• Title/Summary/Keyword: Capacitive sensor

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Calibration of SAW Based Capacitive Sensor Using Lumped Component and High Precision Gap Measurement (집중 소자를 이용한 표면 탄성파 장치 기반의 용량 성 센서 보정 및 이를 이용한 초정밀 간극 측정)

  • Kim, Jae-Geun;Ko, Byung-Han;Park, Young-Pil;Park, No-Cheol
    • Transactions of the Society of Information Storage Systems
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    • v.8 no.1
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    • pp.16-21
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    • 2012
  • SAW device is widely used as filters, sensors, actuators in various technologies. And capacitive sensor is tremendously used to measure pressure, gap, etc. The application of SAW device as signal conditioner of capacitive sensor reduces noise level and enables high precision measurement. The response increase of SAW based capacitive sensor is produced just before the two capacitive electrode contacts by the existence of parasitic resistance of capacitive electrode. In this paper, we analyze the effects of parasitic resistance and propose the calibrating method using lumped component and execute the high precision gap measurement using calibrated system. And xx nm resolution and yy ${\mu}m$ stroke was attained.

Design of Stroke Measurement System and Cylinder-type Capactive Sensor (실린더형 정전용량 센서 및 변위 측정시스템 설계)

  • Lee, Jae-gun;Lee, In-gon;Park, Sung-kyun;Hong, Ic-pyo
    • Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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    • pp.910-912
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    • 2015
  • In this paper, we designed the novel capacitive sensor and system for measuring the position of the piston in hydraulic cylinder. The magnetic or LVDT sensors have been widely used to measure the position of the piston because of its high accuracy, but these types of sensor are very expensive and have difficulty in use because of its complexity. To overcome these disadvantages, we studied the optimized non-contact capacitive sensor and designed detecting system for accurate measuring the location of piston in hydraulic cylinder. The proposed capacitive sensor and detecting system have the possibility of practical use for hydraulic cylinder through experiments.

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Optimization of a capacitive sensor for high dynamic range (높은 동적영역을 갖기 위한 정전용량형 센서의 최적화)

  • Kang, Dae-Sil;Kim, Moo-Jin;Moon, Won-Kyu
    • Journal of Sensor Science and Technology
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    • v.19 no.2
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    • pp.92-98
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    • 2010
  • The capacitive sensor has a simple structure, compact size and low cost, but a small dynamic range. The small range is caused by use of gap variation. If the sensor takes area variation type with one plate moving horizontally, it can have a large measurable range. While the area variation has relatively low sensitivity, some studies have found methods to improve the sensitivity. Even though the methods are effective, parameters of the results are limited and 2 dimensional. This study provides more practical and 3 dimensional analysis and suggests relations between parameters. Using the results, the optimized design parameters of a high dynamic range capacitive sensor can be found.

Error Correction of Laser Interferometer Using Capacitive Sensor (정전용량센서를 이용한 레이저 간섭계 오차보정)

  • Kim, Jae-Cheon;Seo, Suk-Hyun;Jeon, Jae-Wook;Park, Ki-Heon;You, Kwan-Ho
    • Proceedings of the KIEE Conference
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    • pp.342-344
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    • 2006
  • During last years, large investments have been directed to development and research of nano-technological products like semiconductor, display panel, optic-fiber communication components, life technology, and ultra-precision components. All quantitative measurements at nanometre scale should guarantees accurate results and high quality. Laser interferometer is one of most famous nanometre scale devices to be able to measure metre-scale distance with nanometre scale resolution, but it is easily affected by various error causes like geometrical, instrumental and environmental factor. On the other side, capacitive sensor is robust to above error factors, but it is able to measure relatively shorter distance, under $100{\mu}m$, than laser interferometer. New error correction method for laser interferometry using capacitive sensor will be introduced in this paper.

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Design of Capacitive Sensor for Measuring the Position of the Piston in Hydraulic Cylinder (유압 실린더 내 피스톤 위치측정을 위한 정전용량 센서 설계)

  • Lee, Soeng-hwi;Lee, Jae-gun;Kang, Yong-joo;Hong, Ic-pyo
    • Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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    • pp.509-512
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    • 2015
  • In this paper, several capacitive sensors for measuring the position of the piston in hydraulic cylinder was studied and designed. The inductive LVDT sensor has been widely used to measure the position of the piston because of its high accuracy, but this type of sensor is very expensive and has difficulty in use because of its complexity. To overcome these disadvantages, we studied the optimized non-contact capacitive sensors and designed several capacitive sensors for accurate measuring the location of piston in hydraulic cylinder. The proposed capacitive sensor has the possibility of practical use for hydraulic cylinder through experiments.

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Development and Evaluation of 3-terminal Type Capacitive Sensor for the Diagnosis of Electrical Insulating Oil (전기 절연유 열화진단을 위한 3-단자식 전기용량 센서 개발 및 진단특성 평가)

  • Kim, Ju-Han;Han, Sang-Ok
    • The Transactions of the Korean Institute of Electrical Engineers P
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    • v.58 no.4
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    • pp.476-482
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    • 2009
  • This paper describes the development of capacitive sensor for the diagnosis of liquid dielectrics, which is widely used as the electrical insulating oil of transformer, circuit breaker, cable and etc. To survey the dielectric properties of the virgin and aged electrical insulating oils, we utilized the highly precise measuring system, using the principle of cross capacitance. The measured properties were used to determine the design factors of the sensor. Then the factors were optimized with the help of computational analysis. To evaluate diagnosis by the sensor, we performed accelerated thermal aging test about electrical insulating oils. The condition of aged specimens were investigated by measurements of relative permittivity i.e. capacitance change by capacitive sensor. And to evaluate the hysteresis characteristics with the change of temperature, we constructed a testing system, which was composed with vacuum drying oven, oil chamber and measuring instruments, such as LCR meter, MUX and so forth. Through the results of this investigation, we confirmed the superior characteristics of the newly developed sensor.

Evaluation of Diagnosis Properties of Capacitive Sensor about Deteriorated Pattern of Electrical Insulating Oil (전기 절연유의 열화 패턴에 따른 정전용량형 센서의 열화감지특성 평가)

  • Kim, Ju-Han;Kim, Jae-Hoon;Lee, Won-Yeong;Kim, Pil-Hwan;Han, Sang-Ok;Kim, Han-Jun
    • Proceedings of the KIEE Conference
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    • pp.1829-1831
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    • 2004
  • This paper described the capacitive sensor for the diagnosis of deterioration of electrical insulating oils applying guard-ring type the 3-terminal electrodes. To measure stable capacitance of the sensor and to determine the design factors of the sensor, we utilized computational analysis, FEM software. This capacitive sensor discern the extent of deterioration measuring relative permittivity of electrical insulating oils. The result of measuring numerous sample, mineral oils, as serviced year, we confirmed an increase in relative permittivity of oils. Moreover, we confirmed the superior characteristics of the sensor as a species, aged pattern of oils and operating temperature.

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Analysis on the Diagnosis Characteristics of Electrical Insulating Oil for Power Transformer with 3-terminal Capacitive Sensor (3전극형 전기용량 센서를 이용한 변압기 절연유의 열화감지특성 평가)

  • Kim, Ju-Han;Seo, Pan-Seok;Kim, Pil-Hwan;Kim, Myung-Hwan;Park, Hung-Seok;Han, Sang-Ok
    • Proceedings of the KIEE Conference
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    • pp.89-92
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    • 2004
  • This paper described the capacitive sensor for the diagnosis of deterioration of electrical insulating oils applying guard-ring type the 3-terminal electrodes. To measure stable capacitance of the sensor and to determine the design factors of the sensor, we utilized computational analysis, FEM software. This capacitive sensor discern the extent of deterioration measuring relative permittivity of electrical insulating oils. The result of measuring numerous sample, mineral oils, as serviced year, we confirmed an increase in relative permittivity of oils. Moreover, we confirmed the superior characteristics of the sensor as a species, aged pattern of oils and operating temperature.

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Development of a Non-contacting Capacitive Sensor Based on Thompson-Lampard Theorem for Measurement of ${\mu}m-order$ Displacements (Thompson-Lampard 정리를 적용한 마이크로미터 변위 측정을 위한 비접촉식 전기용량 센서 개발)

  • Kim, Han-Jun;Kang, Jeon-Hong;Han, Sang-Ok
    • The Transactions of the Korean Institute of Electrical Engineers B
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    • v.55 no.9
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    • pp.443-448
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    • 2006
  • Non-contacting capacitive sensor based on Thompson-Lampard theorem have been fabricated and characterized for measuring of 때 order displacements. To overcome disadvantages of the existed capacitive sensors of parallel plate type with 2-electrodes and 3-electrodes, the developed new sensor was designed to have 4-electrodes with a constant gap of 0.2mm between the electrodes. Two of the electrodes were used as a high potential electrode and a low one, the other two electrodes were used as guard electrodes. These electrodes were made from copper using RF sputtering system on a sapphire plate with diameter 17 mm and thickness 0.7 mm. This sensor can be used for measuring the distance not only between the sensor and metallic target connected to ground potential but also non-metallic target without ground connection.