• The Journal of Korean Academy of Prosthodontics
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• v.32 no.2
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• pp.212-224
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• 1994

The purpose of this study was to evaluate and compare film thickness of five kinds of resin luting cements [Comspan, Panavia Ex, Maryland bridge adhesive, All-bond C & B cementation kit, and Super-bond C & B]. Zinc-phosphate cement and glass-ionomer cement were used as the control group. In order to measure the film thickness the methods used were in broad compliance with ADA Specification No. 8, a tapered-die system that simulates clinical conditions more closely, and the connected tapered-die system that simulates bridge conditions. The inorganic filler size of resin cements was also examined with scanning electron micrographs. The results were obtained as follows ; 1. The film thickness of resin cements was increased in the order of Comspan, Panavia Ex, Super-bond C & B, Maryland bridge adhesive, and All-bond C & B cementation kit. Maryland bridge adhesive and All-bond C & B cementation kit showed significantly higher film thickness than the control group(p<0.01). 2. For all resin cements, there was a significant difference of film thickness between the ADA method and the tapered-die system. Generally, the tapered-die system demonstrated lower film thickness than the ADA method(p<0.01). 3. There was no significant difference in film thickness between the tapered-die system and the tapered-die bridge system in all resin cements(p<0.01). 4. The scanning electron microscope showed that the cement with larger filler had a tendency to be higher in film thickness.

• Journal of the Korean Vacuum Society
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• v.17 no.3
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• pp.240-246
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• 2008

The x-ray transmission anode Ag-target tube was developed to apply for the thickness measurement of film in the thickness range of several tens$\sim$several hundreds ${\mu}m$ and its characteristics were evaluated. The energy distribution and dose of x-ray from Ag-target tube was investigated at the tube voltage near 10 kV, and discussed in comparition with that from W-target tube. The energy distribution and dose of x-rays passing through film were measured with various thickness of Ny and PP film. From these results, it was confirmed that our x-ray tube can be applied for the thickness measurement of film.

• Current Optics and Photonics
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• v.1 no.5
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• pp.505-513
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• 2017

Measuring the thickness of thin films is strongly required in the display industry. In recent years, as the size of a pattern has become smaller, the substrate has become larger. Consequently, measuring the thickness of the thin film over a wide area with low spatial sampling size has become a key technique of manufacturing-yield management. Interferometry is a well-known metrology technique that offers low spatial sampling size and the ability to measure a wide area; however, there are some limitations in measuring the thickness of the thin film. This paper proposes a method to calculate the thickness of the thin film in the following two steps: first, pre-estimation of the thickness with the phase at the peak position of the interferogram at the bottom surface of the thin film, using white-light phase-shift interferometry; second, accurate correction of the measurement by fitting the interferogram with the theoretical pattern through the estimated thickness. Feasibility and accuracy of the method has been verified by comparing measured values of photoresist pattern samples, manufactured with the halftone display process, to those measured by AFM. As a result, an area of $880{\times}640$ pixels could be measured in 3 seconds, with a measurement error of less than 12%.

• Tribology and Lubricants
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• v.38 no.5
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• pp.199-204
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• 2022

This paper presents a numerical investigation of the influence of water molecule thickness on frictional behavior at the nanoscale using molecular dynamics simulation. Three different models, comprising water thin films of various thicknesses, were built, and indentation and sliding simulations were performed using the models. Various normal loads were applied by indenting the Si tip on the water film for the sliding simulation to evaluate the interplay between the water thin film thickness and the normal load. The results of the simulations showed that the friction force generally increased with respect to the normal load and thickness of the water thin film. The friction coefficient varied with respect to the normal load and the water film thickness. The friction coefficient was the smallest under a moderate normal force and increased with decreasing or increasing normal loads. As the water film became thicker, the contact area between the tip and water film became larger. Under well-lubricated conditions, the friction force was proportional to the contact area regardless of the water film thickness. As the normal force increased above a critical condition, the water molecules beneath the Si tip spread out; thus, the film could not provide lubrication. Consequently, the substrate was permanently deformed by direct contact with the Si tip, while the friction force and friction coefficient significantly increased. The results suggest that a thin water film can effectively reduce friction under relatively low normal load and contact pressure conditions. In addition, the contact area between the contacting surfaces dominates the friction force.

• Tribology and Lubricants
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• v.25 no.6
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• pp.367-373
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• 2009

Many research of elastohydrodynamic lubrication (EHL) has been performed under the condition of steady state loading. However, mechanical elements undergo severe high loads that are in the fluctuating modes of frequency and amplitude. Conventional numerical method for the circular contact of EHL study has the difficulty in making the film thickness and pressure of EHL converged in high loads of steady state as well as fluctuating loading conditions. In this work, multigrid multilevel method are used for the stable convergence of film pressure and thickness under the conditions of high as well as varying loads, and very stable solutions of film behaviors with elastic deformation are obtained. Several results of dynamic loading condition are shown and compared with those of steady state condition in the aspects of circular EHL film thickness and pressure.

• Journal of Mechanical Science and Technology
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• v.15 no.7
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• pp.859-865
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• 2001

This paper reports on the theoretical analysis of mixed lubrication for the piston ring. The analytical model is presented by using the average flow and asperity contact model. The cyclic variations of the nominal minimum oil film thickness are obtained by numerical iterative method. The total friction is calculated by using the hydrodynamic and asperity contact theory. The effect of the roughness height, pattern, and engine speed on the nominal minimum film thickness, friction force, ad frictional power losses are investigated. As the roughness height increases, the nominal oil film thickness and total friction force increase. Also, the effect of the surface roughness on the boundary friction is dominant at low engine speed and high asperity height. The longitudinal roughness pattern shows lower mean oil film pressure and thinner oil film thickness compared to the case of the isotropic and transverse roughness patterns.

• Journal of the Semiconductor & Display Technology
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• v.19 no.1
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• pp.17-22
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• 2020

Recently, the decrease in thin film thickness has been actively studied by changing several physical elements such as the increase in revolution velocity of lower substrate equipped with AC or DC motor. In this paper, we propose a novel spin coater control system that changes AC or DC motor and common use software with limitation of velocity and position control into step motor and LABVIEW software based on GUI to control revolution velocity and position more precisely. By determining six input values of rotation velocity 1, 5, 10, 25, 50, 100 PPS, we fabricated six samples using coating target, TA(tantalum) on silicon substrate and measured their thin film thickness by SEM. Hence, this research can be applied to inferring thin film thickness of tantalum regarding any value of revolution velocity without additional experiments and for linear reference model via property analysis of thin film thickness using other thin-film materials.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.320-320
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• 2013

Film thickness monitoring with plasma impedance monitoring (PIM) is demonstrated for small area $SiO_2$ RF plasma etching processes in this work. The chamber conditions were monitored by the impedance signal variation from the I-V monitoring system. Moreover, modified principal component analysis (mPCA) was applied to estimate the $SiO_2$ film thickness. For verification, the PIM was compared with optical emission spectroscopy (OES) signals which are widely used in the semiconductor industry. The results indicated that film thickness can be estimated by 1st principal component (PC) and 2nd PC. Film thickness monitoring of small area $SiO_2$ etching was successfully demonstrated with RF plasma harmonic impedance monitoring and mPCA. We believe that this technique can be potentially applied to plasma etching processes as a sensitive process monitoring tool.

• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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• 1999.06a
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• pp.147-155
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• 1999

The film thickness and shape of elastohydrodynamic lubrication is measured by optical interferometer, which is the most precise method for EHL film measurement. However the interpretation of the image pattern from optical viscometer is not easy for two-dimensional shape. A newly developed method of image processing makes it possible to evaluate the film thickness and shape in every point of contact region with two dimensional aspects. In this study, we captured film shape of EHL film from the monochromatic incident light with the Image processing method, which uses phase shift method, and obtained the image analysis method for gray level image in order to qualitatively evaluate film shapes.

• Journal of Energy Engineering
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• v.7 no.2
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• pp.180-186
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• 1998

In this study, the effect of shear rate on the viscosity variation is examined to understand the flow characteristics of the mixture of bentonite and water. The variation of film thickness according to mixing ratio and viscosity is measured to characterize the film formation. And, the separation of dried film is studied according to film thickness. Specific surface area affecting on adsorption capability is measured using BET method. The viscosity decreases and the film thickness increases as the mixing ratio increases. The separation characteristic of dried film is suitable within a range of 40 to 150 ${\mu}{\textrm}{m}$ in film thickness and 5 to 10% in mixing ratio.