• Title/Summary/Keyword: Czochralski crystal puller

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Magnetic field effects of silicon melt motion in Czochralski crystal puller (초크랄스키 단결정 장치내 실리콘 용융액 운동의 자기장효과)

  • Lee, Jae-Hee
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.15 no.4
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    • pp.129-134
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    • 2005
  • A numerical analysis was performed on magnetic field effects of silicon melt motion in Czochralski crystal puller. The turbulent modeling was used to simulate the transport phenomena in 18' single crystal growing process. For small crucible angular velocity, the natural convection is dominant. As the crucible angular velocity is increased, the forced convection is increased and the distribution of temperature profiles is broadened. The cusp magnetic field reduces effectively the natural and forced convection near the crucible and the temperature profiles of the silicon fluids is similar in the case of conduction.

Silicon melt motion in a Czochralski crystal puller (쵸크랄스키 단결정 장치에서의 실리콘유동)

  • 이재희;이원식
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.7 no.1
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    • pp.27-40
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    • 1997
  • The heat in Czochralski method is transfered by all transport mechanisms such as convection, conduction and radiation and convection is caused by the temperature difference in the molden pool, the rotations of crystal or crucible and the difference of surface tension. This study delvelops the simulation model of Czochralski growth by using the finite difference method with fixed grids combined with new latent heat treatment model. The radiative heat transfer occured in the surfce of the system is treated by calculating the view factors among surface elements. The model shows that the flow is turbulent, therefore, turbulent modeling must be used to simulate the transport phenomena in the real system applied to 8" Si single crystal growth process. The effects of a cusp magnetic field imposed on the Czochralski silicon melt are studied by numerical analysis. The cusp magnetic field reduces the natural and forced convection due to the rotation of crystal and crucible very effectively. It is shown that the oxygen concentration distribution on the melt/crystal interface is sensitively controlled by the change of the magnetic field intensity. This provides an interesting way to tune the desired O concentration in the crystal during the crystal growing.

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Automatic diameter control system for Czochralski growth (자동직경제어 Czochralski 성장장치의 제작)

  • Han, J.Y.;Park, S.S.;Lee, S.K.;Ma, D.J.;Kim, Y.H.;Lee, S.H.
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.4 no.4
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    • pp.356-362
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    • 1994
  • We developed a computer controlled Czochralski puller which automated entire crystal growing processes. Crystal weighing technique was employed for an automatic diameter control. The performance of the system was evaluated by the growth of $LiNbO_3$ single crystals.

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Crystal growth from melt in combined heater-magnet modules

  • Rudolph, P.;Czupalla, M.;Dropka, N.;Frank-Rotsch, Ch.;KieBling, F.M.;Klein, O.;Lux, B.;Miller, W.;Rehse, U.;Root, O.
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.19 no.5
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    • pp.215-222
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    • 2009
  • Many concepts of external magnetic field applications in crystal growth processes have been developed to control melt convection, impurity content and growing interface shape. Especially, travelling magnetic fields (TMF) are of certain advantages. However, strong shielding effects appear when the TMF coils are placed outside the growth vessel. To achieve a solution of industrial relevance within the framework of the $KRISTMAG^{(R)}$ project inner heater-magnet modules(HMM) for simultaneous generation of temperature and magnetic field have been developed. At the same time, as the temperature is controlled as usual, e.g. by DC, the characteristics of the magnetic field can be adjusted via frequency, phase shift of the alternating current (AC) and by changing the amplitude via the AC/DC ratio. Global modelling and dummy measurements were used to optimize and validate the HMM configuration and process parameters. GaAs and Ge single crystals with improved parameters were grown in HMM-equipped industrial liquid encapsulated Czochralski (LEC) puller and commercial vertical gradient freeze (VGF) furnace, respectively. The vapour pressure controlled Czochralski (VCz) variant without boric oxide encapsulation was used to study the movement of floating particles by the TMF-driven vortices.