• 한국정보디스플레이학회:학술대회논문집
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• 2007.08a
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• pp.908-910
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• 2007

Thin Film Transistor (TFT) manufacturing process is complicated. Electrostatic discharge (ESD) occurs during every process step. This paper describes ESD phenomena in terms of TFT design and processing flow. The abnormal contact between equipment and glass is found out to be the key reason causing ESD.