• 한국재료학회:학술대회논문집
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• 한국재료학회 2012년도 춘계학술발표대회
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• pp.106.1-106.1
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• 2012

EBSD(Electron BackScattered Diffraction)분석은 주사전자현미경에서 관찰되는 비교적 넓은 영역의 결정 방위를 측정하여 집합조직을 해석하는 동시에 결정 방위의 변화를 기준으로 결정립계를 구분 지어 미세조직의 정량 분석도 가능하기 때문에 많은 연구자들이 사용하고 있다. 그러나 EBSD의 Kikuchi 패턴은 시편 표면으로부터 30~50nm 깊이 범위의 표면층으로부터 방출되기 때문에 EBSD 분석 결과는 시편의 표면 처리 상태에 크게 영향을 받아 적절한 시편준비법이 요구된다. 시편 준비 과정 중에 생기는 변형층, 산화층이나 오염층이 10nm 이내로 제어되지 못하면 명확한 패턴을 얻지 못하여 분석이 어려운 경우가 많으므로, 시료의 절단과 연마 과정 중에 변형층을 되도록 적게 만들고 표면의 산화나 오염을 최대한 방지해야 한다. 또한 EBSD 분석 특성상 시편을 70도로 기울이기 때문에 시편의 요철이 심하면 볼록한 영역에 의해 오목한 영역의 패턴이 가려져 결정방위 정보를 얻기 힘들다. 이런 이유로 시편을 최대한 평평하게 하고 요철이 생기지 않게 시편 준비를 하는 것이 관건이다. 금속재료의 EBSD 시편준비법으로는 일반적으로 기계적 연마법과 전해연마법이 주로 쓰인다. 경한 석출물이나 개재물이 연한 기지에 분산되어 있는 시편이나 이종 소재 접합재의 경우는 전해연마법을 사용하면 특정 상(혹은 합금)이 먼저 연마되어 큰 단차가 생기거나 석출물에 의해 요철이 심해져서 정량적인 EBSD 분석이 어렵게 된다. 이 연구에서는 시편 준비가 어렵다고 알려진 다상 금속재료에서의 EBSD 분석 사례를 소개한다. Ti-6Al-4Fe-0.25Si 시효처리합금, 알루미늄 기지 복합재료, 마찰교반용접한 알루미늄-타이타늄합금의 EBSD 시편준비법과 그 분석 결과를 고찰한다.

• Applied Microscopy
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• 제45권4호
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• pp.218-224
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• 2015

A technical overview on the various sample preparation methods for electron backscattered diffraction (EBSD) analysis is carried out. The mechanical polishing with colloidal silica finish, electro-chemical polishing, dual layer coating and ion beam milling are introduced for the common sample preparation methods for EBSD observation and some issues that are frequently neglected by the common EBSD users but should be considered to get a reliable EBSD data are discussed. This overview would be especially helpful to the people who know what EBSD technique is but do not get a reliable EBSD data because of difficulties in sample preparation.

• 한국전기전자재료학회논문지
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• 제30권11호
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• pp.728-733
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• 2017

Herein, for the quantitative analysis of the arc beads related to electric fire, we used electron backscatter diffraction (EBSD), a measuring device for grain orientation of materials, we compared and analyzed the surface texture of primary and secondary beads according to the difference in cooling rate at ambient temperature. This analysis revealed that the primary beads showed similar distribution at both low and high angles, while the secondary beads showed a higher distribution at low angles than at high angles. Thus, EBSD can be used for quantitative analysis of the beads and can be applied to identify beads in the future.

• Applied Microscopy
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• 제44권1호
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• pp.34-39
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• 2014

Electron backscatter diffraction (EBSD) is widely used for quantitative microstructural analysis of the crystallographic nature of variety of materials such as metals, minerals, and ceramics. EBSD can provide a wide range of information on materials including grain size, grain orientation, texture, and phase identity. In the case of metallic alloys, EBSD now has become an essential technique to analyze the texture, particularly when severe deformation is applied to the alloys. In addition, EBSD can be one of the very useful tools in identification of twin, particularly in Mg alloys. In Mg alloys different type of twin can occur depending on the c/a ratio and stacking fault energy on the twinning plane. Such an occurrence of different type of twin can be most effectively analyzed using EBSD technique. In this article, the recent development of Mg alloys and occurrence of twin in Mg are reviewed. Then, recently published example for identification of tension and compression twins in AZ31 and ZX31 is introduced to explain how EBSD can be used for identification of twin in Mg.

• 한국전자현미경학회:학술대회논문집
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• 한국현미경학회 2001년도 제32차 춘계학술대회
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• pp.39-40
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• 2001

• 분석과학
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• 제14권1호
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• pp.50-58
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• 2001

압연판재의 결정립 미세화를 위해 새롭게 도입된 극저온 강압연법을 극저온 압연법, 상온 강압연법과 비교 분석하였다. EBSD를 이용하여 결정립 구조를 분석하였으며, 결정립 크기를 측정하였다. 극저온 압연법과 상온 강압연법은 각각 39%와 87%의 결정립 크기 감소효과를 보였으며, 극저온 강압연법은 상온 강압연법과 비슷한 결정립 감소효과를 갖고 있었다. 따라서 강압연법이 극저온 압연법보다 결정립 미세화에 훨씬 더 효과적임을 알 수 있었다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2016년도 제50회 동계 정기학술대회 초록집
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• pp.172-172
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• 2016

Dual-beam experiments (Focused ion beam - Orientation mapping microstructure, FIB-OIM) is a widely used experimental tool because this experiments tool available alternates between automated serial sectioning and EBSD with the help of dual beams. We investigated the reconstruction procedure for analysis tool which three-dimensional internal microstructure using Ni superalloy(IN100) and ZrO2. As a results, we observed annealing twin boundary each layer in Ni superalloy(IN100) and fairly isotropic internal microstructure in ZrO2 using marching cubes algorithm. According to these results, this procedure is reconstructed well and we gained ability to arrange the EBSD map and internal microstructure.

• 한국레이저가공학회지
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• 제15권3호
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• pp.11-15
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• 2012

The laser weld of AZ31 magnesium alloy was characterized with OM, EBSD and micros vickers hardness tester in experiment. EBSD analysis and micro-hardness measurements were carried out at the three regions (Equiaxed Zone, Columnar Dendrite Zone, Base Metal) of the welded AZ31Mg alloy sheets. The magnesium alloy show the rectangular shape bead in laser weld. EBSD analysis revealed that the three regions show the heterogeneous distribution of grain size and microtexture. Micro-hardness measurement also revealed that the heterogeneous distribution of microstructure contributed to the heterogeneous micro-hardness distribution in the three regions.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2006년도 하계학술대회 논문집 Vol.7
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• pp.46-46
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• 2006

$SrTiO_3$ was annealed at two different annealing times (1 h and 16 h) to investigate the annealing effect on the grain size and orientation distribution. Electron backscattered diffraction (EBSD) was used to analyze the grain size and grain orientation distributions of the $SrTiO_3$. It is possible to understand the annealing effect on the microstructure evolution, by comparing the grain size and orientation distribution of the $SrTiO_3$ as a function of annealing time.

• 대한금속재료학회지
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• 제48권8호
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• pp.730-740
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• 2010

Aluminum, magnesium, titanium and high Mn steel are difficult to use in electron backscatter diffraction (EBSD) sample preparation due to the formation of an oxidation layer under conventional polishing. Alcohol-based polishing with colloidal silica suspension was introduced for these delicate samples. A hard particle-embedded sample was analyzed successfully using mechanical polishing. Ion-milling was effective in removing oxidized, deformed and transformed layers after mechanical polishing and was able to reduce artifacts significantly. The microstructure of a cross-section of a thin copper film was evaluated by attachment of a dummy to the film for mechanical polishing.