• Title/Summary/Keyword: Czochralski

Search Result 219, Processing Time 0.032 seconds

High resistivity Czochralski-grown silicon single crystals for power devices

  • Lee, Kyoung-Hee
    • Journal of the Korean Crystal Growth and Crystal Technology
    • /
    • v.18 no.4
    • /
    • pp.137-139
    • /
    • 2008
  • Floating zone, neutron transmutation-doped and magnetic Czochralski silicon crystals are being widely used for fabrication power devices. To improve the quality of these devices and to decrease their production cost, it is necessary to use large-diameter wafers with high and uniform resistivity. Recent developments in the crystal growth technology of Czochralski silicon have enable to produce Czochralski silicon wafers with sufficient resistivity and with well-controlled, suitable concentration of oxygen. In addition, using Czoehralski silicon for substrate materials may offer economical benefits, First, Czoehralski silicon wafers might be cheaper than standard floating zone silicon wafers, Second, Czoehralski wafers are available up to diameter of 300 mm. Thus, very large area devices could be manufactured, which would entail significant saving in the costs, In this work, the conventional Czochralski silicon crystals were grown with higher oxygen concentrations using high pure polysilicon crystals. The silicon wafers were annealed by several steps in order to obtain saturated oxygen precipitation. In those wafers high resistivity over $5,000{\Omega}$ cm is kept even after thermal donor formation annealing.

Effect of applied magnetic fields on oxygen transport in magnetic Czochralski growth of silicon (Czochralski 방법에 의한 실리콘 단결정 성장에서 자장에 의한 산소의 전달 현상 제어)

  • Chang Nyung Kim
    • Journal of the Korean Crystal Growth and Crystal Technology
    • /
    • v.4 no.3
    • /
    • pp.210-222
    • /
    • 1994
  • The characteristics of flows, temperatures, and concentrations of oxygen are numerically studies in the Czochralski furnace with a uniform axial magnetic field. Important governing factors to the flow fields include buoyancy, thermocapillarity, centrifugal force, magnetic force, diffusion and segregation coefficients of the oxygen, evaporation coefficient in the form of SiO, and ablation rate of crucible wall. With an assumption that the flow fields have reached the steady state, which means that two velocity components in the meridional plane and circumferential velocity, temperatures, electric current intensity become non-transient, then unsteady concentration field of oxygen has been analyzed with an initially uniform oxygen concentration. Oxygen transports due to convection and diffusion in the Czochralski flow field and oxygen flux through the growing crystal surface has been investigated.

  • PDF

Two dimensional analysis of axial segregation by convection-diffusion model in batchwise and continuous Czochralski process

  • Wang, Jong-Hoe;Kim, Do-Hyun
    • Proceedings of the Korea Association of Crystal Growth Conference
    • /
    • 1997.10a
    • /
    • pp.117-121
    • /
    • 1997
  • It is shown theoretically that uniform axial dopant concentration distribution can be made throughout the crystal by continuous Czochralski process. Numerical simulation are performed for the transient two-dimensional convection-diffusion model. A typical value of the growth and system parameters for Czochralski growth of p-type, 4 inches silicon crystal was used in the numerical calculations. Using this model with proper model parameter, the axial segregation in batchwise Czochralski growth can be described. It is studied by comparing with the experimental data. With this model parameter, the uniform axial concentration distribution of dopant is predicted in continuous Czochralski process.

  • PDF

Quality evaluation of diamond wire-sawn gallium-doped silicon wafers

  • Lee, Kyoung Hee
    • Journal of the Korean Crystal Growth and Crystal Technology
    • /
    • v.23 no.3
    • /
    • pp.119-123
    • /
    • 2013
  • Most of the world's solar cells in photovoltaic industry are currently fabricated using crystalline silicon. Czochralski-grown silicon crystals are more expensive than multicrystalline silicon crystals. The future of solar-grade Czochralski-grown silicon crystals crucially depends on whether it is usable for the mass-production of high-efficiency solar cells or not. It is generally believed that the main obstacle for making solar-grade Czochralski-grown silicon crystals a perfect high-efficiency solar cell material is presently light-induced degradation problem. In this work, the substitution of boron with gallium in p-type silicon single crystal is studied as an alternative to reduce the extent of lifetime degradation. The diamond-wire sawing technology is employed to slice the silicon ingot. In this paper, the quality of the diamond wire-sawn gallium-doped silicon wafers is studied from the chemical, electrical and structural points of view. It is found that the characteristic of gallium-doped silicon wafers including texturing behavior and surface metallic impurities are same as that of conventional boron-doped Czochralski crystals.

Growth of Nd:YAG single crystal by czochralski method and characteristics of laser generation (Czochralski 방법에 의한 Nd : YAG 단결정의 육성 및 레이저 출력특성)

  • 이상호;김한태;배소익;정수진
    • Korean Journal of Optics and Photonics
    • /
    • v.9 no.3
    • /
    • pp.175-180
    • /
    • 1998
  • Nd:YAG single crystal widely used as solid state laser was grown by Czochralski method. <111> single crystal with 0.9at% of $Nd^{3+}$ was grown from the Czochralski furnace with a automatic diameter control system. The vertical temperature gradient in the liquid was the major factor that influence the crystal quality, and the crystal diameter was controlled by the home made computer program. The crystal boule with $\phi$50mm$\times$ι100mm effective size was cut, polished, and antireflection coated. The optical evaluation such as absorption spectrum, fluorescence spectrum coincide with typical features of Nd:YAG single crystal. The laser rod was assembled into the CW laser generator with a Kr lamp. The maximum CW laser output was 70 W and the threshold power and efficiency was 1.3kW and 1.64% respectively.

  • PDF

Effect of Applied Magnetic Fields on Czochralski Single Crystal Growth (Czochralski 단결정 성장특성제어를 위한 자장형태에 관한 연구)

  • 김창녕;김경훈
    • Journal of the Korean Crystal Growth and Crystal Technology
    • /
    • v.3 no.1
    • /
    • pp.18-30
    • /
    • 1993
  • A numerical analysis has been carried out on the Czochralski flow fields when uniform and nonuniform magnetic fields are applied. Czochralski flow fields are governed by buoyancy forces, thermocapillarity, centrifugal forces, and applied magneic fields. In this analysis, pressure and three components of velocity vectors are obtained, and circumferential electrical currents are calculated. When a uniform magnetic field is applied, all the velocity components are decreased and the circumferential electric currents near the crystal surface are increased as the magnetic field intensity is increased. In the case of a nonuniform field, the flows in a meridional plane are suppressed and the circumferential velocity is increased as the non uniformity is increased. The understanding on the Czochralski flow fields under the influence of magnetic fields can lead to the study on the behavior of the concentration of the solute and impurities.

  • PDF

Optimal Water-cooling Tube Design for both Defect Free Process Operation and Energy Minimization in Czochralski Process (무결정결함영역을 유지하면서 에너지를 절감하는 초크랄스키 실리콘 단결정 성장로 수냉관 최적 설계)

  • Chae, Kang Ho;Cho, Na Yeong;Cho, Min Je;Jung, Hyeon Jun;Jung, Jae Hak;Sung, Su Whan;Yook, Young Jin
    • Current Photovoltaic Research
    • /
    • v.6 no.2
    • /
    • pp.49-55
    • /
    • 2018
  • Recently solar cell industry needs the optimal design of Czochralski process for low cost high quality silicon mono crystalline ingot. Because market needs both high efficient solar cell and similar cost with multi-crystalline Si ingot. For cost reduction in Czochralski process, first of all energy reduction should be completed because Czochralski process is high energy consumption process. For this purpose we studied optimal water-cooling tube design and simultaneously we also check the quality of ingot with Von mises stress and V(pull speed of ingot)/G(temperature gradient to the crystallization) values. At this research we used $CG-Sim^{(R)}$ S/W package and finally we got improved water-cooling tube design than normally used process in present industry. The optimal water-cooling tube length should be 200mm. The result will be adopted at real industry.

Growth and Variance of Properties Er2O3 Doped Near Stoichiometric LiNbO3Single Crystals by the Czochralski Method (Czochralski법으로 Er2O3이 첨가된 Near Stoichiometric 조성 LiNbO3 단결정의 성장 및 특성변화)

  • ;;;Masayuki Habu;Takeshi Ito;Masakimi Natori
    • Journal of the Korean Ceramic Society
    • /
    • v.40 no.8
    • /
    • pp.746-750
    • /
    • 2003
  • Using the Czochralski method, Er$_2$O$_3$ doped near stoichiometric LiNbO$_3$ single crystals were grown 15~20 mm in diameter and 30-35 mm in length for Z-axis. Lattice constants were inspected by the X-Ray Diffractometer (XRD) and through Fourier Transform-Infrared Spectrophotometer (FT-IR), it observed absorption band. Also, the distributions of Er concentration were confirmed by the Electron Probe Micro Analysis (EPMA).

Single crystal growth of ZnWO4 by the Czochralski method and characterization (Czochralski법에 의한 ZnWO4 단결정 성장 및 특성분석)

  • Lim, Chang-Sung
    • Analytical Science and Technology
    • /
    • v.23 no.2
    • /
    • pp.103-108
    • /
    • 2010
  • Single crystals of $ZnWO_4$ with [100], [010] and [001] directions were successfully grown by the Czochralski method. The seed crystals for the single crystal growth of $ZnWO_4$ could be induced by the crystal growth using platinum wires applied by the capillary action from the melt. The growth conditions in each direction were investigated in terms of the variations of rotation speed, pulling rate and diameter of the grown crystals. The formation of cracking in the grown crystals during the cooling process could be prevented by annealing effect. The growth directions of the grown crystals were determined using Laue back reflection. The microscopic characteristics of the grown crystals in each direction were discussed, and their physical properties were evaluated for hardness, thermal expansion coefficients and dielectric constants.