Thickness Optimization of SiO2/Al2O3 Stacked Layer for High Performance pH Sensor Based on Electrolyte-insulator-semiconductor Structure (SiO2/Al2O3 적층 감지막의 두께 최적화를 통한 고성능 Electrolyte-insulator-semiconductor pH 센서의 제작)
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- Journal of the Korean Institute of Electrical and Electronic Material Engineers
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- v.25 no.1
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- pp.33-36
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- 2012