• Journal of the Semiconductor & Display Technology
• /
• v.18 no.1
• /
• pp.5-9
• /
• 2019

Optical emission spectroscopy is used to identify chemical species and monitor the changes of process results during the plasma process. However, plasma process monitoring or fault detection by using emission signal variation monitoring is vulnerable to background signal fluctuations. IR heaters are used in semiconductor manufacturing chambers where high temperature uniformity and fast response are required. During the process, the IR lamp output fluctuates to maintain a stable process temperature. This IR signal fluctuation reacts as a background signal fluctuation to the spectrometer. In this research, we evaluate the effect of infrared background signal fluctuation on plasma process monitoring and improve the plasma process monitoring accuracy by using simple infrared background signal subtraction method. The effect of infrared background signal fluctuation on plasma process monitoring was evaluated on $SiO_2$ PECVD process. Comparing the $SiO_2$ film thickness and the measured emission line intensity from the by-product molecules, the effect of infrared background signal on plasma process monitoring and the necessity of background signal subtraction method were confirmed.

• Transactions of the Korean Society of Machine Tool Engineers
• /
• v.13 no.4
• /
• pp.95-99
• /
• 2004

In this study, the leak detection technique of pressure vessel by using acoustic emission(AE) signal is suggested experimentally. The leak of pressure vessel is located at the welding line due to welding defects. we measured the AE signal using Rl5I sensor, and examined the AE parameters in leak condition. It is investigated that the mean value of AE signal is dependent on leak source location. So the absolute mean value of AE signal is adopted as dominant AE parameter. We proposed leak detection algorithm using AE signal mean value for monitoring the leak source location.

• Tribology and Lubricants
• /
• v.17 no.1
• /
• pp.40-55
• /
• 2001

Acoustic emission(AE) signal has been widely utilized to monitor the interaction at the head/disk interface. In this work the relationship between the AE signal and the state of contact between the slider and the disk is presented. Results of the FFT(Fast Fourier Transform) analyses of the AE signal could be used to better understand the interfacial interaction. Also, it was found that wear particles affect the AE signal. Therefore, the signal can be used to monitor the wear particle presence at the interface.

• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
• /
• 1999.11a
• /
• pp.310-317
• /
• 1999

Acoustic emission(AE) signal has been widely utilized to monitor the interaction at the head/disk interface. In this work the relationship between the AE signal and the state of contact between the slider and the disk is presented. Results of the FFT analyses of the AE signal could be used to better understand the interfacial interaction. Also, it was found that wear particles affect the AE signal. Therefore, the signal can be used to monitor the wear particle presence at the interface.

• Proceedings of the KSME Conference
• /
• 2004.04a
• /
• pp.694-699
• /
• 2004

The purpose of this study is to estimate the availability of acoustic emission method to the internal leak of the valves at nuclear power plants. The acoustic emission method was applied to the valves at the site, and the background noise was measured for the abnormal plant condition. From the comparison of the background noise data with the experimental results as to relation between leak flow and acoustic signal, the minimum leak flow rates that can be detected by acoustic signal was suggested. When the background levels are higher than the acoustic signal, the method described below was considered that the analysis the remainder among the background noise frequency spectrum and the acoustic signal spectrum become a very useful leak detection method. A few experimental examples of the spectrum analysis that varied the background noise characteristic were given.

• Journal of Korea Multimedia Society
• /
• v.9 no.12
• /
• pp.1572-1579
• /
• 2006

An usual acoustic emission(AE) event has two widely characterized parameters in time domain, peak amplitude and event duration. But noise in AE measuring may disturb the signals with its parameters and aggrandize the signal incertitude. Experiment activity of detection of the nick inside of porcelain with AE was made and study on AE signal processing with statistic be presented in this paper in order to pick-up information expected from the signal with noise. Effort is concentrated on developing a novel arithmetic to improve extraction of the characteristic from stochastic signal and to enhance the voracity of detection. The main purpose discussed in this paper is to treat with signals on amplitudes with statistic mutuality and power density spectrum in frequency domain, and farther more to select samples for neural networks training by means of least-squares algorithm between real measuring signal and deterministic signals under laboratory condition. By seeking optimization with the algorithm, the parameters representing characteristic of the porcelain object are selected, while the stochastic interfere be weakened, then study for detection on neural networks is developed based on processing above.

• Proceedings of the Korean Society For Composite Materials Conference
• /
• 2004.04a
• /
• pp.139-142
• /
• 2004

As fiber reinforced composite materials are widely used in aircraft, space structures and robot arms, the study on the non-destructive testing methods of the composite materials has become an important research area for improving their reliability and safety. In this paper, the AE signal analyzer with the resonance circuit to extract the specified frequency of the acoustic emission signal were designed and fabricated. The noise levels of the fabricated AE signal analyzer by the disturbance such as impact or mechanical vibration had a very small value comparable to those of the conventional AE signal analyzer. Also, the crack detection capabilities of the fabricated AE signal analyzer under the static and dynamic tensile test were evaluated and compared with the conventional AE signal analyzer.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
• /
• v.27 no.3
• /
• pp.291-298
• /
• 2016

In this paper, we studied about the radiated emission of EFT(Electrical Fast Transient)/Burst signal, referenced IEC-61000-4-4 of the international EMC standard and its effect on EUT(Equipment Under the Test) when EFT/Burst signal (Conducted noise) induced on a power cable to EUT. Firstly, we set up test sample by the standard and +4 kV standard signal is induced by EFT/Burst signal generator with 1 m length power cable for 1 minute. Consequently, we found not only induced EFT/Burst signal along power line, but also directly radiated emission signal from EFT/Burst signal generator (Radiated emission noise of EFT/Burst). The radiated emission signal of EFT/Burst was 30 dB which is higher than limit of CISPR 22 which is international EMC standard. Moreover, we measured the electric field strength by changing distance from maximum radiated emission point to electric field strength tester. As a result, this electric field strength was 23 V/m which is higher than international EMC standard test level(CISPR 24). Therefore, it was confirmed that the probability of malfunction may be high when radiated emission of EFT/Burst noise exists near the EUT.

• Journal of Power System Engineering
• /
• v.16 no.1
• /
• pp.72-77
• /
• 2012

Acoustic emission (AE) is known to be sensitive to fracture process and so it was expected that AE data may propose as a means of monitoring the fracture information. The aim of this study is to analyze the characteristic of AE signal emitted from glass during Vickers indentation. To observe AE characteristics by surface effect, both glass and coating glass were studied. During Vickers indentation loading, AE signal resulted from penny-like crack is detected. During Vickers indentation unloading, AE signal resulted from both radial/median crack and lateral crack is detected. In case of indentation on glass, the emission energy(${\epsilon}$) is found to be approximately proportional to the fourth power of the crack length. In case of indentation on coating glass, the emission energy(${\epsilon}$) is approximately proportional to the crack length.

• Journal of Welding and Joining
• /
• v.31 no.3
• /
• pp.60-65
• /
• 2013

Ar, $N_2$, and He are the conventional kind of shield gas that are used for laser welding. Many researches on the impact of laser welding shield gas have been done, and it is on going until now. However, there are few studies that analyze the changes and differences of the plasma emission signal. Therefore, in this study, we evaluated the change in the penetration characteristics according to the type of shield gas during fiber laser welding impacts to the plasma signal. As a result, if was checked that the difference in molecular weight of Ar, $N_2$, and He affects to the amount of spatter, and also found that the measured plasma radiation signal changes similar to the order of the molecular weight of the gases. Especially, clear change on the signal intensity per each shield gas was measured through RMS, and found that the shield gas was nothing to do with the FFT analyzed result.