• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.10a
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• pp.922-925
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• 2005

This article describes a FM modulation algorithm to increase the measurement speed by increasing the beat frequency of the laser without acousto-optic modulator(AOM) in the heterodyne laser interferometer. The proposed algorithm can increase the beat frequency of the heterodyne laser which limit the measurement speed by adjusting a carrier frequency through electronic circuit, while AOM is used to shift the frequency of the heterodyne laser in conventional method. Electronic circuit is constructed to modulate the signals from a laser interferometer and a waveform generator. The brier analysis, the measurement scheme of the system, and the experimental results using a Zeeman-stabilized He-Ne laser are presented. They demonstrate that the proposed algorithm is proven to enhance the measurement speed limit by increasing the beat frequency of the heterodyne laser.

• Proceedings of the IEEK Conference
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• 2009.05a
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• pp.310-312
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• 2009

The heterodyne laser interferometer has been widely used in precise measurement field. However, the accuracy is limited by the nonlinearity error caused from incomplete laser sources and nonideal optical components. In this paper, we propose the Dual-EKF which estimates states and weights simultaneously to improve the resolution of heterodyne laser interferometer. As a proof, we demonstrate the effectiveness of our proposed method through experimental results.

• Proceedings of the KIEE Conference
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• 2002.11a
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• pp.239-241
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• 2002

Basically, OCT used the interference effect of Michelson interferometer. First, we have analyzed the optical heterodyne interferometer for OCT. Second, we implement new optical heterodyne interferometer for OCT.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2007.05a
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• pp.373-378
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• 2007

On the homodyne interferometers, high pass filter(HPF) is usually used to remove the electrical noise in the interferent signal. Heterodyne interferometer has modulating frequency is shifted in the frequency region where the electrical noise effect is minimized by HPF effect. However, on the homodyne interferometer, the interferent DC-component of homodyne interferometer is unfortunately eliminated by using a HPF because its shifted frequency does not exist. Moreover, this effect is more serious the vibration amplitude is smaller. So, when unstable interferent signals via HPF are demodulated, a velocity is distorted. In this work, the mathematical explanation for the distortion of the homodyne interferent signal using the HPF is given. New synthetic heterodyne LDV based on the homodyne interferometer by exciting the reference mirror is proposed for the cancellation of the distortion. The optimum excitation condition of the mirror to compensate the distortion is discussed. The numerical simulation using the commercial MATLAB code is provided to show the effect of the proposed synthetic heterodyne LDV. The experimental results are also given and the effect of the proposed LDV is discussed.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1997.10a
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• pp.214-219
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• 1997

We propose a new scheme of high-resolution heterodyne interferometer that employs the two-axial mode He-Ne laser with an inter-mode beat frequency of 600-1000 MHz. An electronic RF-heterodyne circuit lowers the beat frequency down to 5 MHz, so that the phase change of the interferometer output is precisely measured with a displacement resolution of 0.1 nanometer without significant loss of dynamic bandwidth. A thermal control scheme is adopted to stabilize the cavity length with aims to suppress frequency drifts caused by the phenomena of frequency pulling and polarization anisotropy of the two-axial mode laser to a stability level of 2 parts in $10^9$. The two-axial mode HeNe laser yields a high output power of 2.0 mW, whlch allows us to perform multiple measurements of up to 10 machine axes simultaneously.

• Journal of the Korean Society for Precision Engineering
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• v.24 no.11
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• pp.15-21
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• 2007

• Proceedings of the KIEE Conference
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• 2007.10a
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• pp.225-226
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• 2007

In the semiconductor manufacturing industry, the heterodyne laser interferometer plays as an ultra-precise measurement system. However, the heterodyne laser interferometer has some unwanted environmental error which is caused from refraction in the air. This is an obstacle to improve the measurement accuracy in nanometer scale. In this paper we propose a compensation algorithm based on Data Fusion method which reduces the environmental error in the heterodyne laser interferometer. Through some experiments, we demonstrate the effectiveness of the proposed algorithm in measurement accuracy.

• Proceedings of the KIEE Conference
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• 1998.11c
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• pp.996-998
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• 1998

We have proposed and demonstrated a novel method of heterodyne detection using all-fiber Mach-Zehnder interferometer. The method is characterized by the phase modulation with a sawtooth waveform instead of a frequency modulation in true heterodyne. The experimental results will be compared with the expected results.

• Proceedings of the KIEE Conference
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• 2007.04a
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• pp.86-88
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• 2007

In the semiconductor manufacturing industry, the heterodyne laser interferometer plays as an ultra-precise measurement system. However, the heterodyne laser interferometer has some unwanted nonlinearity error which is caused from frequency-mixing. This is an obstacle to improve the measurement accuracy in nanometer scale. In this paper we propose a compensation algorithm based on RLS(recursive least square) method and artificial intelligence method, which reduce the nonlinearity error in the heterodyne laser interferometer. With the capacitance displacement sensor we get a reference signal which can be transformed into the intensity domain. Using the back-propagation Neural Network method, we train the network to track the reference signal. Through some experiments, we demonstrate the effectiveness of the proposed algorithm in measurement accuracy.

• Journal of the Korean Society for Precision Engineering
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• v.19 no.4
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• pp.195-201
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• 2002

We propose a new scheme of high-resolution heterodyne interferometer that employs the two-axial mode He-Ne laser with an inter-mode beat frequency of 600~1000 MHz. An electronic RF-heterodyne circuit lowers the beat frequency down to 5 MHz, so that the phase change of the interferometer output is precisely measured with a displacement resolution of 0.1 nanometer without significant loss of dynamic bandwidth. A thermal control scheme is adopted to stabilize the cavity length with ainus to suppress frequency drifts caused by the phenomena of frequency pulling and polarization anisotropy of the two-axial made laser to a stability level of 2 parts in $10^9$. The two-axial mode HeNe laser yields a high output power of 2.0 mW, which allows us to perform multiple measurements of up to 10 machine axes simultaneously.