• 제목/요약/키워드: Electrical Resistivity

검색결과 2,812건 처리시간 0.036초

다층배선을 위한 구리박막 형성기술 (Deposition Technology of Copper Thin Films for Multi-level Metallizations)

  • 조남인
    • 마이크로전자및패키징학회지
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    • 제9권3호
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    • pp.1-6
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    • 2002
  • A low temperature process technology of copper thin films has been developed by a chemical vapor deposition technology for multi-level metallzations in ULSI fabrication. The copper films were deposited on TiN/Si substrates in helium atmosphere with the substrate temperature between $130^{\circ}C$ and $250^{\circ}C$. In order to get more reliable metallizations, effects on the post-annealing treatment to the electrical properties of the copper films have been investigated. The Cu films were annealed at the $5 \times10^{-6}$ Torr vacuum condition and the electrical resistivity and the nano-structures were measured for the Cu films. The electrical resistivity of Cu films shown to be reduced by the post-annealing. The electrical resistivity of 2.0 $\mu \Omega \cdot \textrm{cm}$ was obtained for the sample deposited at the substrate temperature of $180^{\circ}C$ after vacuum annealed at $300^{\circ}C$. The resistivity variations of the films was not exactly matched with the size of the nano-structures of the copper grains, but more depended on the contamination of the copper films.

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BTA 교반온도에 따른 변압기유의 체적고유저항 특성 (Volume Resistivity Characteristies of Transformer Oils due to the Stirring Temperalure of BTA)

  • 이용우;김석환;박문규;소병문;김왕곤;홍진웅
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 1997년도 추계학술대회 논문집
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    • pp.290-293
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    • 1997
  • In this paper, volume resistivity is studied so that the electrical properties for transformer oil due to the stirring temperature of BTA is investigated. A measurement of volume resistivity using the VMG-1000 highmegohm meter is recorded after 10 minutes when the each voltage, and DC 100[V], 250[V], 500[V] and 1000[V] is applied, according to the step voltage appliaction method. A coaxial cylindrical liquid electrode to measure volume resistivity of specimen is used, and its geometric capacitance is 16[pF].

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고온가압소결한 $\alpha-SiC-ZrB_2$ 복합체의 전기전도기구 (Electrical Conductive Mechanism of Hot-pressed $\alpha-SiC-ZrB_2$ Composites)

  • 신용덕;주진영;권주성
    • 대한전기학회논문지:전기물성ㆍ응용부문C
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    • 제48권2호
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    • pp.104-108
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    • 1999
  • The electrical conductive mechanism and temperature dependence of electrical resistivity of $\alpha-SiC-ZrB_2$ composites with $ZrB_2$ contents were investigated. The electrical resistivity of hot-pressed composites was measured by the Pauw method form $25^{\circ} to 700^{\circ}C$. The electrical resistivity of the composites follow the electrical conduction model for a homogeneous mixture of two kind of particles with different conductivity. Also, the electrical resistivity versus temperature curves indicate the formation of local chains of $ZrB_2$ particles. In case of $\alpha-SiC-ZrB_2$ composites containing above 39vol.% $ZrB_2$ showed positive temperature coefficient resistance(PTCR), whereas the electrical resistivity of $\alpha-SiC-21vol.% ZrB_2$ showed negative temperature coefficient resistance(NTCR).

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Influence of steel-fiber type and content on electrical resistivity of old-concrete

  • Uygunoglu, Tayfun;Topcu, Ilker Bekir;Simsek, Baris
    • Computers and Concrete
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    • 제21권1호
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    • pp.1-9
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    • 2018
  • Electrical resistivity is a property associated with both the physical and chemical characteristics of concrete. It allows the evaluation of the greater or lesser difficulty with which aggressive substances penetrate the concrete's core before the dissolution of the passive film process and the consequent reinforcement's corrosion begin. This work addresses the steel fiber addition to concrete with two types and various contents from 0% to 1.3%, correlating it with its electrical resistivity. To that effect, 9 different mixes of steel fiber reinforced concrete (SFRC) were produced. The electrical resistivity was evaluated on the on six years aged SFRC by direct measurement at different frequency from 0.1 kHz to 100 kHz. The results indicate that steel fiber content is strongly conditioned by the type and quantity of the additions used. It was also found that long type of fibers has more effect on decreasing the electrical resistivity of concrete than short fibers. Therefore, they increase the corrosion risk of concrete depending on fiber volume fraction and moisture percentage.

터널 건설 예정지구에서의 전기비저항 탐사와 전자탐사의 적용을 통한 연약대 탐지에 대한 사례 연구 (A case histories on the detection of weak zone using electrical resistivity and EM surveys in planned tunnel construction site)

  • 권형석;송윤호;이명종;정호준;오세영;김기석
    • 한국지반공학회:학술대회논문집
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    • 한국지반공학회 2002년도 봄 학술발표회 논문집
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    • pp.63-70
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    • 2002
  • In tunnel construction, the information on the rock quality and the location of fault or fracture are crucial for economical design of support pattern and for safe construction of the tunnel. The grade of rock is commonly estimated through the observation with the naked eye of recovered cores in drilling or from physical parameters obtained by their laboratory test. Since drilling cost is quite expensive and terrains of planned sites for tunnel construction are rough in many cases, however, only limited information could be provided by core drilling Electrical resistivity and EM surveys may be a clue to get over this difficulty. Thus we have investigated electrical resistivity and EM field data providing regional Information of the rock Quality and delineating fault and fracture over a rough terrain. In this paper, we present some case histories using electrical resistivity and EM survey for the site investigation of tunnel construction. Through electrical resistivity and EM survey, the range and depth of coal seam was clearly estimated, cavities were detected in limestone area, and weak zones such as joint, fault and fracture have been delineated.

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Assessment and Correlation of Saline Soil Characteristics using Electrical Resistivity

  • Mustapha Maliki;Fatima Zohra Hadjadj;Nadia Laredj;Hanifi Missoum
    • Journal of Electrochemical Science and Technology
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    • 제14권3호
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    • pp.205-214
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    • 2023
  • Soil salinity is becoming one of the most devastating environmental hazards over the years. Soil investigation involves fast, low cost and non disturbing methods to measure soil characteristics for both construction projects as well as for agricultural use. The electrical resistivity of saline soils is greatly governed by salt concentration and the presence of moisture in soil matrix. Experimental results of this investigation highlight that there is a significant relationship between the electrical resistivity of soil samples mixed with chloride solutions (NaCl, KCl, and MgCl2) at various concentrations, and soil physical properties. Correlations represented by quadratic functions were obtained between electrical resistivity and soil characteristics, namely, water content, degree of saturation and salt concentration. This research reveals that the obtained correlations between electrical resistivity, salt concentration, water content and degree of saturation are effective for predicting the characteristics of salt affected soils in practice, which constitute a governing element in the assessment of saline lands sustaining infrastructure.

The influence of EAF dust on resistivity of concrete and corrosion of steel bars embedded in concrete

  • Almutlaq, Fahad M.
    • Advances in concrete construction
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    • 제2권3호
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    • pp.163-176
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    • 2014
  • Essentially, when electrical current flows easily in concrete that has large pores filled with highly connective pore water, this is an indication of a low resistivity concrete. In concrete, the flow of current between anodic and cathodic sites on a steel reinforcing bar surface is regulated by the concrete electrical resistance. Therefore, deterioration of any existing reinforced concrete structure due to corrosion of reinforcement steel bar is governed, to some extent, by resistivity of concrete. Resistivity of concrete can be improved by using SCMs and thus increases the concrete electrical resistance and the ability of concrete to resist chloride ingress and/or oxygen penetration resulting in prolonging the onset of corrosion. After depassivation it may slow down the corrosion rate of the steel bar. This indicates the need for further study of the effect of electric arc furnace dust (EAFD) addition on the concrete resistivity. In this study, concrete specimens rather than mortars were cast with different additions of EAFD to verify the electrochemical results obtained and to try to understand the role of EAFD addition in influencing the corrosion behaviour of reinforcing steel bar embedded in concrete and its relation to the resistivity of concrete. The results of these investigations indicated that the corrosion resistance of steel bars embedded in concrete containing EAFD was improved, which may link to the high resistivity found in EAFD-concrete. In this paper, potential measurements, corrosion rates, gravimetric corrosion weight results and resistivity measurements will be presented and their relationships will also be discussed in details.

침출수로 오염된 불포화사질토의 전기비저항 변화에 대한 연구 (A Study on the Variation of Resistivity of the Unsaturated Sandy Soils Contaminated by Leachate)

  • 윤춘경;유찬
    • 한국농공학회지
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    • 제40권2호
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    • pp.112-122
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    • 1998
  • Measurement of electrical resistivity in soils has been used for many years with purpose of estimating in situ porosity or density. Recently electrical resistivity has also been used as an indicator of soil contaimination. This paper presents the result of laboratory experiment to investigate the resistivity variation in contaminated sandy soils. The results can be used with the Cone Penetrometer Test (CPT) result to analyse ground condition. In the experiment, the water content and leachate concentration of soils were controlled by groundwater and leachate, and then the resistivity measurement was made with 'STING-R1' by Advanced Geosciences Inc. In the case of using groundwater, the resistivity was in the range of over 1000${\omega}{\cdot}m$, but in the case of using polluted water by leachate, the resistivity decreased significantly down to 10~ 100${\omega}{\cdot}m$ for the same moisture content. Also the resistivity varied according to the degree of saturatrion. Therefore, if soil is contaminated by leachate, the CPT with electrical resistivity sensor might be used to investigate the contamination status and plume migration. But exact component of leachate and the pollutant concentration are still hard to identify.

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오염지반 조사를 위한 전기비저항/정전용량 측정콘의 적용성 평가 (Applicability of Resistivity/Capacitance Measurement on CPT Module for Investigation of Subsurface Contamination)

  • 오명학;김용성;유동주;박준범
    • 한국지반공학회:학술대회논문집
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    • 한국지반공학회 2006년도 춘계 학술발표회 논문집
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    • pp.330-337
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    • 2006
  • Resistivity cone penetrometer test (RCPT) can be employed at a relatively low cost for delineation of subsurface contamination in situ, and then be supplemented with a minimum confirmatory sampling and laboratory testing program. While the resistivity measurement have potential to investigate the subsurface contamination, resistivity measurements alone will lead to some degree of ambiguity in the results. In this study, capacitance measurement was incorporated into the RCPT to overcome the ambiguity inherent in electrical resistivity measurements for delineating the subsurface contamination. This study is focused on verifying the applicability of resistivity and capacitance measurements on CPT module to provide information on contaminated subsurface by heavy metal and petroleum hydrocarbon. Laboratory model tests were performed to evaluate the sensitivity of the measured resistivity and relative capacitance on the water content and different types of contaminants. Test results show that simultaneous measurement of electrical resistivity and capacitance can give more reliable information on subsurface contamination.

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복소수이미지 방법을 이용한 겉보기 대지저항률 계산 (Apparent Soil Resistivity Calculation Using Complex Image Method)

  • 김호찬;부창진;강민제
    • 전기전자학회논문지
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    • 제23권1호
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    • pp.318-321
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    • 2019
  • 겉보기대지저항률은 층의 깊이와 대지저항률과 같은 다층 대지파라미터들을 추정하는 데 사용된다. 겉보기대지저항률은 측정 될 수 있으며, 또한 겉보기대지저항률은 이들 파라미터들의 함수이기 때문에 주어진 대지 파라미터들로 계산 될 수 있다. 따라서 모든 최적화 알고리즘을 사용하여 계산된 겉보기대지저항률을 측정된 대지저항률에 가깝게 만드는 이들 파라미터들을 찾을 수 있다. 겉보기대지저항률을 계산하기위한 방정식은 0 차 Bessel함수를 포함하는 무한 적분으로 구성되어 있기 때문에 복잡하고 시간 소모적이다. 본 논문에서는 수평 다층 구조의 겉보기대지저항률을 계산하기 위한 빠른 알고리즘이 복소수이미지 방법을 사용하여 제시되었다.