• 정보저장시스템학회논문집
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• 제8권1호
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• pp.16-21
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• 2012

SAW device is widely used as filters, sensors, actuators in various technologies. And capacitive sensor is tremendously used to measure pressure, gap, etc. The application of SAW device as signal conditioner of capacitive sensor reduces noise level and enables high precision measurement. The response increase of SAW based capacitive sensor is produced just before the two capacitive electrode contacts by the existence of parasitic resistance of capacitive electrode. In this paper, we analyze the effects of parasitic resistance and propose the calibrating method using lumped component and execute the high precision gap measurement using calibrated system. And xx nm resolution and yy ${\mu}m$ stroke was attained.

• Journal of information and communication convergence engineering
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• 제9권1호
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• pp.78-82
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• 2011

This paper proposes a new circuit for capacitive sensing based on Dickson's charge pump. The proposed touch sensing circuit includes three stages of NMOS diodes and capacitors for charge transfer. The proposed circuit which has a simplified capacitive touch sensor model has been analyzed and simulated by Spectre using Magna EDMOS technology. Looking from the simulation results, the proposed circuit can effectively be used as a capacitive touch sensing circuit. Moreover, a simple structure can provide maximum flexibility for making a digitally-controlled touch sensor driver with lowpower operations.

• 한국전기전자재료학회논문지
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• 제23권4호
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• pp.317-322
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• 2010

This paper reports the fabrication and characterization of surface micromachined poly 3C-SiC capacitive pressure sensors on silicon wafer operable in touch mode and normal mode for high temperature applications. FEM(finite elements method) simulation has been performed to verify the analytical mode. The sensing capacitor of the capacitive pressure sensor is composed of the upper metal and the poly 3C-SiC layer. Measurements have been performed in a temperature range from $25^{\circ}C$ to $500^{\circ}C$. Fabrication process of designed poly 3C-SiC touch mode capacitive pressure sensor was optimized and would be applicable to capacitive pressure sensors that are required high precision and sensitivity at high pressure and temperature.

• 반도체디스플레이기술학회지
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• 제20권3호
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• pp.103-107
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• 2021

In this paper, a capacitive water level sensor for boilers was developed. In order to accurately monitor the water level in a high-temperature boiler that generates a lot of precipitates, the occurrence of precipitates on the surface of the water level sensor should be small, and a sensor capable of measuring even if the sensor surface is somewhat contaminated is required. The capacitive water level sensor has a structure in which one of the two electrodes is insulated with Teflon coating, and the stainless steel package of the water level sensor is brought into contact with the water tank so that the entire water tank becomes another electrode of the water level sensor. A C-V converter that converts the capacitance change of the capacitive water level sensor into a voltage change was developed and integrated with the water level sensor to minimize noise. The performance of the developed capacitive water level sensor was evaluated through measurement.

• 조명전기설비학회논문지
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• 제23권4호
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• pp.39-46
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• 2009

본 논문에서는 저항과 클록 주파수 변동에 의한 문제를 효과적으로 감소시킬 수 있는 풀 디지털 정전용량 방식의 터치키를 제안한다. 제안된 방식은 측정하고자 하는 정전용량 두 개와 두 정전용량 사이의 저항으로 구성되어 있으며, 각 정전용량과 저항의 지연을 각각 측정한 후 두 지연의 비를 구한다. 양자화 오차를 무시할 경우 두 지연의 비는 측정하고자 하는 두 정전용량의 비로 표시되어 저항 값과 클럭 주파수와 무관하다. 실험결과에서도 제안된 방법이 저항과 클록주파수에 의한 변동을 효과적으로 줄일 수 있음을 보였으며, 제안된 방법의 정전용량 해상도가 1.04[pF]여서 터치키로 사용될 수 있음을 보였다.

• 조명전기설비학회논문지
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• 제23권8호
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• pp.80-85
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• 2009

본 논문에서는 저항과 클록 주파수 변동에 의한 문제를 효과적으로 감소시킬 수 있는 풀 디지털 정전용량 방식의 터치키를 제안한다. 제안된 방식은 측정하고자 하는 정전용량 두 개와 두 정전용량 사이의 저항으로 구성되어 있으며, 각 정전용량과 저항의 지연을 각각 측정한 후 두 지연의 비를 구한다. 양자화 오차를 무시할 경우 두 지연의 비는 측정하고자 하는 두 정전용량의 비로 표시되어 저항 값과 클럭 주파수와 무관하다. 실험결과에서도 제안된 방법이 저항과 클록주파수에 의한 변동을 효과적으로 줄일 있음을 보였으며, 제안된 방법의 정전용량 해상도가 1.04[pF]여서 터치키로 사용될 수 있음을 보였다.

• 한국정보통신학회:학술대회논문집
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• 한국정보통신학회 2015년도 춘계학술대회
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• pp.509-512
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• 2015

본 논문에서는 유압 실린더내의 피스톤 위치를 측정하기 위한 정전용량 센서(Capacitive Sensor) 구조를 연구하였다. 기존에 유압 실린더 내 피스톤 위치 측정을 위해 인덕티브(Inductive) 방식을 응용한 LVDT(Linear Variable Differential Transformer) 센서가 사용되고 있으며, 높은 정확도를 갖지만, 고가이며 구조적으로 복잡하다는 단점이 있다. 본 논문에서는 이러한 단점을 극복하기 위한 방법으로 유압실린더 내 최적화된 구조를 바탕으로 여러 가지 비접촉 정전용량 센서 구조 방식을 연구하였다. 실험을 통하여 본 논문의 제안구조를 사용하면 유압 실린더 내 피스톤 위치측정이 가능함을 확인하였다.

• Journal of Advanced Marine Engineering and Technology
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• 제28권4호
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• pp.569-576
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• 2004

In this paper, passive telemetry capacitive humidity sensor system using a RLSE(Recursive Least Square Estimation) technique is proposed. To overcome the problem like power limits and complications that general passive telemetry sensor system including IC chip has, the principle of inductive coupling is applied to model the sensor system. Specially. by applying the forgetting factor we show that the accuracy of its estimation can be improved even in the case of time varying parameter and also the convergence time can be reduced.

• 대한전자공학회:학술대회논문집
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• 대한전자공학회 2002년도 하계종합학술대회 논문집(1)
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• pp.199-202
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• 2002

This paper is about the implementation of Passive RFID(Radio Frequency Identification) tag system using a capacitive method, and explains the design and circuit's structure of this system. Fundamentally the capacitive RFID tag system consists of a tag reader, a passive tag and a host computer. And then this paper shows the system's prototype which analyzes a specification, and suggests the passive RFID system as a new method which manufactures a low cost tag system easily

• 전기학회논문지P
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• 제59권1호
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• pp.58-63
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• 2010

In this paper, we proposed a wearable respiration measurement system with textile capacitive pressure sensor. Belt typed textile capacitive pressure sensor approach of respiration measurement, from which respiration signatures and rates can be derived in real-time for long-term monitoring, are presented. Belt typed textile capacitive pressure sensor has been developed for this measurement system. the distance change of two plates by the pressure of motion has been used for the respiration measurement in chest area. Respiration rates measured with the textile capacitive pressure sensor was compared with standard techniques on 8 human subjects. Accurate measurement of respiration rate with developed sensor system is shown. The data from the method comparison study is used to confirm theoretical estimates of change in capacitance by the distance change. The current version of respiratory rate detection system using textile capacitive pressure sensor can successfully measure respiration rate. It showed upper limit agreement of $3.7997{\times}10^{-7}$ RPM, and lower limit of agreement of $-3.8428{\times}10^{-7}$ RPM in Bland-Altman plot. From all subject, high correlation were shown(p<0.0001). The proposed measurement method could be used to monitor unconscious persons, avoiding the need to apply electrodes to the directly skin or other sensors in the correct position and to wire the subject to the monitor. Monitoring respiration using textile capacitive pressure sensor offers a promising possibility of convenient measurement of respiration rates. Especially, this technology offers a potentially inexpensive implementation that could extend applications to consumer home-healthcare and mobile-healthcare products. Further advances in the sensor design, system design and signal processing can increase the range and quality of the rate-finding, broadening the potential application areas of this technology.