^{-4}mol/l$ and the surface tension of the aqueous solution revealed in the range $28{\sim}30$ dyne/cm and their biodegradability was very good in the pH $5{\sim}10$.

Study on the Simulation Model for the Optimization of Optical Structures of Edge-lit Backlight for LCD Applications

  • Ju, Young-Hyun;Park, Ji-Hee;Lee, Jeong-Ho;Lee, Ji-Young;Nahm, Kie-Bong;Ko, Jae-Hyeon;Kim, Joong-Hyun
    • Journal of the Optical Society of Korea
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    • v.12 no.1
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    • pp.25-30
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    • 2008
  • The optical performances of 15-inch edge-lit backlight were simulated by using a Monte Carlo ray-tracing technique. The backlight model was built by combining a wedge-type light guide plate, a diffuser sheet, a tubular fluorescent lamp with a lamp reflector, and two crossed prism sheets. Angular distributions of the luminance on each optical component obtained from simulation were consistent with those obtained from experiments on a real 15-inch backlight. The constructed backlight model was used to evaluate the optical performances of a micro-pyramid film. It was found that the on-axis luminance gain on the pyramid film is higher than that on one prism film but much lower than that on the two crossed prism films. These results suggest that a reliable simulation model can be used to develop new hybrid films and to optimize the optical structure of edge-lit backlight in order to reduce the developmental period.