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Title/Summary/Keyword: Bimorph thermal microactuator

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Fabrication and Temperature Measurement of Bimorph Thermal Microactuator using SU-8 Photoresist (SU-8 포토레지스트를 이용한 Bimorph Thermal Microactuator의 제작 및 온도 측정)

Bae, Y.K.;Cho, Y.H.;Hwang, J.H.;Kim, S.D.;Kim, M.J.
- Proceedings of the Korean Society of Precision Engineering Conference
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- 2010.11a
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- pp.437-438
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- 2010
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