• Journal of the Semiconductor & Display Technology
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• v.12 no.2
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• pp.67-72
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• 2013

Temperature is a critical parameter in yield improvement for wafer manufacturing. In chemical vapor deposition (CVD) equipment, crack defect in ceramic heater leads to yield reduction, however, there is no suitable ceramic heater fault detection system for conventional CVD equipment. This paper proposes a short-time zero-crossing rate based fault detection method for the ceramic heater in CVD equipment. The proposed method measures the output signal ($V_{pp}$) of RF filter and extracts the zero-crossing rate (ZCR) as feature vector. The extracted feature vectors have a discriminant power and Gaussian mixture model (GMM) based fault detection method can detect fault in ceramic heater. Experimental results, carried out by measured signals provided by a CVD equipment manufacturer, indicate that the proposed method detects effectively faults in various process conditions.

• Journal of Sensor Science and Technology
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• v.30 no.5
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• pp.320-325
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• 2021

Biochemical oxygen demand (BOD) and chemical oxygen demand (COD) methods are conventional analytical methods to analyze water quality. Both of these methods are technically indirect measurement methods, require complicated preconditions, and are time-consuming. On the other hand, the total organic carbon (TOC) method is a direct and fast measurement method which is more intuitive and accurate than the BOD and COD methods. However, general TOC analysis methods involve complicated processes and high power consumption owing to the process of phase transition from liquid to gas by a high-temperature heater. Furthermore, periodic consumables are also required for the removal of inorganic carbon (IC). Titanium dioxide (TiO₂) is one of the most suitable photocatalysts for simple processes. Its usage involves low power consumption because it only reacts with the organic carbon (OC) without the requirement of any other reagents and extra processes. We investigated a TiO₂ photocatalyst-based TOC analysis for simple and affordable products. TiO₂-coated fiber substrate maintained under carbon included water was exposed to ultraviolet (UV) radiation of wavelength 365 nm. This method is suitable for the real-time monitoring of water pollution because of its fast reaction time. Its linear property is also sufficient to match the real value.