• Electrical & Electronic Materials
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• v.10 no.1
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• pp.8-14
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• 1997

The UV/O$_{3}$ dry cleaning has been well known in removing organic molecules. The UV/O$_{3}$ dry cleaning method was performed to clean the Si wafer surfaces and contact holes contaminated by organic molecules such as residual PR. During the cleaning process, the Si surfaces were analyzed with X-ray photoelectron spectroscopy (XPS), atomic force microscope (AFM) and ellipsometer. When the UV/O$_{3}$ dry cleaning at 200'C was performed for 3 minutes, the residual photoresist was almost removed on Si wafer surfaces, but Si surfaces were oxidized. For UV/O$_{3}$ application of contact hole cleaning, the contact string were formed using the equipment of ISRC (Inter-university Semiconductor Research Center). Before Al deposition, UV/O$_{3}$ (at 200.deg. C) dry cleaning was performed for 3 minutes. After metal annealing, the specific contact resistivity was measured. Because UV/O$_{3}$ dry cleaning removed organic contaminants in contact holes, the specific contact resistivity decreased. Each contact hole size was different, but the specific contact resistivities were all much the same. Thus, it is expected that the UV/O$_{3}$ dry cleaning method will be useful method of removal of the organic contaminants at smaller contact hole cleaning.

• Safety and Health at Work
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• v.13 no.4
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• pp.487-492
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• 2022

Objective: The exposure levels of disease-causing bacteria and germs were assessed on aircraft cleaning workers on multiple different aircrafts. Method: Five measuring points were selected depending on the aircraft types. Four aircraft cleaning agencies were selected for the test. Aircraft cleaning work was classified as intensive cleaning and general cleaning work. Ventilation in aircraft when sampling during the cleaning operation was categorized into forced ventilation and natural ventilation. The collection of airborne microorganisms was made through inertial impactors which were installed 1.5 meters above the bottom of the aircraft. The airborne bacteria and fungus growth badges were selected by Trytpic Soy Agar and Sabouraud Dextrose Agar. Results: The average concentrations of bacteria in the air were higher in the order of small, medium, and large airplanes. Rainy days had higher concentrations inside and outside the aircraft as compared to those in sunny days. Regarding ventilation, concentrations in natural ventilation were higher than concentrations in forced ventilation. According to the type of work, the concentrations in the intensive cleaning groups (cleaning one plane a day) were lower than those of the ordinary cleaning groups (cleaning several planes per day). Conclusion: The concentration levels of airborne bacteria and fungi in the aircraft surveyed were lower than the indoor environmental standards of Korea (800 cfu/m³ and 500 cfu/m³). The average concentrations of bacteria in the air and fungi in the air were highest in small aircraft owned by Company D.

• Journal of Korean Society of Water and Wastewater
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• v.24 no.1
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• pp.93-101
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• 2010

Reverse osmosis (RO) membranes have been widely used for desalination as well as water and wastewater treatment facilities. Cleaning process is important to maintain stable operation as well as prevention of membrane fouling. Purpose of this research is to analyze electrostatistic and chemical characteristics after cleaning of RO membrane against $SiO_2$ scale. Four RO membranes of polyamide are used and examined about effect of chemical cleaning. EDTA (ethylene diamine tetraacetic acid) and SDS (sodium dodecil sulfate) and NaOH are applied for cleaning process after operation in synthetic water. Then, cleaning was performed with chemicals such concentration as 6hr, 12hr and 24hr, respectively. As a result, transmittances of FT-IR of four membranes are compared at each cleaning concentration. Ta/Tv shows difference of chemical composition between new membrane and cleaning membrane after cleaning. Type B of RO membrane is turned out to be most vulnerable to cleaning among four membranes. In terms of zeta potential, new membrane has -16 mV to +6 mV on pH while scaled membrane has -18 mV to 2 mV. However, it changed -23mV to 0.9 mV after cleaning. In comparison with existing salt rejection of RO membranes after cleaning, the rejection of the membranes goes down 0.7% maximum. Though cleaning changes the characteristics of membrane surface, it does not greatly affect salt rejection. pH is a critical factor to flux change in PA (polyamide) membrane.

• Journal of Conservation Science
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• v.35 no.1
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• pp.19-31
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• 2019

To study the cleaning effects and post-treatment stability assessment of various methods of cleaning textiles with metal thread, six naturally-soiled historical textiles with metal thread were investigated at the Metropolitan Museum of Art, New York. Prior to the cleaning of fabricated gold, silver, and copper thread that had been glued onto a paper substrate, the artificial deterioration was carried out in a controlled environment with light(UV and daylight), and temperature and humidity factors which would weaken and damage the samples. A synthetic soil mixture was applied to the samples to imitate soil found on the historic and archaeological textiles with metal thread; the cleaning effect and post-treatment assessment were investigated by use of three textile cleaning methods: mechanical cleaning, wet cleaning, and solvent cleaning. While investigating the naturally-soiled textiles with metal thread, it was determined that the soil colors and sizes of contaminating particles of each textile were different due to the diversity of original environmental factors and conditions. After cleaning with kneaded rubber, Stoddard solvent, n-decane or n-hexane, a bright, clean effect was apparent. Kneaded rubber was successful in picking up both large and small particles, but its stickiness caused some of the metal leaf to peel off. Stoddard solvent produced a good cleaning effect, but after use of n-hexane and n-decane in the cleaning process, a white layer of residue remained on the textile's surface. Wet cleaning was not effective and the rapid humidity changes between wet and dry conditions caused the edges of the paper substrate to lose their original shape.

• Clean Technology
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• v.11 no.3
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• pp.129-139
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• 2005

Fluoride-type cleaning agents such as TFEA (2,2,2-trifluoroethanol) and HFE (hydrofluoroether) are noticed to be next generation cleaning agents alternative to CFCs since they do not destruct ozones in the stratosphere due to no containment of chloride in the molecule, have lower global warming potential compared to HFCs and HCFCs, and are thermally stable compounds. Thus, the physical properties and cleaning agents were measured and compared with those of CFC-113, 1,1,1-TCE and HCFC-141b which are ozone destruction substances. They were also compared and evaluated with those of IPA and methanol which are currently employing as alternative cleaning agents. And TFEA-based cleaning agents consisted of TFEA and alcohols or HFEs were formulated, their physical properties and cleaning abilities were measured and their utilization as alternative cleaning agents was evaluated. As a result, TFEA and HFEs have lower cleaning ability for their removal of various soils compared to chloride-type cleaning agents, but theyshow excellent cleaning ability for Fluoride-type soils. And it is observed that the formulated cleaning agents of TFEA and alcohols or HFEs caused to increase cleaning ability of flux and unsoluble cutting oil more than 100% compared to their individual component. Therefore, the fluoride-type cleaning agents are expected to be utilized for development of environmental-friendly non aqueous cleaning agents with excellent cleaning ability if they are formulated with proper solvents or additives.

• Air Cleaning Technology
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• v.20 no.4 s.79
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• pp.44-79
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• 2007

• Air Cleaning Technology
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• v.21 no.1 s.80
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• pp.52-55
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• 2008

• Clean Technology
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• v.19 no.3
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• pp.219-225
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• 2013

Environment-friendly and surfactant-free aqueous cleaning agents have been developed in order to solve various problems generated by surfactants in the aqueous cleaning agents. Aqueous surfactant-free cleaning agents, S-1 and S-2 have been formulated with water-soluble solvents such as propylene glycol and propylene glycol ether on their main components and with some additives. These solvents were chosen because of their good solubility in water and excellent solubility of fluxes which are major contaminants of printed circuit board in the electronic industry. Physical properties of the formulated and the imported cleaning agents were measured to predict their cleaning performance, and their cleaning abilities of flux and solder contaminants were evaluated under the various ultrasonic frequencies by a gravimetric method. The measurement results show that the physical properties of cleaning agent V are generally similar with those of formulated cleaning agents S-1 and S-2. Both the cleaning agent V and the formulated cleaning agents S-1 and S-2 showed similar trends that their pH decrease in the beginning and then increases later on with the increase of their dilution in water. It is considered that the wetting indices of the cleaning agents calculated with experimental values do not not have any influence on their cleaning ability. In ultrasonic cleaning tests under three ultrasonic frequencies of 28, 45, and 100 kHz, their best performances of cleaning solder and flux were obtained at 45 kHz and 28 kHz, respectively, and the cleaning performance of the formulated cleaning agents S-1 and S-2 was better than that of the cleaning agent V. However, in the case of the recommended diluted concentration of 25 wt% cleaning solution, the cleaning performance of the cleaner V for solder and flux was better in the initial stage of cleaning compared to the formulated cleaners. And it may be concluded that the formulated cleaning agents S-1 and S-2 can be applied to cleaning of solder and flux in the industry, based on the experimental results in this study.

• Clean Technology
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• v.13 no.2
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• pp.143-150
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• 2007

The objective of this study is to develop hydrocarbon-based cleaning agents by blending paraffins, glycol ethers and siloxanes in oder to effectively clean contaminants such as flux, solder and grease. And the effect of cleaning ability by wetting index, aniline points and solubility parameter of the formulated hydrocarbon-based cleaning agents were studied in this work. The formulated hydrocarbon-based cleaning agents were prepared on the base of physical properties of their individual components. Wetting indexes and aniline points of their were measured through experiments and solubility parameters of their were calculated based on the Hansen's equation. In this study, evaluation of cleaning ability by cleaning agents were carried out using contaminants such as flux, solder, and grease. The experimental results showed that the cleaning ability of the formulated cleaning agents was excellent in cleaning contaminants such as flux, solder and grease and that the influencing parameters on their cleaning efficiency were found to be different according to contaminant types. MC($20.3MPa^{1/2}$), DF-1 ($24.2MPa^{1/2}$) and DF-2($21.5MPa^{1/2}$) with similar solubility parameter as flux ($21.3MPa^{1/2}$) showed 100% cleaning efficiency within 3 minutes in flux cleaning. And CFC-113, MC and 1,1,1-TCE with low aniline point less than $-20^{\circ}C$ showed excellent cleaning efficiency in solder cleaning. DG-1($16.2\;MPa^{1/2}$) and DG-2($15.5\;MPa^{1/2}$) with similar solubility parameter as grease($15.0{\sim}17.0\;MPa^{1/2}$) showed relatively low cleaning efficiency of grease, but CFC-113 and MC with high wetting index and low aniline point showed good cleaning efficiency in grease cleaning. As a result of this study, the hydrocarbon-based cleaning agents alternative to regulated cleaning agents such as CFC-113, 1,1,1-TCE and MC were able to be developed through properly blending paraffins, glycol ethers and siloxanes for cleaning flux, solder and grease. And it can be shown that various influencing parameters of cleaning efficiency such as wetting index, aniline point, solubility parameter and etc. of the non-aqueous cleaning agent should be reviewed for prediction of their cleaning ability and can be applied to formulation of cleaning agents.

• Clean Technology
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• v.12 no.4
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• pp.250-258
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• 2006

CFC compounds such as CFC-113 and 1,1,1-TCE, etc. have been used in various industries due to their excellent chemical stability, thermodynamic characteristics, non-inflammability and anti-corrosiveness. However, in oder to protect the earth environment, "the Montreal Protocol on substances that deplete the ozone layer" was adopted in 1989 for prevention of production and utilization of these CFC compounds and alternative cleaning agent have been required in the industry. The objective of this study is to develop non-aqueous cleaning agents that do not require major change of cleaning system, have excellent cleaning efficiency, are favorable to the environment, are harmless to the human body, and are not generated corrosive materials. In this work, non-aqueous cleaning agents have been formulated with glycol ether series and paraffinic hydrocarbon series with siloxane, and their physical properties and cleaning efficiencies were analyzed and compared with those of regulated materials. As a result of physical properties measurement of the formulated cleaning agents, it is expected that they may have good penetration ability into contaminated materials due to their properties with low density and low surface tension. Measurement of flash point and vapor pressure of the cleaning agents will be helpful for evaluation of their safety and working environment. The experimental results of cleaning flux, solder and grease by the formulated cleaning agents show that their cleaning abilities of soils were good and that there were no residues on the substance after cleaning. Therefore, alternative cleaning agents which have equivalent cleaning ability to regulating materials, good penetration ability and low hazard to human body, have been developed in this work.