• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제43회 하계 정기 학술대회 초록집
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• pp.337-337
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• 2012

단일 결정의 Ge 박막은 0.67 eV의 작은 밴드갭을 가지고 있기에 장파장의 빛을 흡수하기 위한 목적으로 태양전지 분야에서 집중적인 연구가 진행되어지고 있다. 또한, Si에 비하여 높은 전하 이동도를 가지고 있기에 박막 트랜지스터로의 응용 연구들이 진행되고 있는 중이다. 전자 소자로써 큰 효과를 가지고 오기 위해서는 양질의 Ge 결정박막을 성장하여야 한다. 이를 위하여 다양한 공정 방법으로 Ge 박막의 결정성 향상에 대한 연구들을 진행하고 있다. 그중 본 연구에서는 ICP-assisted DC sputtering 방법을 이용하여 저온(${\sim}230^{\circ}C$) Ge 박막 결정성장에 대한 연구를 진행하였다. Ge 박막을 유리기판(Eagle 2000) 위에 증착하였으며, $6{\times}10^{-6}$ Torr 이하의 기본 압력에서 공정을 진행하였다. 7 mTorr의 Ar 분위기에서 타겟에 인가되는 전압 및 전류를 변화 시키며 Ge 박막 증착에 미치는 영향에 대해서 연구를 진행하였다. 기본적인 DC sputtering 방법을 이용하여 박막을 증착하였을 경우 증착한 모든 샘플에서 결정성을 확인하였으며, 낮은 전압에서도 결정화가 일어나는 것을 확인 할 수 있었다. 또한 전압을 증가시켜도 결정화 정도가 일정하게 유지됨을 확인 할 수 있었다. 다만 이 경우에는 결정의 방향이 랜덤하게 형성되었으며, DC sputtering 방법을 이용하여 저온에서 공정을 진행하였기에 박막은 수십 nm의 columnar grain을 형성하였다. ICP를 이용한 DC sputtering 방법을 이용하여 박막을 증착 하였을 경우, 일정 전압 이하에서는 비정질의 Ge 박막이 균일하게 형성됨을 확인 할 수 있었으며, 이후 결정화 정도가 타겟에 인가되는 전압에 비례하여 증가하였다. 또한, 이때 증착된 Ge 박막은 단일 결정으로 형성되었음을 확인 할 수 있었다. 이는 박막 성장시 ICP에 의해서 생성된 Ar 이온이 표면으로 가속화됨으로 인하여 Ge 박막 표면에서 channeling 효과가 나타남으로 인하여 <110> 방향으로 결정이 정열된 것으로 보인다.

• 분석과학
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• 제35권6호
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• pp.256-266
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• 2022

원자력 이용시설에서 발생하는 방사성 폐기물의 처분을 위해서 ¹²⁹I 와 같이 긴 반감기를 지니는 핵종의 농도를 결정하는 것은 매우 중요하다. 특히, 토양과 콘크리트와 같은 고체 시료내의 방사성 핵종들을 분석하기 위해서는 시료 중의 관심 핵종만을 효과적으로 분리하고 정제하는 과정이 필수적이다. 본 연구에서는 고온 연소로를 이용하여 고체 시료 중 ¹²⁹I를 분석하는 절차를 확립하였다. 시료에서 휘발된 ¹²⁹I은 환원제(NaHSO₃)를 첨가한 0.01 M HNO₃으로 포집 되어 ICP-MS로 신속하게 측정할 수 있었다. 이때, 시료에 첨가한 ¹²⁹I의 회수율을 높이고자 연소온도, 이동상 가스의 종류, 촉매 그리고 포집용액과 같은 연소로 분석 조건들을 최적화하였다. 또한, 본 연구에서 확립된 ¹²⁹I의 분석조건을 다른 휘발성 핵종(³H, ¹⁴C)의 동시분석에 적용할 수 있도록 최적화하였다. 최종적으로 고온 연소로를 사용하여 휘발성 핵종들을 분리한 후, 이들을 LSC (³H, ¹⁴C)와 ICP-MS (¹²⁹I)로 각각 측정하는 분석 절차의 유효성을 평가하였다.

• Transactions on Electrical and Electronic Materials
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• 제10권2호
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• pp.35-39
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• 2009

A novel Helmholtz coil inductively coupled plasma(H-ICP) etcher is proposed and characterized for deep nano-scale CMOS technology. Various hardware tests are performed while varying key parameters such as distance between the top and bottom coils, the distance between the chamber ceiling and the wafer, and the chamber height in order to determine the optimal design of the chamber and optimal process conditions. The uniformity was significantly improved by applying the optimum conditions. The plasma density obtained with the H-ICP source was about $5{\times}10^{11}/cm^3$, and the electron temperature was about 2-3 eV. The etching selectivity for the poly-silicon gate versus the ultra-thin gate oxide was 482:1 at 10 sccm of $HeO_2$. The proposed H-ICP was successfully applied to form multiple 60-nm poly-silicon gate layers.

• BMB Reports
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• 제36권4호
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• pp.379-386
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• 2003

A mutant herpes simplex virus 1, mtHSV, was constructed by inserting the E. coli beta-galactosidase gene into the loci of icp34.5, the apoptosis-inhibiting gene of HSV. The mtHSV replicated in and lysed U251 (human glioma cells), EJ (human bladder cells), and S-180 (mice sarcoma cells), but not Wish (human amnion cells) cells. With its intact tk (thymidine kinase) gene, mtHSV exhibited susceptibility to acyclovir (ACV), which provided an approach to control viral replication. An in vivo test with mtHSV was conducted in immune-competent mice bearing sarcoma S-180 tumors, which were treated with a single intratumoral injection of mtHSV or PBS. Tumor dimensions then were measured at serial time points, and the tumor volumes were calculated. Sarcoma growth was significantly inhibited with prolonged time and reduced tumor volume. There was microscopic evidence of necrosis of tumors in treated mice, whereas no damage was found in other organs. Immunohistochemical staining revealed that virus replication was exclusively confined to the treated tumor cells. HSV-1 DNA was detected in tumors, but not in the other organs by a polymerase chain reaction analysis. From these experiments, we concluded that mtHSV should be a safe and promising oncolytic agent for cancer treatment.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2004년도 춘계학술대회 논문집 방전 플라즈마 유기절연재료 초전도 자성체연구회
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• pp.61-64
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• 2004

Recently, the RF inductive discharge or inductively coupled plasma (ICP) continues to attract growing attention as an effective plasma source in many industrial applications, the best known of which are plasma processing and lighting technology. To the point of lighting sources, the electrodeless fluorescent lamps utilizing an inductively coupled plasma (ICP) have been objects of interest and research during the last decades, mainly because of their potential for extremely long life, high lamp efficacies, rapid power switching response. The electrodeless fluorescent lamp that is dealt with in this work comprises a bulb filled with rare gas and amalgam of vaporizable metal and has a coil provided with a winding around the ferrite. Current through a coil produces a magnetic field in the discharge space. The changing magnetic flux then produces an azimuthal electric field E around the coil, according to Faraday's laws of magnetic induction.

• Journal of Veterinary Science
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• 제21권5호
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• pp.72.1-72.10
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• 2020

Background: Fenbendazole, a dewormer drug, is used widely in the clinical treatment of parasite infections in animals. Recent studies have shown that fenbendazole has substantial effects on tumor growth, immune responses, and inflammatory responses, suggesting that fenbendazole is a pluripotent drug. Nevertheless, the antiviral effects have not been reported. Fenbendazole can disrupt microtubules, which are essential for multiple viruses infections, suggesting that fenbendazole might have antiviral effects. Objectives: This study examined whether fenbendazole could inhibit bovine herpesvirus 1 (BoHV-1) productive infection in cell cultures. Methods: The effects of fenbendazole on viral production, transcription of the immediate early (IE) genes, viron-associated protein expression, and the cellular signaling PLC-γ1/Akt pathway were assessed using distinct methods. Results: Fenbendazole could inhibit BoHV-1 productive infections significantly in MDBK cells in a dose-dependent manner. A time-of-addition assay indicated that fenbendazole affected both the early and late stages in the virus replication cycles. The transcription of IE genes, including BoHV-1 infected cell protein 0 (bICP0), bICP4, and bICP22, as well as the synthesis of viron-associated proteins, were disrupted differentially by the fenbendazole treatment. The treatment did not affect the cellular signaling pathway of PLC-γ1/Akt, a known cascade playing important roles in virus infection. Conclusions: Overall, fenbendazole has antiviral effects on BoHV-1 replication.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2006년도 제31회 학술논문발표회 초록집
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• pp.123-123
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• 2006

• Journal of Pharmaceutical Investigation
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• 제34권2호
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• pp.107-114
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• 2004

External lyogels containing prostaglandin $E_1$ ethyl ester $(PGE_1-EE)$, a prodrug of prostaglandin $E_1\;(PGE_1)$ as a therapeutic agent for erectile dysfunction, were formulated to overcome the aqueous instability and enhance the percutaneous absorption. Lyogels of $PGE_1-EE$ were prepared with ethanol (EtOH)/proplyene glycol (PG) cosolvent system as a vehicle, cineol as an enhancer, and hydroxypropylcellusose as a gelling agent. In vitro percutaneous absorption studies were performed to determine the rate of $PGE_1$ absorption through rat or hairless mouse skin. The permeability of $PGE_1-EE$ lyogel with enhancer was 16-fold greater than that of lyogel without enhancer. Cosolvent produced 9-fold increase in percutaneous absorption. Pharmacodynamic effects of lyogels were evaluated in mature male cats in terms of intracavernosal pressure (ICP). Lyogels containing 0.1 % of $PGE_1-EE$ showed higher ICP compared to intraurethral preparation of $PGE_1$ (1 %) and enhancer-free control lyogel. The shelf-life $(t_{10%})$ of lyogel at refrigerated condition $(4^{\circ}C)$ was calculated as 928 days, which is 4.2 times longer than that of control hydrogel. As a result, $PGE_1-EE$ was formulated successfully to a lyogel system with a selective enhancer and cosolvent system for the topical delivery of $PGE_1$.

• 한국대기환경학회지
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• 제11권4호
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• pp.331-337
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• 1995

This study was carried out to investigate the chemical composition of dustfall at Cheju(mean sea level; 71.7m, 33$^{\circ}$17'N, 126$^{\circ}$10'E) and Ullung island(mean sea level; 22.1m, 38$^{\circ}$29'N, 130$^{\circ}$54'E) from October 1993 to september 1994. The dustfall matter samples were collected by deposit gauges. The ionic components of each samples was analyzed by Ion Chromatograpy (Dionex 4000i), While heavy metals by Inductively Coupled Plasma Atomic Emission Spectrometry(ICP/AES; Shimadzu ICP-4). The results for seasonal variation of dustfall matter matter total amount, water-soluble ionic components and water-soluble ionic components total deposition amount to two sites were compared each other. The seasonal variations of dustfall amount at Ullung and Cheju island were found in order of Spring>Winter>Fall>Summer, and the maximum of dustfall amount were during the Yellow Sand period. Also, Total amount of water-soluble components except for $F^{[-10]}$ were high in Cheju more than Ullung island.more than Ullung island.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2009년도 제38회 동계학술대회 초록집
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• pp.438-438
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• 2010

The abnormal behavior of the argon metastable density during the E-H mode transition in argon ICP discharge was investigated. Lots of investigations including global models expected that during and after the mode transition of ICP discharge, the density of metastable increases with applied rf power (i.e. electron density). However, recent direct measurement of metastable density revealed that the metastable density of argon decreases with the applied power during and after the mode transition. This result may not be explained by the previous global model which is based on the assumption of the Maxwellian electron energy distribution function (EEDF). In this paper, to explain this abnormal behavior with simple manners, a simple global model taking account of the effect of the non-Maxwellian EEDFs incorporating into a set of coupled rate equations is proposed. The result showed that the calculated metastable density taking account of non-Maxwellian EEDF and its evolution during the transition has an abnormal behavior with electron density and is in good agreement with the previous measurement results, indicating the close coupling of electron kinetics and the behavior of metastable density. The proposed simple model is expected to provide qualitative kinetic insight to understand the behavior of the metastable density in various plasma discharges which typically exhibit non-Maxwellian distribution.