• Bulletin of the Korean Chemical Society
• /
• v.34 no.1
• /
• pp.164-166
• /
• 2013

Using a simple random walk model, this study simulated the growth of a self-assembled monolayer (SAM) pattern generated by dip-pen nanolithography (DPN). In this model, the SAM pattern grew mainly via the serial pushing of molecules deposited from the tip. This study examined various SAM patterns, such as lines, crosses and letters, by changing the tip scan speed.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
• /
• v.19 no.3
• /
• pp.267-272
• /
• 2006

Optical waveguide based on symmetric and asymmetric Mach-Zehnder interferometer(MZI) type was designed, fabricated and measured the optical characteristics for the application of biosensor. The wavelength of the input optical signal for the device was 1550 nm. And the difference of refractive index was $0.45\;{\Delta}\%$ between core and cladding of the device. The TM(Transverse Magnetic) mode optical properties of the biosensor were analyzed with the refractive index variation of gold thin film deposited for overclad. Nowadays, nano-photonic crystal structures have been paied much attention for its high optical sensitivity. There is a technique to realize the structure, which is called Dip-Pen Nanolithography(DPN) process. The process requires a nano-scale process patterning resolution and high reliability. In this paper, two dimensional nano-photonic crystal array on the surface was proposed for improving the sensitivity of optical biosensor. And the Dip-Pen Nanolithogrphy process was investigated to realize it.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2005.07a
• /
• pp.381-383
• /
• 2005

바이오센서 응용을 위한 대칭 및 비대칭 마하젠더 간섭계 광도파로 소자의 설계, 제작 및 광학적 응답특성을 평가하였다. 설계 제작된 광도파로 소자의 압력광원은 각각 1550nm와 632.8nm이고, 코어와 클래딩의 굴절률차는 0.45 $\Delta$%로 설계 제작하였다. 센서부(상위 클래드)의 금 박막의 미소 굴절률 변화에 따른 TE, TM모드의 특성을 분석하였다. 센서의 보다 높은 감도 개선을 위한 나노-광자결정 구조가 주목받고 있는데, 광자결정 구조의 구현를 위한 리소그래피 공정은 높은 분해능과 신뢰성 있는 나노스케일의 공정이 요구된다. 광-바이오센서의 감도 개선을 위해 센서부 표면에 2차원 나노-광자결정 배열을 제안하고 이를 구현하기 위한 Dip-Pen Nanolithography 공정에 대해 고찰하였다.

• Journal of the Korean institute of surface engineering
• /
• v.47 no.6
• /
• pp.362-367
• /
• 2014

We report the design, fabrication of a $Si_3N_4$ probe and calculation of its mechanical properties for DPN(dip pen nanolithography), which consists of dual tips. Concept of dual tip probe is to employ individual tips on probe as either an AFM tip for imaging or a writing tip for nano patterning. For this, the dual tip probe is fabricated using low residual stress $Si_3N_4$ material with LPCVD deposition and MEMS fabrication process. On the basis of FEM analysis we show that the functionality of dual tip probe for imaging is dependent on the dimensions of dual tip probe, and high ratio of widths of beam areas is preferred to minimize curvature variation on probe.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2003.10a
• /
• pp.251-251
• /
• 2003

• Transactions on Electrical and Electronic Materials
• /
• v.9 no.4
• /
• pp.163-168
• /
• 2008

Photonic crystal structures have been received considerable attention due to their high optical sensitivity. One of the techniques to construct their structure is the dip-pen lithography (DPN) process, which requires a nano-scale resolution and high reliability. In this paper, we propose a two dimensional photonic crystal array to improve the sensitivity of optical biosensor and DPN process to realize it. As a result of DPN patterning test, we have observed that the diffusion coefficient of the mercaptohexadecanoic acid (MHA) molecule ink in octanol is much larger than that in acetonitrile. In addition, we have designed and fabricated optical waveguides based on the mach-zehnder interferometer (MZI) for application to biosensors. The waveguides were optimized at a wavelength of 1550 nm and fabricated according to the design rule of 0.45 delta%, which is the difference of refractive index between the core and clad. The MZI optical waveguides were measured of the optical characteristics for the application of biosensor.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2003.06a
• /
• pp.656-659
• /
• 2003

Although Hereafter a mass production will claim for patterning nano sized thickness or line in micro-nano industry. existent lithography fabrication has many usable fields, it has complex fabrication steps, expensive values and row work rates. Development of Dip-pen type nano plotter using polymer actuator can construct row cost mass production system because it will change existent lithography fabrication more simple and easy.

• Journal of Adhesion and Interface
• /
• v.19 no.4
• /
• pp.163-166
• /
• 2018

Dip-pen nanolithography(DPN) is an atomic force microscope (AFM) based method of generating nano- or micro-patterns. This technique has been used to transfer various ink materials on the substrate through water meniscus formed between AFM tip and the substrate surface. In this study, the heptadecafluoro-1,1,2,2-tetrahydrodecyltrimethoxysilane (HDFDTMS) ink materials were coated on the pre-coated AFM tip surface with the HDFDTMS molecules. When the tip brought into contact with the hydroxyl-functionalized silicon surface, HDFDTMS ink molecules have been successfully transported from the tip onto the surface via water meniscus. The created array and passivation area showed stable structures on the surface, and the transport of ink materials from the AFM tip to the surface followed linear increase in pattern size with contact time.

• Proceedings of the Polymer Society of Korea Conference
• /
• 2006.10a
• /
• pp.285-285
• /
• 2006

The ionic layer-by-layer (LBL) assembled films can be formed by sequentially dipping of substrates to oppositely charged polyions solution in the multilayer, called polyelectrolytes multilayer (PEM) films. Easy way of these assemblies of charged polymers offer the ability to adjust important parameters such as controllability of thickness in the nanometer-scale level and functionality of most top layer of PEM films. Nevertheless, we do not know of any trials to fabricate PEM organic films into nanometer size. Herein, we show the integration of the LBL technique with DPN in fabricating nanometer size patterns of multilayered polyelectrolyte structures. Through the use of single and multiple cantilever AFM probes, we demonstrate the parallel writing capabilities of DPN.

• Proceedings of the KSME Conference
• /
• 2003.04a
• /
• pp.1048-1051
• /
• 2003

주사탐침현미경 (Scanning Probe Microsope, SPM)을 이용하여 직접 패터닝을 함으로써 hexanedithiol 분자의 임의 패턴을 금 표면에 형성하였다. 또한, hexanedithiol 분자는 양단에 thiol 그룹이 존재하여 금과 안정화 화학결합을 이룰 수 있으므로, 금 표면과결합을 이루고 있지 않는 상단의 thiol 그룹에 금 나노 입자를 고정함으로써 나노입자의 패턴을 제작하였다. SPM을 이용한 직접 패터닝 방법은 분자활성을 유지한 채로 임의 패턴을 수십 nm의 선폭으로 구현하는 것이 가능하므로, 나노입자 배열뿐만 아니라, 생화학물질의 패터닝을 통한 바이오 기술연구, 레지스트용 분자 패터닝과 시각 및 흡착 등의 계속적인 공정을 통한 다양한 나노구조 제작 등에 폭넓게 활용될 수 있다.