• Title/Summary/Keyword: BST

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The improvement in the properties of $(Ba, Sr)TiO_3$films by the application of amorphous layer (비정질 $(Ba, Sr)TiO_3$층의 도입을 통한 $(Ba, Sr)TiO_3$박막의 특성 향상)

  • 백수현;이공수;마재평;박치선
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.8 no.2
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    • pp.221-226
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    • 1998
  • Amorphous (Ba, Sr)$TiO_3$[BST] layer(30, 70 nm) was introduced between crystalline BST and $RuO_2$electrode to realize double-layered BST structure in order to improve the properties of BST film. The structure and surface morphology of double-layered BST film were modified by the application of amorphous BST layer; that is, surface became smoother and grain size increased abruptly. Amorphous layer thicker than 30 nm was effective to hinder the influence of $RuO_2$surface on the structure of as-grown BST films by in-situ process. Dielectric constant of double-layered BST film was improved dramatically from 152 to 340 and leakage current was lowered from $1.25{\times}10^{-5}A/{\textrm}{cm}^2);to;6.85{\times}10^{-7}A/{\textrm}{cm}^2$, respectively.

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The Structural and Dielectric Properties of the PZT/BST Heterolayered Thin Films with RF Power (RF Power에 따른 PZT/BST 이종층 박막의 구조 및 유전 특성)

  • Lee Sang-Chul;Nam Sung-Pil;Lee Sung-Gap;Lee Young-Hie
    • The Transactions of the Korean Institute of Electrical Engineers C
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    • v.54 no.1
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    • pp.13-17
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    • 2005
  • The Pb(Zr/sub 0.52/Ti/sub 0.48/)O₃/(Ba/sub 0.6/Sr/sub 0.4/)TiO₃[PZT/BST] heterolayered thin films were deposited on Pt/Ti/SiO₂/Si substrates by using the RF sputtering method with different RF power. The PZT/BST heterolayered thin films had the tetragonal structure of the PZT phase and BST phase. Increasing the RF power. the intensity of the PZT (100), (110) peaks and BST (111) peaks were decreased and the intensity of the BST (100), (110) peaks were increased. The thickness ratio of the top layered BST thin film and the bottom layered PZT thin film was 2 to1. The atomic concentration of the Ba, Sr, Pb. Zr, Ti atoms were constant in the PZT thin films and BST thin films, respectively. The Pt atom was diffused to the PZT region in the PZT/BST heterolayered thin films deposited at condition of 60[W] RF power. Increasing the frequency, dielectric constant and loss of the PZT/BST heterolayered thin films were decreased. The dielectric constant and loss of the PZT/BST heterolayered thin films deposited with RF power of 90[W] were 406 and 3%, respectively.

Damages of etched BST fins by high density plasmas (고밀도 플라즈마에 의한 BST 박막의 damage에 관한 연구)

  • 최성기;김창일;장의구;서용진;이우선
    • Proceedings of the Korean Institute of Navigation and Port Research Conference
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    • 2000.11a
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    • pp.45-48
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    • 2000
  • High dielectric (Ba,Sr)TiO$_3$thin films were etched in an inductively coupled plasma (ICP) as a function of C1$_2$/Ar gas mixing ratio. Under Cl$_2$(20)/Ar(80), the maximum etch rate of the BST films was 400$\AA$/min and selectivities of BST to Pt and PR were obtained 0.4 and 0.2, respectively. We investigated the etched surface of BST by x-ray photoelectron spectroscopy (XPS), atomic force microscopy (AFM) and x-ray diffraction (XRD). From the result of XPS analysis, we found that residues of Ba-Cl and Ti-Cl bonds remained on the surface of the etched BST for high boiling point. The surface roughness decreased as Cl$_2$increases in C1$_2$/Ar plasma because of non-volatile etching products. This changed the nature of the crystallinity of BST. From the result of XRD analysis, the crystallinity of etched BST film maintained as similar to as-deposited BST under Ar only and Cl$_2$(20)/Ar(80). However, (100) orientation intensity of etched BST film abruptly decreased at Cl$_2$only plasma. It was caused that Cl compounds were redeposited on the etched BST surface and damaged to crystallinity of BST film during the etch process.

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Damages of etched BST films by high density plasmas (고밀도 플라즈마에 의한 BST 박막의 damage에 관한 연구)

  • 최성기;김창일;장의구;서용진;이우선
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2000.11a
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    • pp.45-48
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    • 2000
  • High dielectric (Ba,Sr)TiO$_3$ thin films were etched in an inductively coupled plasma (ICP) as a function of C1$_2$/Ar gas mixing ratio. Under Cl$_2$(20)/Ar(80), the maximum etch rate of the BST films was 400$\AA$/min and selectivities of BST to Pt and PR were obtained 0.4 and 0.2, respectively. We investigated the etched surface of BST by x-ray photoelectron spectroscopy (XPS), atomic force microscopy (AFM) and x-ray diffraction (XRD). From the result of XPS analysis, we found that residues of Ba-Cl and Ti-Cl bonds remained on the surface of the etched BST for high boiling point. The surface roughness decreased as Cl$_2$ increases in Cl$_2$/Ar plasma because of non-volatile etching products. This changed the nature of the crystallinity of BST. From the result of XRD analysis, the crystalliility of etched BST film maintained as similar to as-deposited BST under Ar only and Cl$_2$(20)/Ar(80). However, (100) orientation intensity of etched BST film abruptly decreased at Cl$_2$ only plasma. It was caused that Cl compounds were redeposited on the etched BST surface and damaged to crystallinity of BST film during the etch process.

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Effects of rBST, Vitamin E and Selenium Administration on Semen Characteristics, Blood Chemical Values and Hormone in Hanwoo Sires III. Effects of rBST, Vitamin E and Selenium Administration on Blood Chemical Values and Hormone Concentration of Blood in Hanwoo Sires (rBST, Vitamin E 및 Selenium 투여가 한우 종모우의 정액성상, 혈액성분 및 호르몬 변화에 미치는 효과 III. rBST, Vitamin E 및 Selenium 투여가 한우 종모우의 혈액성분 및 호르몬 농도 변화에 미치는 효과)

  • 박동헌;양부근;김종복;정희태;박춘근;김정익;이성수;박노형;원유석
    • Korean Journal of Animal Reproduction
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    • v.24 no.2
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    • pp.163-170
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    • 2000
  • This study was conducted to examine the effects of recombinant Bovine Somatotropin (rBST), vitamin E(Vit. E) and selenium (Se) administration on the blood chemical values and hormone concentrations of serum in Hanwoo sires. Hanwoo sires were randomly assigned to five groups; 1) control, 2) rBST,0.09mg/kg body weight (BW), 3) Vit E, 1,500IU/kg BW, 4) Se 0.1mg/kg BW, 5) Vit E, 1,500IU plus Se 0.1mg/kg BW. rBST, Vit. E and Se for each experimental group were given 6 times at 15 days interval by intermuscular injection. Blood samples were collected ten times for experimental periods and separated the serum by centrifugation and stored into deep freezer. The concentration of albumin was the highest in Se group than those of any other groups (P<0.05) and Vit. E plus Se group was significantly higher than in the control and rBST groups (P<0.05). The concentrations of blood urea nitrogen (BUN) and creatinine were significantly higher in rBST group than any other groups (P<0.05). The concentration of total protein in rBST, Se and Vit. E plus Se groups were significantly higher than in control group (P<0.05). The concentrations of calcium, cholesterol,, glucose, inorganic phosphorus and triglycerides in serum were not difference in all experimental groups (P>0.05). The concentration of estradiol was slightly higher in Se and Vit. E plus Se groups than those of any other groups, but not significantly difference among the experimental groups (P<0.05). The concentration of testosterone was not affected by the administration of rBST, Vit. E and Se.

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Antigenicity Test of Bovine Somatorophin(BST) in Guinea pigs and Rabbits (기니픽과 토끼에서 소성장 홀몬(BST)의 항원성에 관한 시험)

  • 강경선;이영순
    • Journal of Food Hygiene and Safety
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    • v.6 no.3
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    • pp.179-183
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    • 1991
  • Antigenicity tests-ASA(Active Systemic Anaphylaxis), PSA(Passive Systemic Anaphylaxis), PCA(Passive Cutaneous Anaphylaxis)- of Bovine Somatotrophine(BST, Lucky Ltd.) were performed according to the established regulations of National Institude of Safety Research. The results were as follows: 1. No specific clinical signs related anaphylaxis were observed. Therefore, it was considered that BST has no antigenicity in guinea pigs and rabbits. 2. No blue spots were observed on the back of guinea pig in the peA test; BST-related IgE was not produced.

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Effects of Seed Layer and Rapid Thermal Annealing on the Properties of (Ba, Sr)TiO3 Films Prepared by Chemical vapor deposition (씨앗층과 급속 열처리가 화학 기상 증착법에 의한(Ba, Sr)TiO3 박막의 특성에 미치는 영향)

  • 최영철
    • Journal of the Microelectronics and Packaging Society
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    • v.4 no.2
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    • pp.47-54
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    • 1997
  • Pt/SiO2/Si을 기판으로 사용하고 RF 마그네트론 스퍼터링에 의한 (Ba, Sr)TiO3 (BST) 씨앗층을 약 10nm 정도의 두께로 입힌 다음 그 상부에 화학 기상증착법으로 BST를 증착하여 BST seed layer가 CVD BST 박막의 특성에 미치는 영향을 조사하였다. 또한 급 속열처리가 BST 박막과 커패시터의 특성에 미치는 영향도 조사하였다. Seed layer와 급속 열처리에 의해 박막의 결정성이 향상되었으며 이로인해 유전상수가 증가되었고 주파수에 대 한 유전특성도 개선되었다. Seed layer를 도입함으로써 BST 박막과 Pt 하부전극 사이의 계 면에 존재하고 있는 산소부족\ulcorner이 사라짐을 확인할수 있었으며 이로 인해 Pt/BST/Pt 커\ulcorner 시터의 누설전류가 감소하였다. 또한 급속 열처리에 의해 BST/Pt 계면에서 트랩된 전자의 농도가 감소함으로써 누설전류 특성이 개선됨을 알수 있었다. Seed layer 위에 증착된 CVD BST 박막의 유전상수는 증착온도가 증가함에 따라 증가하였으나 누설전류도 같이 증가하 였다.

레이져 증착법으로 제조된 (Ba,Sr)$TiO_3-MFSFET $구조의 성장 및 응력에 의한 강유전성

  • 전성진;한근조;강신충;이재찬
    • Proceedings of the Korean Vacuum Society Conference
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    • 1999.07a
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    • pp.87-87
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    • 1999
  • 본 연구에서는 Pulsed Laser Deposition(이하 PDL)방법을 이용하여 Si기판에 (Ba,Sr)TiO3(이하 BST)박막을 MFS-FET(Metal-Ferroelectric-Semiconductor Field-effect Transistor)구조로 제조하였으며 BST박막의 강유전성이 BST 박막에 유도되는 응력에 어떤 영향을 받는지 살펴보았다. 본 연구에서는 완충막을 사용함으로써 BST박막과 완충막간의 격자부정합을 이용하여 BST박막에 강유전성을 유도하려고 하였다. 또한 MFS-FET구조의 BST박막에 유도되는 응력조절을 위하여 BST박막과 완충막의 두께를 변화하였으며 XRD를 통한 구조 분석 및 C-V test를 통한 전기적 특성을 관찰을 하였다. PLD법을 통해서 epitaxial 성장된 BST 박막에서는 Si에 epitaxial 성장된 완충막과의 격자부정합에 의한 BST박막내의 자발분극의 발생이 예상된다. 따라서, 본 연구는 강유전체의 자발분극에 의하여 발생되는 C-V 이력현상이 BST박막과 완충막과의 격자부정합에 의한 응력에 의해 발생될 것으로 예상하여, BST 박막에 유도되는 응력과 C-V 이력현상의 관계를 통하여 상온에서 상유전성을 갖는 BST가 응력에 의하여 어느 정도의 강유전성을 나타내는지를 밝히기 위해 진행되었다. 본 연구에서 사용된 완충막은 YSZ(Yttria Stabilized Zirconia)박막으로 0.4mTorrO2 분위기 하에서 600~80$0^{\circ}C$의 온도에서 증착하여 상형성을 살펴보았고 $700^{\circ}C$에서 epitaxial 성장을 확인하였으며 두께는 30~$\AA$으로 변화하였다. 또한 BST박막은 완충막과의 전압분배를 고려해 300~2000$\AA$으로 두께를 변화를 시키며 증착하였다. MFS 구조에서 Al 전극을 사용하여 완충막과 BST박막간의 두께 변화에 따른 Capacitance - Voltage(C-V) 측정을 하였으며 이를 통하여 강유전상의 특성인 C-V 이력현상을 관찰하였다. 그 결과 YSZ 박막에서는 C-V 이력현상이 나타나지 않았으며 BST 박막에서는 약 1.2V의 C-V이력현상이 보였다.

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Effects of Three Dietary Growth Hormones on Growth Performance and Lysozyme Activity in Juvenile Olive Flounder, Paralichthys olivaceus

  • Lee, Seung-Hyung;Yoo, Gwang-Yeol;Park, Gun-Jun;Kim, Young-Chul;Lee, Jun-Ho;Bai, Sung-Chul C.
    • Fisheries and Aquatic Sciences
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    • v.11 no.4
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    • pp.183-189
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    • 2008
  • In this study, tests were conducted to investigate the effects of three dietary growth hormones, administered in various amounts, on the growth performance and lysozyme activity in juvenile olive flounder, Paralichthys olivaceus. Three dietary growth hormones, recombinant human growth hormone (rHGH), recombinant bovine somatotropin A (rBST A) and recombinant bovine somatotropin B (rBST B) were tested at three different supplemental levels (10, 20 or 40 mg/kg body weight per week) by a $3{\times}3$ factorial design and a complete randomized design in comparison to a control group. Fish were fed one of the ten experimental diets (control, $rHGH_{10}$, $rHGH_{20}$, $rHGH_{40}$, rBST $A_{10}$, rBST $A_{20}$, rBST $A_{40}$, rBST $B_{10}$, rBST $B_{20}$ and rBST $B_{40}$) for 6 weeks and afterward were analyzed for growth performance by measuring weight gain (WG), feed efficiency (FE), specific growth rate (SGR) and protein efficiency ratio (PER). Based on the factorial design analysis, fish fed rHGH diets demonstrated significantly higher growth performance than fish fed rBST A or rBST B diets. However there were no significant differences in WG, FE, SGR and PER between fish fed rBST A and rBST B diets. Neither hormone level nor the interaction between the different hormones and their various levels had a significant effect on WG, FE, SGR, PER, lysozyme activity or whole-body proximate composition. A complete randomized design analysis confirmed fish fed $rHGH_{10}$, $rHGH_{20}$, $rHGH_{40}$, rBST $A_{10}$, rBST $A_{20}$, rBST $A_{40}$, rBST $B_{20}$ and rBST $B_{40}$ diets for 6 weeks showed higher WG than fish fed the control diet (P<0.05). A higher FE was observed in fish fed $rHGH_{10}$, $rHGH_{20}$, $rHGH_{40}$, rBST $A_{20}$ and rBST $A_{40}$ diets in comparison to fish fed the control diet. Fish fed all graded rHGH, rBST A and rBST B supplemented diets showed a higher SGR than fish fed the control diet. Regarding PER, fish fed $rHGH_{10}$, $rHGH_{20}$, $rHGH_{40}$, rBST $A_{10}$, rBST $A_{20}$, rBST $A_{40}$ and rBST $B_{20}$ diets were higher than fish fed the control diet. Furthermore, the lysozyme activity of fish fed a diet of $rHGH_{20}$ was significantly higher than that of fish fed any other diet. The results measuring the growth and development of the fish clearly suggest the biopotency of dietary rHGH could be higher than those of both dietary rBST A and rBST B. Further implied is the probability that within the range of 10 to 40 mg/kg BW/week the dietary growth hormones could accelerate growth performance, and that 20 mg rHGH/kg BW/week could possibly enhance lysozyme activity in juvenile olive flounder, Paralichthys olivaceus.

The characteristics of $(Ba_{0.5}Sr_{0.5})TiO_3$ thin films deposited on $RuO_2$ bottom electrodes ($RuO_2$하부전극상에 증착된 $(Ba_{0.5}Sr_{0.5})TiO_3$박막의 특성)

  • 백수현;박치선;마재평
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.8 no.3
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    • pp.407-410
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    • 1998
  • The characteristics of $(Ba,Sr)TiO_3$[BST] thin films with the variation of $O_2/Ar$ ratio in sputtering gas deposited on $RuO_2$ bottom electrode were investigated. Dielectric constant of BST film increases from 135 to 190 with increasing oxygen partial pressure from 10 to 50, which is mainly due to the improved crystallinity of BST film. The instability of $RuO_2$ surface in $BST/RuO_2$ interface and the increase in the surface roughness of BST thin films with higher $O_2/Ar$ ratio appeared to play an important roles on the degradation of the leakage current characteristics of $Al/BST/RuO_2$ capacitor with various $O_2/Ar$ ratio in sputtering gas. As a consequence, the leakage current of BST thin film showed the lowest value of $1.9{\times}10^{-7}\; A/{\textrm}{cm}^2$ at $O_2/Ar{\approx}1/9$.

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