• Proceedings of the Korean Society of Precision Engineering Conference
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• 2008.06a
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• pp.603-604
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• 2008

• Korean Journal of Optics and Photonics
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• v.4 no.2
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• pp.157-161
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• 1993

An optical autofocus system for a DUV KrF excimer laser wafer stepper was developed by using the PSD (Position Sensitive Detector) as the position sensor. The laser beam was incident on the surface of wafer and the reflected beam was magnified optically by a lens. And the beam was directed onto the surface of PSD by a mirror system. The spatial resolution of the autofocus system was found to be $0.03{\mu}m$.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.28 no.11
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• pp.894-901
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• 2017

In the existence of motion, azimuth phase error due to accuracy limitation of GPS/IMU and system delay is unavoidable and it is essential to apply autofocus to estimate and compensate the azimuth phase error. In this paper, autofocus algorithm using MWLS(Modified WLS) is proposed. It shows the robust performance compared with original WLS using new target selection/sorting metric and iterative azimuth phase estimation technique. SAR raw data obtained in a captive flight test is used to validate the performance of the proposed algorithm.

• Korean Journal of Optics and Photonics
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• v.15 no.6
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• pp.583-590
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• 2004

The autofocus is one of the important processes in the automated vision inspection or measurements using optical microscopes, because it influences the measuring accuracy. In this paper, we used the confocal microscope configuration based on not a pinhole but a single-mode optical fiber. A single mode fiber has the functions of source and detector by applying the reciprocal scheme. As a result, we acquired a simple system configuration and easy alignment of the optical axis. Also, we embodied a fast autofocus system by acquiring the focus error signal through a source modulation technique. The source modulation technique can effectively reduce physical disturbances compared with objective lens modulation, and it is easily applicable to general optical microscopes. The focus error signal was measured with respect to the modulation amplitude, reflectance of the specimen and inclination angle of the measuring surface. The performance of the proposed autofocus system was verified through autofocusing flat mirror surface. In addition, we confirmed that source modulation rarely degrades the depth resolution by the comparison between the FWHMs of axial response curves.

• The Journal of the Acoustical Society of Korea
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• v.40 no.6
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• pp.546-554
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• 2021

In the signal processing of synthetic aperture sonar, it is subject that the platform in which the sensor array is installed moves along the straight line path. In practical operation in underwater, however, the sensor platform will have trajectory disturbances, diverting from the line path. It causes phase errors in measured signals and then produces deteriorated SAS images. In this study, in order to develop towed SAS, as tools to remove the phase errors associated with the trajectory disturbances of the towfish, motion compensation technique using Redundant Phase Center (RPC) and also Phase Gradient Autofocus (PGA) method is investigated. The performances of these two approaches are examined by means of a simulation for SAS system having a sway disturbance.

• Journal of the Korean Society for Precision Engineering
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• v.26 no.6
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• pp.50-58
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• 2009

Micro laser fabrication techniques can potentially be used for the manufacture of microstructures on the thin flat surfaces with large diameter that are frequently used in semiconductor industries. However, the large size of wafers can cause the degraded machining accuracy of the surface because it can be tilted or distorted by geometric errors of machines or the holding fixtures, etc. To overcome these errors the off-line focusing error compensation method is proposed. By using confocal autofocus system, the focusing error profile of machined surface is measured along the pre-determined path and can be compensated at the next machining process by making the corrected motion trajectories. The experimental results for silicon wafers and invar flat surfaces show that the proposed method can compensate the focusing error within the level of below $6.9{\mu}m$ that is the depth of focus required for the laser micromachining process.

• The Journal of Korean Institute of Information Technology
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• v.17 no.10
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• pp.57-63
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• 2019

Motion errors which are caused by several reasons, non-ideal path, errors of navigation systems, and radar system errors, have to be corrected. Motion compensation methods can compensate the motion error, but not exactly. To correct these residual errors, several autofocus methods are invented. A popular method is phase gradient autofocus (PGA). PGA does not assume specific circumstances, such as isolated point targets and shapes of errors. PGA is an iterative and adaptive method, so that the processing time is the main problem for the real time processing. In this paper, the improved method to select targets for PGA is proposed to reduce processing time. The variances of image pixels are used to select targets with high SNR. The processing of PGA with these targets diminishes the processing time and iterations effectively. The processed results with real radar data, obtained by flight tests, show that the proposed method compensates errors well, and reduce working time.

• Journal of the Korea Computer Industry Society
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• v.9 no.2
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• pp.69-76
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• 2008

This paper implement an Camcorder NTSC camera autofocus control system on the DSP Board. The information of camera lens control obtain the only brightness simple image processing from the NTSC camcoder camera image. The exact focus makes the exact boundaries. The camera lens control that the increase sum of the useful ingredient values. Useful value obtained experiment value. Also noise is except because a big value of the ingredients so that obtained focus more accurate value.

• Korean Journal of Optics and Photonics
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• v.31 no.6
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• pp.314-320
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• 2020

The optics used in an infrared imaging system has a strong refractive-index change according to temperature, so an autofocus control function is essential for a military infrared imaging system with a wide operating-temperature range. In this study, we design a triple-magnification infrared imaging system, and to compensate for the change in refractive index according to temperature we measure the change in the lens focus according to temperature. The autofocus control function was implemented by using the measured movement amount, and we could obtain an image with satisfactory resolution performance over a wide range of operating temperatures.

• Current Optics and Photonics
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• v.3 no.1
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• pp.27-32
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• 2019

We present an autofocus tracking system implemented by the digital refocusing of digital holographic microscopy (DHM) and the tunability of an electrically tunable lens (ETL). Once the defocusing distance of an image is calculated with the DHM, then the focal plane of the imaging system is optically tuned so that it always gives a well-focused image regardless of the object location. The accuracy of the focus is evaluated by calculating the contrast of refocused images. The DHM is performed in an off-axis holographic configuration, and the ETL performs the focal plane tuning. With this proposed system, we can easily track down the object drifting along the depth direction without using any physical scanning. In addition, the proposed system can simultaneously obtain the digital hologram and the optical image by using the RGB channels of a color camera. In our experiment, the digital hologram is obtained by using the red channel and the optical image is obtained by the blue channel of the same camera at the same time. This technique is expected to find a good application in the long-term imaging of various floating cells.