• Journal of the Korean Vacuum Society
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• v.13 no.2
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• pp.47-53
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• 2004

A getter pump test system is being developed as a core item of the national project for establishing the foundation of the vacuum technology in our country. A preliminary test system was prepared for developing the getter test procedure, and providing design requirements and system specifications before setting up the getter pump test system. The pumping speed and the pumping capacity of getter elements of low activation temperature used in the seal-off vacuum devices, for the hydrogen, carbon monoxide and nitrogen gases, were measured using the preliminary test system. The pumping characteristics of a domestic getter, developed mainly for the gas purifier, were compared with those of a foreign getter used widely in the lamp factories.

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2005.05a
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• pp.121-124
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• 2005

Getter는 진공을 이루고 유지하는데 사용되는 물질로, 잔존가스 및 불순가스를 흡수 & 제거하는 물질을 말한다. FPD나 PDP같은 평판 디스플레이는 내부에 진공을 요구하며 작동중에 발생하는 불순가스에 의해 진공도가 떨어져, plasma 방전시 방전개시전압이 상승하는 결과를 초래하기에 이에 적절한 getter의 필요성이 대두되고 있다. 본 연구의 최종 목적은 PDP 제조시 발생하는 잔존가스 및 운전중 발생하는 불순가스의 제거를 효율적으로 하여 PDP의 수명이 연장되는 고성능 getter 재료를 제조 하고자 하는 것이며, 이에 thermal plasma를 이용하여 nano size로 getter를 제조하였다. 전체적으로 $10\~30$ [nm] 크기의 Setter가 제조되었지만 응집이 많이 일어나 군집된 형상이 발생하였으며, 이는 입자가 완전히 성장하기까지 충분한 열을 받지 못하여 응집이 먼저 발생한 것으로 생각된다.

• Korean Journal of Materials Research
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• v.15 no.6
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• pp.388-392
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• 2005

The $Zr_{57}V_{36}M_7$ getter alloy was prepared by Fe substituting Ga or Y for Fe on $Zr_{57}V_{36}M_7$ getter alloy(St707), and the activation temperatures and the hydrogen a sorption speeds of these alloys were investigated. The activation temperatures of these alloys were estimated from the ultimate pressure-temperature curve and lowered about $100\~200\;K$ compared to $Zr_{57}V_{36}M_7$, fetter alloy(St707). However, final pressures at fully activated temperature were increased with substitution of Fe by Ga and Y on $Zr_{57}V_{36}M_7$ getter alloy. The hydrogen sorption speeds of these alloys measured by an orifice method were decreased about $0.460\~0.586liter/sec$ g compared to $Zr_{57}V_{36}M_7$ getter alloy.

• 한국정보디스플레이학회:학술대회논문집
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• 2002.08a
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• pp.1051-1052
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• 2002

Vacuum surroundings in Cathode Ray Tubes (CRT) are very important factor for CRT lifetime, especially cathode & getter's. A getter is a very good vacuum pump; unfortunately, it cannot absorb an inert gas and hydrocarbons. There are only argon and helium in CRT after $1^{st}$ emission test because other active gases are absorbed by getter and methane is decomposed during CRT working. It is also very important to know exactly where and when methane is decomposed during the CRT manufacturing process, because methane is known to be harmful to cathode when its amount is high, and getter can't absorb the methane.

• Journal of the Korean Vacuum Society
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• v.14 no.4
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• pp.171-179
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• 2005

The influence of the surface roughness and the porosity on the apparent sticking coefficient of the getter was determined quantitatively by Monte Carlo simulation. The sorption characteristics of the getter was investigated by solving numerically the particle balance equation depending on the sticking probability and diffusivity.

• Proceedings of the Materials Research Society of Korea Conference
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• 1999.05a
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• pp.48-48
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• 1999

• Korean Journal of Materials Research
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• v.15 no.5
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• pp.306-312
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• 2005

The hydrogen sorption properties of $Ti_{0.3}Zr_{0.2}V_{0.5}$ NEC(non-evaporable getter) alloy and its hydrides were evaluated at room temperature. The alloy and hydride powders were prepared by the Hydride-DeHydride(HDH) method. The hydrogen sorption speed of $Ti_{0.3}Zr_{0.2}V_{0.5}$ alloy was measured to increase with the amounts of hydride phase in the getter. The hydrogen sorption speeds of $Ti_{0.3}Zr_{0.2}V_{0.5},\;(Ti_{0.3}Zr_{0.2}V_{0.5})H_{1.52},\;and\;(Ti_{0.3}Zr_{0.2}V_{0.5})H_{1.94}$ were 2.22, 3.14 and 5.08 liter/sec, respectively. The unexpected enhancement of hydrogen sorption speed with the presence of the hydride phase is considered to be due to the pre-saturation of hydrogen trap sites which can retard the diffusion of hydrogen in the alloy.

• Transactions of the Korean hydrogen and new energy society
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• v.15 no.3
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• pp.220-227
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• 2004

The purpose of this paper is, based on the theoretical background of the principle of gas purification and absorption, and the absorbing ability of metals, to syudy the efficiency of gas purification of inorganic gases using Zr alloys, so as to contribute to the IT industry. To produce and distribute gas with high purity and ultra-high purity, different types of gas purifier are currently being used: distillation type, getter type, catalyst type, absorption at low-temperature type, and membrane separation equipment. From the different purification methods mentioned above, the getter type gas purifier is capable of not only high performance and capacity but also P.O.U(Point Of Use) method. The key of the getter type gas purifier is its efficiency of gas purification, which is the subject chosen for this study.

• Journal of Powder Materials
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• v.14 no.1 s.60
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• pp.63-69
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• 2007

The present study was focused on the synthesis of a zirconium-based alloyed nanopowder by the plasma arc discharge process. The chemical composition, phase structure, particle size and hydrogen sorption property of the synthesized powders under various synthesis conditions were analyzed using XRF, XRD, SEM, XPS and the ASTM-F798 method. The chemical composition of the synthesized Zr-V-Fe-based powders approached that of the raw material with an increasing hydrogen fraction in the powder synthesis atmosphere. The synthesized $Zr_{55}V_{29}Fe_{16}$ powder consist of a mixed phase structure of the $Zr,\;ZrH_2,\;FeV\;and\;Zr(V_{1-x}Fe_{x})_2$ phases. This powder has an average particle size of about 20 nm. The synthesized $Zr_{55}V_{29}Fe_{16}$ nanopowder showed getter characteristics, even though it had a lower hydrogen sorption speed than the $Zr_{57}\;V{36}\;Fe_7$ getter powder. However, the synthesized Zr nanopowder with an average particle size of 20 nm showed higher hydrogen sorption speed than the $Zr_{57}\;V{36}\;Fe_7$ getter powder.

• Journal of Powder Materials
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• v.14 no.1 s.60
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• pp.56-62
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• 2007

Getter property of nano-sized metallic powders was evaluated as a possible candidate for the future getter material. For the purpose, Ti powders of about 50 nm were prepared by electrical wire explosion. Commercial Ti powders of about 22 micrometer were tested as well for comparison. The room-temperature hydrogen-sorption speed of nano-sized Ti powders was $1.34\;L/sec{\cdot}cm^{2}$ which was more than 4 times higher than that of micron-sized ones. The value is comparable to or even higher than those of commercial products. Its sorption speed increases with activation temperature up to $500^{\circ}C$ above which it deteriorates due to low-temperature sintering effect of nano-sized particles.