• Proceedings of the Korean Society of Precision Engineering Conference
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• 2009.06a
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• pp.253-254
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• 2009

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2008.06a
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• pp.319-320
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• 2008

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2008.06a
• /
• pp.695-696
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• 2008

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2009.10a
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• pp.77-78
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• 2009

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2011.06a
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• pp.763-764
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• 2011

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2012.05a
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• pp.587-588
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• 2012

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2008.06a
• /
• pp.683-684
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• 2008

• Journal of the Korean Society for Precision Engineering
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• v.17 no.4
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• pp.129-134
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• 2000

This paper presents the development of ultra-precision machining process of large aspheric aluminum mirrors with a maximum diameter of 620 mm. An ultra-precision machine, "Nanoturn60", developed by Daewoo Heavy Industries Ltd. is used for machining and motion errors of the machine are compensated by using the FTS developed by IAE(Institue for Advanced Engineering) during the machining process. To check the form accuracy of machined aspheric surfaces, on-machine form measurement system is developed. This measurement system consists of air bearing touch probe, straight edge, and laser sensor. With in-process error compensation by FTS(Fast Tool Servo), aspheric mirrors with the from accuracy of submicron order are obtained. obtained.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2010.05a
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• pp.649-650
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• 2010

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1994.10a
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• pp.348-353
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• 1994

Magnetic Servo Levitation (MSL) has been proposed as a method to drive a fast-tool servo system. This paper discusses some fundamental control and modeling issues in the development of a long-range high-bandwidth fast-tool servo based on MSL. A resursive linear model is developed to describe the system's dynamics linear model is developed to describe the system's dynamics, and further used to discuss controller design. For a given controller architecture, the performance of two controllers is then compared, one based on an approximation to the inverse plant dynamics, the second based on a adaptive neural network.