• 제목/요약/키워드: Groove size

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CMP 패드의 Groove 특성 (The Characteristics of CMP Polishing Pad)

  • 김철복;박성우;김상용;이우선;장의구;서용진
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2004년도 추계학술대회 논문집 Vol.17
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    • pp.715-718
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    • 2004
  • In this paper, we studied the characteristics of new polishing pad, which can apply W-CMP process for global planarization of multi-level interconnection structure. The hardness and density were measured as a function of groove pattern. Also, we compared the pore size through the SEM photograph. Finally, we investigated the CMP characteristics with five different kind of groove pattern sample. Through the above results, we can select optimum groove pattern, so we can expect to begin home product of polishing pad.

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T-joint 용접부의 형상에 따른 역학적 메카니즘에 관한 연구 (A Study on the Mechanical Mechanism According to the Groove Shape of T-welded Joint)

  • 방한서;김종명
    • Journal of Welding and Joining
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    • 제17권6호
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    • pp.53-61
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    • 1999
  • The use of thick plate in increasing in recent years due to the rapid expansion of chemical plants, nuclear plants, ships and other industrial plants. Welding is the most popular joining techniques employed in manufacturing industrial machineries and structures. Normally, Groove shapes are prepared according to appropriate rules and regulations such as KS, JIS, AWS, LR, DNV and etc. for various thicknesses of plate. However those groove angles tend to be too large. As a result of large groove angle, residual stress, deformation of material and strength reduction is obtained. Therefore, the reliability and safety of structures and machinery tend to be decreasing. Therefore, in this paper, theoretical as well as experimental study are carried out to find optimum groove shapes for T-welded joint of mild steel. The test specimen are made in same condition with simulation model. Welding residual stresses measurement by sectional cutting method. ⅰ) The mechanical difference for change the thickness of plate and groove angle are not appeared. ⅱ) In a mechanical point of view minimum preparation angle(40°) is more suitable than maximum groove angle(60℃). ⅲ) The measurement value and distribution of welding residual stresses are not effected largely by groove angle. It is mechanical restraint that mainly affect welding residual stresses distribution. In mechanical point of view minimum groove angle is more suitable than maximum groove angle. Therefore, it is appropriate to minimize the size of groove shape in strength and safety.

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Assessment of the Location of the Peroneus Longus Tendon in the Cuboid Groove Using 3D Isotropic Fast Spin-Echo MRI

  • Lee, Ji Yoon;Choo, Hye Jung;Lee, Sun Joo;Jung, Joon-Yong;Kim, Dong Wook;Baek, Jin Wook;Heo, Young Jin;Gwak, Heui-Chul
    • Investigative Magnetic Resonance Imaging
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    • 제24권1호
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    • pp.21-29
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    • 2020
  • Purpose: To investigate normal location of the peroneus longus tendon (PL) in the cuboid groove by evaluating it between ankles with no significant abnormality (asymptomatic group) and those with retromalleolar PL dislocation (dislocation group) using three-dimensional isotropic fast spin-echo (3D-FSE) magnetic resonance imaging (MRI) of the ankle. Materials and Methods: Thirty-six and 32 3D-FSE ankle MRI were assigned to the asymptomatic group and the dislocation group, respectively. Using multiplanar reformatted 3D-FSE, qualitative PL location (i.e., outside, overlying, and inside in relation to the cuboid groove), quantitative PL location (i.e., distance between the proximal margins of PL and cuboid groove), and cuboid groove size were measured in lateral, middle, and medial levels of the cuboid groove. Results: In the asymptomatic group, 64%, 42%, and 11%, respectively, had the outside or overlying-located PL in lateral, middle, and medial levels of the cuboid groove and the quantitative location gradually decreased from lateral to medial level. Qualitative and quantitative PL locations were not significantly different between the asymptomatic group and dislocation group. Cuboid groove size showed significant negative correlation with quantitative PL location in both groups. Conclusion: Outside- or overlying-located PL in lateral and middle levels of the cuboid groove would be a normal finding, regardless of PL status at the retromalleolar level.

동하중을 받는 박용엔진 크로스헤드 베어링의 윤활해석 (Lubrication Analysis of Dynamically-Loaded Crosshead Bearing for Marine Engine)

  • 김정훈;김창희;이성우;이득우
    • Tribology and Lubricants
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    • 제13권2호
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    • pp.46-51
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    • 1997
  • Crosshead bearings in two-stroke marine diesel engines are operated under severe conditions of lubrication because the load on the bearing is unidirectional and the sliding speed is very low and oscillatory. In this paper, the motion of journal in a bearing is investigated using the lubrication theory. Several locus paths are presented to show the effects of oil groove size, bearing clearance and oil inlet pressure. It is found that the minimum film thickness is affected by the oil groove and bearing clearance, and the oil groove is an important design factor.

필렛 용접 시 그루브 각도와 미세기공에 따른 피로강도의 영향 (Effect of Fatigue Strength in Fillet Weldments with Different Groove Angle and Porosity)

  • 구본철
    • 한국기계가공학회지
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    • 제6권2호
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    • pp.9-16
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    • 2007
  • The fatigue test of the fillet weldments were executed with different groove angles and porosity. The groove angles of $90^{\circ}$, $45^{\circ}$ and $55^{\circ}$ were compared with fatigue lives. After the fillet weldment failure, the porosity which found at the fractured surface were observed to account the effect on fatigue life. Finite element analysis were performed to correlate the fatigue strength and the size & the location of porosity. The stress-strain field were severely affected by the length of notch and the size & location of porosity. Based on the quantitative analysis of porosity effect, the total volume of porosity was key factor for fatigue strength of the fillet weldment.

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저방사화 철강재 (JLF-1)의 시험편 크기 변화에 따른 파괴저항곡선의 변화 (Variation of the fracture resistance curve with the change of a size in the specimen of reduced activation ferritic steel (JLF-1))

  • 김동현;윤한기;이상필
    • 대한기계학회:학술대회논문집
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    • 대한기계학회 2003년도 추계학술대회
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    • pp.1240-1245
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    • 2003
  • Reduced activation ferritic steel (JLF-1) is considered as a promising candidate material for blanket or first-wall structure of D-T fusion reactors. The fracture tests of fracture resistance curve (J-R curve) and $J_{IC}$ are desirable to investigate the exact fracture toughness of JLF-1 steel, since it has a high ductility. The fracture toughness of JLF-1 steel is affected by the configuration of test specimen such side groove, specimen thickness or specimen size. In this study, the fracture toughness tests were performed with various size(plane size and thickness) and various side groove of specimens. The test results showed the standard specimen with the side groove of 40 % represented a valid fracture toughness. The fracture resistance curve increased with increasing plane size and decreased with increasing thickness. However, the fracture resistance curve of half size specimen was similar to that of the standard specimen.

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광전소자 패키징에서 광섬유 정렬을 위한 Si V-groove 형성 (The formation of Si V-groove for optical fiber alignment in optoelectronic devices)

  • 유영석;김영호
    • 마이크로전자및패키징학회지
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    • 제6권3호
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    • pp.65-71
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    • 1999
  • 광 패키징에서 광섬유와 광전자소자를 정확히 정렬하기 위한 V-groove의 치수 정밀도에 미치는 마스크 재료와 에칭용액의 영향을 연구하였다. PECVD nitride, LPCVD nitride, thermal oxide($SiO_2$)를 마스크재료로 사용하였고 실리콘을 이방성에칭하는 용액으로 KOH(40wt%)용액과 KOH(40wt%)용액에 IPA를 첨가한 용액을 이용하였다. 마스크재료로는 LPCVD nitride가 가장 좋은 선택적에칭특성을 나타내었으며 사용된 마스크재료 중 thermal oxide가 가장 빠른 속도로 에칭되었다. V-groove의 크기 증가는 마스크충 아래로의 undercutting에 의해 생겼는데 이는 주로 (111)면으로의 에칭 때문이었다. KOH(40wt%)용액에서 (111)면의 에칭속도는 0.034 - 0.037 $\mu\textrm{m}$/min로 마스크재료에 관계없이 거의 일정하였다. IPA를 KOH(40wt%)용액에 첨가하면 (100)면과 (111)면의 에칭속도는 모두 감소하지만 (111)면에 대한 (100)면의 에칭속도비는 증가하였다. 그러므로 이런 용액에서 (111)면으로의 에칭에 의한 undercutting현상은 줄어들었으며 V-groove의 크기를 더 정확하게 조절할 수 있었다.

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변형 DEEP X-ray를 이용한 마이크로 렌즈 및 V-groove 제작 (Microlens Micro V-groove Fabrication by the Modified LIGA Process)

  • 이정아;이승섭;전병희
    • 소성∙가공
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    • 제13권3호
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    • pp.290-295
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    • 2004
  • Mircolens and microlens V-groove are realized using a novel fabrication technology based on the exposure of a resist, usually PMMA, to deep X-rays and subsequent thermal treatment and inclined deep X-ray lithography, respectively. The fabrication technology is very simple and produces microlenses and microlens V-groove with good surface roughness of several nm. The molecular weight and glass transition temperature of PMMA is reduced when it is irradiated with deep X-rays. The microlenses were produced through the effects of volume change, surface tension, and reflow during thermal treatment of irradiated PMMA. Microlenses were produced with diameters ranging from 30 to $1500\mu\textrm{m}$. The surface X-ray mask is also fabricated to realize microlens arrays on PMMA sheet with a large area. The size of the micro V-groove is fabricated in the range of 12~$60\mu\textrm{m}$.

맥동유동에 의한 그루브 채널내 유동혼합 촉진에 관한 PIV 이용 연구 (PIV Investigations of the Flow Mixing Enhancement by Pulsatile Flow in a Grooved Channel)

  • 김동욱;김서영;이대영;이윤표
    • 설비공학논문집
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    • 제16권4호
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    • pp.324-331
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    • 2004
  • Particle Image Velocimetry (PIV) measurements have been carried out to investigate the pulsatile flow characteristics in a triangular grooved channel. The results showed that a vortex was generated at the tip of the groove and flowed into the groove rotating inside during the acceleration phase of the main stream promoting the mixing of the fluid. Then, at the deceleration phase of the main stream, the vortex entrained fluid from the relatively slow moving main stream to grow bigger than the groove size. Finally the vortex was ejected to the main stream carrying the fluid away from the groove, resulting in the enhancement of mixing between the stagnant fluid in the groove and the main stream in the channel. It was found that the fluid mixing enhancement is maximized when the pulsatile period is the same as the time duration which the vortex takes to grow larger enough to fill the groove and to be ejected to the main stream.