• Title/Summary/Keyword: Buckling

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Unbalance Magnetron 스퍼터링 소스의 특성

  • 정재인;박형국;박성렬;이석연;염승호
    • Proceedings of the Korean Vacuum Society Conference
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    • 1999.07a
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    • pp.134-134
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    • 1999
  • 스퍼터링 소스는 전자기 박막 등 기능성 박막을 비롯하여 결질피막, 장식성 피막등의 제조에 이용되는 것으로 각종 증발원 중에서 가장 널리 사용되는 증발원이다. 70년대 이후 스퍼터링 소스는 마그네트론 스퍼터링으로 대표되는 방식이 사용되어 왔으며 지금까지도 가장 일반적인 방식이 되어 왔다. 마그네트론 스퍼터링 증발원은 증발율에서는 기술적인 향상이 이루어진 반면 이온화율의 향상은 그다지 이루어지지 않아 경질피막과 같은 화합물 피막의 특성 향상에는 한계를 드러내게 되었다. 그러다가 186년 Window 등 이 자장의 세기를 변형시킨 비평형 마그네트론 소스(Unbalanced Magnetron;UBM)를 처음 발표하여 이온화율의 향상이 가능하다는 것이 알려지면서 이에 대한 많은 연구가 진행되었다. UBM 소스는 마그네트론 스퍼터링 소스의 외부에 전자석을 설치하여 기판에 흐르는 이온의 양을 증가시킴으로써 소스와 기판사이의 거리를 증가시킬 수 있고 따라서, 복잡한 형상의 부품코팅이 가능하며 피막 특성을 향상시킬 수 있는 장점이 있다. 본 연구에서는 UBM 스퍼터링 소스를 설계, 제작하여 그 특성을 다양한 측면에서 조사하였다. 특히, 자작의 최적 설계를 통해 전자석의 조건을 도출하였음, Dual UBM 소스의 특성을 동시에 조사하였다. 자기장의 simulation에는 Quick field 프로그램을 이용하였고 기존의 방식과의 비교를 통해 최적의 조건을 도출하였다. 이를 바탕으로 inner pole의 크기를 30mm, outer pole의 크기를 26mm로 고정하여 설계하였고, 외부에 전자석이 설치된 UBM 소스를 제작하였다. 본 UBM 소스는 4" 타겟을 사용할 수 있으며 전자석의 조건을 10A까지 변화시켜 자기장의 세기를 변화시킬 수 있게 하였다. 제작된 소스의 동작조건 설정과 최적화를 위한 스퍼터링 장치를 함께 제작하여 UBM 소스의 최적 동작 조건을 도출하였다. 전자석의 전류가 4.5A일 때 Inner Pole과 Outer Pole의 자기장의 세기가 도일함을 알 수 있었다. 기판과 타겟의 거리가 200mm일 경우에 기판에 흐르는 전류밀도는 2mA/cm2이상이 됨을 확인하였다. 이 결과는 기존의 마그네트론 소스가 기판과 타겟사이의 거리가 100mm일 때 1mA/cm2 정도가 되는 것과 비교하면 이온화율이 획기적으로 향상된 것임을 알 수 있다.수 있다.

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Effect of Residual Stress on Raman Spectra in Tetrahedral Amorphous Carbon(ta-C) Film

  • Shin, Jin-Koog;Lee, Churl-Seung;Moon, Myoung-Woon;Oh, Kyu-Hwan;Lee, Kwang-Ryeol
    • Proceedings of the Korean Vacuum Society Conference
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    • 1999.07a
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    • pp.135-135
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    • 1999
  • It is well known that Raman spectroscopy is powerful tool in analysis of sp3/sp3 bonding fraction in diamond-like carbon(DLC) films. Raman spectra of DLC film is composed of D-peak centered at 1350cm-1 and G-peak centered at 1530cm-1. The sp3/sp3 fraction is qualitatively acquired by deconvolution method. However, in case of DLC film, it is generally observed that G-peak position shifts toward low wavenumber as th sp3 fraction increases. However, opposite results were frequently observed in ta-C films. ta-C film has much higher residual compressive stress due to its high sp3 fraction compared to the DLC films deposited by CVD method. Effect of residual stress on G-peak position is most recommendable parameter in Raman analysis of ta-C, due to its smallest fitting error among many parameters acquired by peak deconvolution of symmetric spectra. In current study, the effect of residual stress on Raman spectra was quantitatively evaluated by free-hang method. ta-C films of different residual stress were deposited on Si-wafer by modifying DC-bias voltage during deposition. The variation of the G-peak position along the etching depth were observed in the free-hangs of 20~30${\mu}{\textrm}{m}$ etching depth. Mathematical result based on Airy stress function, was compared with experimental results. The more reliable analysis excluding stress-induced shift was possible by elimination of the Raman shift due to residual compressiove stress.

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Characterization of thermally driven polysilicon micro actuator (폴리실리콘 마이크로 액츄에이터의 열구동 특성분석)

  • Lee, Chang-Seung;Lee, Jae-Youl;Chung, Hoi-Hwan;Lee, Jong-Hyun;Yoo, Hyung-Joun
    • Proceedings of the KIEE Conference
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    • 1996.07c
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    • pp.2004-2006
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    • 1996
  • A thermally driven polysilicon micro actuator has been fabricated using surface micromachining techniques. It consists of P-doped polysilicon as a structural layer and TEOS (tetracthylorthosilicate) as a sacrificial layer. The polysilicon was annealed for the relaxation of residual stress which is the main cause to its deformation such as bending and buckling. And the newly developed HF VPE (vapor phase etching) process was also used as an effective release method for the elimination of sacrificial TEOS layer. The thickneas of polysilicon is $2{\mu}m$ and the lengths of active and passive polysilicon cantilevers are $500{\mu}m$ and $260{\mu}m$, respectively. The actuation is incurred by die thermal expansion due to the current flow in the active polysilicon cantilever, which motion is amplified by lever mechanism. The moving distance of polysilicon micro actuator was experimentally conformed as large as $21{\mu}m$ at the input voltage level of 10V and 50Hz square wave. The actuating characteristics are investigated by simulating the phenomena of heat transfer and thermal expansion in the polysilicon layer. The displacement of actuator is analyzed to be proportional to the square of input voltage. These micro actuator technology can be utilized for the fabrication of MEMS (microelectromechanical system) such as micro relay, which requires large displacement or contact force but relatively slow response.

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Performance Test and Numerical Model Development of Restoring Viscous Damper for X-type Damper System (X형 감쇠시스템을 위한 복원성 점성 감쇠기 성능 실험 및 수치모형 개발)

  • Kim, David;Park, Jangho;Ok, Seung-Yong;Park, Wonsuk
    • Journal of the Korean Society of Safety
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    • v.31 no.6
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    • pp.52-57
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    • 2016
  • In this study, a restoring viscous damper is introduced for X-type damper system which is designed for the seismic response control of large spatial structures. A nonlinear numerical model for its behavior is developed using the result of dynamic loading tests. The X-type damper system is composed of restoring viscous dampers and connecting devices such as adjustable wire bracing, where the damping capacity of the system is controllable by changing the number of the dampers. The restoring viscous damper is devised to exert main damping force in tension direction, which is effective to prevent the buckling of bracing subjected to compressive axial force. To evaluate the performance of the proposed damper, dynamic cyclic loading tests are performed by using manufactured dampers at full scale. In order to construct the numerical model of the damper system, its model parameters are first identified using a nonlinear curve fitting method with the test data. The numerical simulations are then performed to validate the accuracy of the numerical model in comparison with the experimental test results. It is expected that the proposed system is effectively applicable to various building structures for seismic performance enhancement.

Non-linear analysis of side-plated RC beams considering longitudinal and transversal interlayer slips

  • Kolsek, Jerneja;Hozjan, Tomaz;Kroflic, Ales;Saje, Miran;Planinc, Igor
    • Steel and Composite Structures
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    • v.16 no.6
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    • pp.559-576
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    • 2014
  • A new mathematical model and its finite element formulation for the non-linear stress-strain analysis of a planar beam strengthened with plates bolted or adhesively bonded to its lateral sides is presented. The connection between the layers is considered to be flexible in both the longitudinal and the transversal direction. The following assumptions are also adopted in the model: for each layer (i.e., the beam and the side plates) the geometrically linear and materially non-linear Bernoulli's beam theory is assumed, all of the layers are made of different homogeneous non-linear materials, the debonding of the beam from the side-plates due to, for example, a local buckling of the side plate, is prevented. The suitability of the theory is verified by the comparison of the present numerical results with experimental and numerical results from literature. The mechanical response arising from the theoretical model and its numerical formulation has been found realistic and the numerical model has been proven to be reliable and computationally effective. Finally, the present formulation is employed in the analysis of the effects of two different realizations of strengthening of a characteristic simply supported flexural beam (plates on the sides of the beam versus the tension-face plates). The analysis reveals that side plates efficiently enhance the bearing capacity of the flexural beam and can, in some cases, outperform the tensile-face plates in a lower loss of ductility, especially, if the connection between the beam and the side plates is sufficiently stiff.

A comparison of three performance-based seismic design methods for plane steel braced frames

  • Kalapodis, Nicos A.;Papagiannopoulos, George A.;Beskos, Dimitri E.
    • Earthquakes and Structures
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    • v.18 no.1
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    • pp.27-44
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    • 2020
  • This work presents a comparison of three performance-based seismic design methods (PBSD) as applied to plane steel frames having eccentric braces (EBFs) and buckling restrained braces (BRBFs). The first method uses equivalent modal damping ratios (ξk), referring to an equivalent multi-degree-of-freedom (MDOF) linear system, which retains the mass, the elastic stiffness and responds in the same way as the original non-linear MDOF system. The second method employs modal strength reduction factors (${\bar{q}}_k$) resulting from the corresponding modal damping ratios. Contrary to the behavior factors of code based design methods, both ξk and ${\bar{q}}_k$ account for the first few modes of significance and incorporate target deformation metrics like inter-storey drift ratio (IDR) and local ductility as well as structural characteristics like structural natural period, and soil types. Explicit empirical expressions of ξk and ${\bar{q}}_k$, recently presented by the present authors elsewhere, are also provided here for reasons of completeness and easy reference. The third method, developed here by the authors, is based on a hybrid force/displacement (HFD) seismic design scheme, since it combines the force-base design (FBD) method with the displacement-based design (DBD) method. According to this method, seismic design is accomplished by using a behavior factor (qh), empirically expressed in terms of the global ductility of the frame, which takes into account both non-structural and structural deformation metrics. These expressions for qh are obtained through extensive parametric studies involving non-linear dynamic analysis (NLDA) of 98 frames, subjected to 100 far-fault ground motions that correspond to four soil types of Eurocode 8. Furthermore, these factors can be used in conjunction with an elastic acceleration design spectrum for seismic design purposes. Finally, a comparison among the above three seismic design methods and the Eurocode 8 method is conducted with the aid of non-linear dynamic analyses via representative numerical examples, involving plane steel EBFs and BRBFs.

An Approximation Method for Configuration Optimization of Structures (구조물 형상최적화를 위한 근사해석법에 관한 연구)

  • Jang, Dong Jin;Hoon, Sang Hun
    • KSCE Journal of Civil and Environmental Engineering Research
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    • v.10 no.3
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    • pp.7-17
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    • 1990
  • The objective of this paper is to provide a method of optimizing are as of the members as well as shape of both truss and arch structures. The design process includes satisfaction of stress and Euler buckling stress constraints for truss and combined stress constraints for arch structures. In order to reduce the number of detailed finite element analysis, the Force Approximation Method is used. A finite element analysis of the initial structure is performed and the gradients of the member end forces are calculated with respect to the areas and nodal coordinates. The gradients are used to form an approximate structural analysis based on first order Taylor series expansions of the member end forces. Using move limits, a numerical optimizer minimizes the volume of the structure with information from the approximate structural analysis. Numerical examples are performed and compared with other methods to demonstrate the efficiency and reliability of the Force Approximation Method for shape optimization. It is shown that the number of finite element analysis is greatly reduced and that it leads to a highly efficient method of shape optimization of structures.

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Evaluation of the Effect of Initial Condition of the Granular Assembly on the Bearing Capacity of the Shallow Foundation using Photoelastic Measurement Technique (광탄성 측정 기법을 이용한 입상체 초기 조건의 얕은 기초 지지력에 대한 영향 평가)

  • Shin, Sang-Young;Jung, Young-Hoon
    • KSCE Journal of Civil and Environmental Engineering Research
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    • v.36 no.3
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    • pp.471-491
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    • 2016
  • Traditional limit equilibrium method needs an assumption of the failure surface to calculate the bearing capapcity of the shallow foundation. From the viewpoint of the mechanics of granular materials, however, the failure of the soil mass is initated by the local buckling of the contact force chains. In this study we observed the directional distribution of the contact force chains in the granular assembly stacked by model particles subjected to the model shallow foundation during loading. Two sets of the assemblies with a regular structure and initially local imperfection were prepared for tests. Existence of the initial local imperfection has a significant effect on the directional distribution of the contact force chains. The bearing capacity of the assembly with local imperfection is only 67% the capacity of the assembly with the regular structure.

An Experimental Study on Compressive Loading Capacity of Precast Concrete Truss System (프리캐스트 콘크리트 트러스 시스템의 압축 내하력 실험 연구)

  • Han, Man-Yop;Jeon, Se-Jin
    • KSCE Journal of Civil and Environmental Engineering Research
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    • v.33 no.3
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    • pp.889-900
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    • 2013
  • In a large scale of excavation for the foundation of large-sized structures and underground structures, a considerable amount of earth pressure can occur. Steel beams that have been used to form a temporary structure to support earth pressure may be less economical and less efficient in resisting the high earth pressure. To cope with this problem, PCT(Precast Concrete Truss) system has been devised and investigated both experimentally and analytically. A proper connection method between the concrete truss members was proposed to accommodate fast assembly and disassembly. Full-scale test of PCT system was performed to verify the load-carrying capacity of the PCT system including the connections. The test results were compared with those of structural analysis. The test specimen which corresponds to PCT strut attained the ultimate load without buckling, but the detail of connector members needs to be improved. It is expected that precast concrete truss members can be efficiently incorporated into a temporary structure for deep and large excavation by replacing conventional steel beams.

Multi-MW Class Wind Turbine Blade Design Part II : Structural Integrity Evaluation (Multi-MW급 풍력발전용 블레이드 설계에 관한 연구 Part II : 구조 건전성 평가)

  • Kim, Bum Suk
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.38 no.4
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    • pp.311-320
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    • 2014
  • Rotor blades are important devices that affect the power performance, efficiency of energy conversion, and loading and dynamic stability of wind turbines. Therefore, considering the characteristics of a wind turbine system is important for achieving optimal blade design. When a design is complete, a design evaluation should be performed to verify the structural integrity of the proposed blade in accordance with international standards or guidelines. This paper presents a detailed exposition of the evaluation items and acceptance criteria required for the design certification of wind turbine blades. It also presents design evaluation results for a 2-MW blade (KR40.1b). Analyses of ultimate strength, buckling stability, and tip displacement were performed using FEM, and Miner's rule was applied to evaluate the fatigue life of the blade. The structural integrity of the KR40.1b blade was found to satisfy the design standards.