• Transactions of the Korean Society of Automotive Engineers
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• v.13 no.5
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• pp.121-126
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• 2005

This paper describes the attributes, performance and development status of a high performance capacitive torque sensor intended for use in a electric power steering (EPS) system. The EPS system is composed of torque sensor, ECU, motor, gears and etc. Among the elements, torque sensor in the steering column is one of the core technologies. The new capacitive torque sensor in this paper is developed differently from working principle and mechanical structure compare to extant torque sensors in market and patent. Based on the result of numerical analysis, a experimental equipment is made which is composed of a test jig and a capacitive sensor and validity of numerical analysis and feasibility of the torque sensor are verified.

• Journal of Sensor Science and Technology
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• v.23 no.1
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• pp.24-28
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• 2014

A lock-in amplifier was proposed for capacitive sensor applications. This amplifier was based on a general-purpose microcontroller and had only a charge amplifier as analog circuits. All the other functions of lock-in amplifier except for the charge amplifier were implemented with firmware and the internal resources of the microcontroller. A rectangular signal, generated by the microcontroller, was used in a sensor-driving signal instead of a conventional sinusoidal signal. This makes it possible that the phase comparison circuit in the lockin amplifier is made with analog-to-digital converter, a timer and an interrupt controller. Using the oversampling method and the rectangular driving signal, we can make it easy to implement the peak detection function with software and sample the peak-to-peak signal at charge amplifier output. A charge amplifier was proposed to cancel out the base capacitance existing in capacitive sensors structurally. The experimental results show that the lock-in amplifier operating in the supply voltage of 3.0 V cancels out the base capacitance and has good linearity.

• Proceedings of the KIEE Conference
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• 2006.04a
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• pp.342-344
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• 2006

During last years, large investments have been directed to development and research of nano-technological products like semiconductor, display panel, optic-fiber communication components, life technology, and ultra-precision components. All quantitative measurements at nanometre scale should guarantees accurate results and high quality. Laser interferometer is one of most famous nanometre scale devices to be able to measure metre-scale distance with nanometre scale resolution, but it is easily affected by various error causes like geometrical, instrumental and environmental factor. On the other side, capacitive sensor is robust to above error factors, but it is able to measure relatively shorter distance, under $100{\mu}m$, than laser interferometer. New error correction method for laser interferometry using capacitive sensor will be introduced in this paper.

• The Transactions of the Korean Institute of Electrical Engineers P
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• v.58 no.4
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• pp.476-482
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• 2009

This paper describes the development of capacitive sensor for the diagnosis of liquid dielectrics, which is widely used as the electrical insulating oil of transformer, circuit breaker, cable and etc. To survey the dielectric properties of the virgin and aged electrical insulating oils, we utilized the highly precise measuring system, using the principle of cross capacitance. The measured properties were used to determine the design factors of the sensor. Then the factors were optimized with the help of computational analysis. To evaluate diagnosis by the sensor, we performed accelerated thermal aging test about electrical insulating oils. The condition of aged specimens were investigated by measurements of relative permittivity i.e. capacitance change by capacitive sensor. And to evaluate the hysteresis characteristics with the change of temperature, we constructed a testing system, which was composed with vacuum drying oven, oil chamber and measuring instruments, such as LCR meter, MUX and so forth. Through the results of this investigation, we confirmed the superior characteristics of the newly developed sensor.

• Elastomers and Composites
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• v.58 no.4
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• pp.173-178
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• 2023

Recently, there has been a significant focus on the development of flexible and stretchable sensors, driven by advancements in electronic devices and the robotics industry. Among these sensors, tactile sensors stand out as the most actively researched, playing a crucial role in facilitating interaction between humans and electronic devices, particularly in robotics and medical applications. This study specifically involves the manufacturing of a capacitive tactile sensor using a relatively straightforward process and sensor structure. Natural rubber and Nitrile butadiene rubber, commonly employed in the rubber industry, were utilized. The dielectric material in the manufactured tactile sensor possesses a porous structure. Notably, the resulting tactile sensor demonstrated excellent sensitivity, approximately 1%/kPa, and exhibited the capability to detect pressures up to 212 kPa.

• Journal of Sensor Science and Technology
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• v.26 no.1
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• pp.60-65
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• 2017

This paper describes the low noise and low power IC using the opamp sharing technique for the capacitive micro-sensor sensing platform. The proposed IC reduces noise using correlated double sampling (CDS) and reduces power consumption using the opamp sharing technique. The IC is designed to be fully programmable, and can be digitally controlled by serial peripheral interface (SPI). The power consumption and the integrated input referred noise are 1.02 mW from a 3.3 V supply voltage and $0.164aF_{RMS}$ with a bandwidth of 400 Hz. The capacitive sensitivity, the input-output linearity and the figure of merits (FoM) are 2.5 mV/fF, 2.46 %FSO, and 8.4, respectively.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.23 no.4
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• pp.317-322
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• 2010

This paper reports the fabrication and characterization of surface micromachined poly 3C-SiC capacitive pressure sensors on silicon wafer operable in touch mode and normal mode for high temperature applications. FEM(finite elements method) simulation has been performed to verify the analytical mode. The sensing capacitor of the capacitive pressure sensor is composed of the upper metal and the poly 3C-SiC layer. Measurements have been performed in a temperature range from $25^{\circ}C$ to $500^{\circ}C$. Fabrication process of designed poly 3C-SiC touch mode capacitive pressure sensor was optimized and would be applicable to capacitive pressure sensors that are required high precision and sensitivity at high pressure and temperature.

• Proceedings of the KIEE Conference
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• 2004.07c
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• pp.1829-1831
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• 2004

This paper described the capacitive sensor for the diagnosis of deterioration of electrical insulating oils applying guard-ring type the 3-terminal electrodes. To measure stable capacitance of the sensor and to determine the design factors of the sensor, we utilized computational analysis, FEM software. This capacitive sensor discern the extent of deterioration measuring relative permittivity of electrical insulating oils. The result of measuring numerous sample, mineral oils, as serviced year, we confirmed an increase in relative permittivity of oils. Moreover, we confirmed the superior characteristics of the sensor as a species, aged pattern of oils and operating temperature.

• Proceedings of the KIEE Conference
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• 2004.11d
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• pp.89-92
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• 2004

This paper described the capacitive sensor for the diagnosis of deterioration of electrical insulating oils applying guard-ring type the 3-terminal electrodes. To measure stable capacitance of the sensor and to determine the design factors of the sensor, we utilized computational analysis, FEM software. This capacitive sensor discern the extent of deterioration measuring relative permittivity of electrical insulating oils. The result of measuring numerous sample, mineral oils, as serviced year, we confirmed an increase in relative permittivity of oils. Moreover, we confirmed the superior characteristics of the sensor as a species, aged pattern of oils and operating temperature.

• Journal of Sensor Science and Technology
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• v.21 no.6
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• pp.440-445
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• 2012

Contact-type Linear Encoder-like Capacitive Displacement Sensor (CLECDiS) is a novel displacement sensor which has wide measurable range with high resolution. The sensor, however, is very sensitive to relative rotational alignment between stator and mover of the sensor as well as its displacement. In addition to, there can be some disturbances in the relative rotational alignment, so some noises occur in the sensor's output signal by the disturbances. This negative effect of the high sensitivity may become larger as increasing sensitivity. Therefore, this negative effect of the high sensitivity has to be compensated and reduced to achieve nanometer resolution of the sensor. In this study, a new type capacitive linear encoder with a mechanical guide is presented to reduce the relative rotational alignment problem. The presented method is not only to reduce the alignment problem, but also to assemble the sensor to the stage conveniently. The method is based on a new type CLECDiS that has mechanical guide autonomously. In the presented sensor, when the device is fabricated by micro-machining, the guide-rail is also fabricated on the surface of the sensor. By the direct fabrication of the guide-rail with high precision micro-machining, errors of the guide-rail can be reduced significantly. In addition, a manual yaw alignment is not required to obtain large magnitude of the output signal after the assembly of the sensor and the stage. The sensor movement is going to follow the guide-rail automatically. The prototype sensor was fabricated using the presented method, and we verify the feasibility experimentally.