• Title/Summary/Keyword: Force spectroscopy

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Phase Imaging of Worn Surface of TiN Coating and Interpretation by Force Spectroscopy

  • Hyo Sok;Chizhik, S-A;I Luzinov
    • KSTLE International Journal
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    • v.1 no.2
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    • pp.69-75
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    • 2000
  • The paper compares topography, phase contrast and force spectroscopy in atomic force microscopy data for evaluating the microheterogeneity of surface layer. The worn surface of ion-plated TiN coating was measured using both a laboratory-built and a commercial AFM. The results of analysis revealed structural and micromechanical heterogeneity of the worn surfaces. We demonstrated that the phase image allows relatively qualitative estimation of elastic modulus of the sample surface. The tribolayer formed in the worn surface possessed much lower stiffness than the original coating. It is shown that the most stable phase imaging is provided with a stiff cantilever. In this case, phase contrast is well conditioned, first of all, by microheterogeneity of elastic properties of the investigated surfaces. In this study an attempt was also made to correlate the results of phase imaging with that of the farce spectroscopy. The joint analysis of information on the surface properties obtained by the phase imaging and quantitative data measured with the force spectroscopy methods allows a better understanding of the nature of the surface micromechanical heterogeneity.

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Tribological properties of ultra-thin diamond-like carbon coating at various humidity

  • Cuong, Pham Duc;Ahn, Hyo-Sok;Kim, Choong-Hyun;Kim, Doo-In
    • Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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    • 2002.10b
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    • pp.161-162
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    • 2002
  • This study concerns the tribological behaviors of ultra-thin DLC coating with 3 nm thickness deposited in a mixed gas of argon + 20 % hydrogen as a function of humidity. Reciprocating wear tests employing a micro wear tester were performed under various normal loads and relative humidity in air environment. The chemical composition of the original and worn surfaces were studied by Auger electron spectroscopy (AES). It showed that the ultra-thin DLC coating exhibited low friction with enough wear stability at low normal load (0.18 N) and its tribological behavior was strongly dependent on the humidity. The sample surfaces before and after the test were examined using atomic force microscopy (AFM). Capillary force and meniscus areas were discussed in order to explain the influence of humidity on the friction force.

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The Measurement Errors of Elastic Modulus and Hardness due to the Different Indentation Speed (압입속도의 변화에 따른 탄성계수와 경도의 오차 연구)

  • Lee, Kyu-Young;Lee, Chan-Bin;Kim, Soo-In;Lee, Chang-Woo
    • Journal of the Korean Vacuum Society
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    • v.19 no.5
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    • pp.360-364
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    • 2010
  • Most research groups used two analysis methods (spectroscopy and nanotribology) to measure the mechanical properties of nano-materials: NMR (Nuclear Magnetic Resonance), IR (Infrared Spectroscopy), Raman Spectroscopy as the spectroscopy method and AFM (Atomic Force MicroScope), EFM (Electrostatic Force Microscope), KFM (Kelvin Force Microscope), Nanoindenter as the nanotribological one. Among these, the nano-indentation technique particularly has been recognized as a powerful method to measure the elastic modulus and the hardness. However, this technique are prone to considerable measurement errors with pressure conditions during measurement. In this paper, we measured the change of elastic modulus and hardness of an Al single crystal with the change of load, hold, and unload time, respectively. We found that elastic modulus and hardness significantly depend on load, hold, and unload time, etc. As the indent time was shortened, the elastic modulus value decreased while the hardness value increased. In addition, we found that elastic modulus value was more sensitive to indent load, hold, and unload time than the hardness value. We speculate that measurement errors of the elastic modulus and the hardness originate from the residual stress during indenting test. From our results, the elastic modulus was more susceptible to the residual stress than the hardness. Thus, we find that the residual stress should be controlled for the minimum measurement errors during the indenting test.

Study of Inhibition Characteristics of Slurry Additives in Copper CMP using Force Spectroscopy

  • Lee, Hyo-Sang;Philipossian Ara;Babu Suryadevara V.;Patri Udaya B.;Hong, Young-Ki;Economikos Laertis;Goldstein Michael
    • Transactions on Electrical and Electronic Materials
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    • v.8 no.1
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    • pp.5-10
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    • 2007
  • Using a reference slurry, ammonium dodecyl sulfate (ADS), an anionic and environmentally friendly surfactant, was investigated as an alternative to BTA for its inhibition and lubrication characteristics. Results demonstrated that the inhibition efficiency of ADS was superior to that of BTA. Coefficient of friction (COF) was the lowest when the slurry contained ADS. This suggested that adsorbed ADS on the surface provided lubricating action thereby reducing the wear between the contacting surfaces. Temperature results were consistent with the COF and removal rate data. ADS showed the lowest temperature rise again confirming the softening effect of the adsorbed surfactant layer and less energy dissipation due to friction. Spectral analysis of shear force showed that increasing the pad-wafer sliding velocity at constant wafer pressure shifted the high frequency spectral peaks to lower frequencies while increasing the variance of the frictional force. Addition of ADS reduced the fluctuating component of the shear force and the extent of the pre-existing stick-slip phenomena caused by the kinematics of the process and collision event between pad asperities with the wafer. By contrast, in the case of BTA, there were no such observed benefits but instead undesirable effects were seen at some polishing conditions. This work underscored the importance of real-time force spectroscopy in elucidating the adsorption, lubrication and inhibition of additives in slurries in CMP.

Anion Photoelectron Spectroscopy and Theoretical Calculation of the Hetero-dimers of Polycyclic Aromatic Hydrocarbons

  • Kim, Namdoo;Lee, Sang Hak
    • Bulletin of the Korean Chemical Society
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    • v.34 no.5
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    • pp.1441-1444
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    • 2013
  • Hetero-dimer anions of naphthalene (Np), anthracene (An), phenanthrene (Ph) and pyrene (Py) were investigated using the time-of-flight mass spectrometer (TOF-MS), anion photoelectron spectroscopy (PES) and theoretical calculation. There are two possible geometries with their electron affinity (EA) difference: parallel displaced (PD) and T-shaped. Dispersion force plays a key role in PD structure with the formation of a new anionic core while ${\pi}$-hydrogen interaction plays a key role in T-shaped structure with the monomer anionic core. The optimized structures and charge distributions can simply be explained by the relative difference of EA.

Wear Characteristics of Diamond-Like Carbon Thin Film for Durability Enhancement of Ultra-precision Systems (초정밀 시스템의 내구성 향상을 위한 다이아몬드상 탄소 박막의 마멸특성에 관한 연구)

  • 박관우;나종주;김대은
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2004.10a
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    • pp.467-470
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    • 2004
  • Diamond-Like Carbon (DLC) thin film is a semiconductor with high mechanical hardness, low friction coefficient, high chemical inertness, and optical transparency. DLC thin films have widespread applications as protective coatings and solid lubricant coatings in areas such as Hard Disk Drive (HDD) and Micro-Electro-Mechanical-Systems (MEMS). In this work, the wear characteristics of DLC thin films deposited on silicon substrates using a DC-magnetron sputtering system were analyzed. The wear tracks were measured with an Atomic Force Microscope (AFM). To identify the sp2 and sp3 hybridization of carbon bonds and other bonds Raman spectroscopy was used. The structural information of DLC thin films was obtained with Fourier transform infrared spectroscopy and wear tests were conducted by using a micro-pin-on-reciprocator tester. Results showed that the wear characteristics were dependent on the sputtering conditions. The wear rate could be correlated with the bonding state of the DLC thin film.

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Study of the hydrogen concentration of SiNx film by Fourier transform infrared spectroscopy (Fourier transform infrared spectroscopy를 이용한 SiNx박막의 수소농도 연구)

  • Lee, Seok-Ryoul;Choi, Jae-Ha;Jhe, Ji-Hong;Lee, Lim-Soo;Ahn, Byung-Chul
    • Journal of the Korean Vacuum Society
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    • v.17 no.3
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    • pp.215-219
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    • 2008
  • The bonding structure and composition of silicon nitride (SiNx) films were investigated by using Fourier transform infrared spectroscopy (FT-IR). SiNx films were deposited on Si substrate at $340^{\circ}C$ using a conventional PECVD system. The compositions of Si and N in SiNx films were confirmed by using Rutherford backscattering spectroscopy (RBS) and photoluminescence (PL) analysis. The surface morphology of SiNx films was also analyzed by using atomic force microscopy (AFM). It was found that the contents of NH(at. %) is the reverse related with those of SiH corresponding to the result of FT-IR. we conclude that a quantitative analysis on SiNx films can be possible through a precise detection of the contents of H in SiNx films with a FT-IR analysis only.

LIBS Analysis on Magnetic Force of Dissimilar Material Using SMAW (이종재료의 피복아크 용접에서 자기력에 따른 LIBS 해석)

  • Lee, Chul Ku;Lee, Wooram
    • Journal of Welding and Joining
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    • v.31 no.4
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    • pp.54-61
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    • 2013
  • This paper reports mild steel(SPHC) and stainless steel(STS304) sheets commonly used for railroad cars or commercial vehicles such as in the automobile and shipbuilding industries. The sheets are used in these applications, which are mainly fabricated using the shielded metal arc welding(SMAW) of dissimilar materials. It also reports an interesting application of Laser Induced Breakdown Spectroscopy(LIBS) in order to determine the elemental composition diffusion of SPHC and STS304. Arc blow produced by magnetic force during the electric arc welding prevents the formation from a sound weldment. In particular, the mechanical properties of the joint are influenced by not only by geometrical and mechanical factors but also the welding conditions for the arc welded joint. Therefore, the mechanical properties and performance are evaluated by performing a physicochemical component analysis. And they increase in accordance with content of elements and microstructure in mild steel. As results, appropriate range for magnetic fields could be achieved. Therefore, the effect of magnetic force in a butt weld of mild steel plates was investigated by comparing to the measured data.

Molecular Bonding Force and Stiffness in Amine-Linked Single-Molecule Junctions Formed with Silver Electrodes

  • Kim, Taekyeong
    • Journal of the Korean Chemical Society
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    • v.59 no.2
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    • pp.132-135
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    • 2015
  • Bonding force and stiffness in amine-linked single-molecule junctions for Ag electrodes were measured using a home-built conducting atomic force microscope under ambient conditions at room temperature. For comparison, Au electrodes were used to measure the rupture force and stiffness of the molecular junctions. The traces of the force along with the conductance showed a characteristic saw-tooth pattern owing to the breaking of the metal atomic contacts or the metal-molecule- metal junctions. We found the rupture force and stiffness for Ag are smaller than those for Au electrodes. Furthermore, we observed that the force required to break the amine-Ag bond in the conjugated molecule, 1,4-benzenediamine, is smaller than in 1,4-butanediamine which is fully saturated. These results consist with the previous theoretical calculations for the binding energies of the nitrogen bonded to Ag or Au atoms.