• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2004년도 추계학술대회 논문집
• /
• pp.564-567
• /
• 2004

In the manufacture of integrated circuits, photolithography is the lowest yield step in present production lines. Electron beams form a powerful set of tools with which to attack this problem. Electron beams can be used to make patterns that are smaller than can a photolithography. We design a high voltage generator of electron beam manufacturing system. For this purpose, first, the configuration of electron beam manufacturing system was analyzed. Second, the basic configuration of a high voltage generator and test results were presented.

• Bulletin of the Korean Chemical Society
• /
• 제28권3호
• /
• pp.391-396
• /
• 2007

The three-dimensional structure of an inorganic crystal, CaMoO4 (space group I 41/a, a = 5.198(69) A and c = 11.458(41) A), was determined by electron crystallography utilizing a high voltage electron microscope. An initial structure of CaMoO4 was determined with 3-D electron diffraction patterns. This structure was refined by crystallographic image processing of high resolution TEM images. X-ray crystallography of the same material was performed to evaluate the accuracy of the TEM structure determination. The cell parameters of CaMoO4 determined by electron crystallography coincide with the X-ray crystallography result to within 0.033-0.040 A, while the atomic coordinates were determined to within 0.072 A.

• 한국융합학회논문지
• /
• 제8권8호
• /
• pp.197-202
• /
• 2017

본 연구는 미라 모발에 존재하는 멜라닌과립의 보존 상태와 모양을 규명하기 위해서 1250kV의 초고압전자현미경(high voltage electron microscope: HVEM)을 사용하여 3차 구조를 분석하였다. 미라 모발에서 피질에 분포하고 있는 멜라닌과립은 큐티클층에 인접한 바깥쪽 피질에 집중적으로 분포하고 있다. 이들 부위에는 다량의 멜라닌과립들이 무리를 지어 존재하고 있어서 현대인의 정상 모발에 있는 멜라닌과립의 분포양상과 뚜렷한 차이점을 나타내었다. 초고압전자현미경으로 ${\pm}60$도의 범위에서 1도 간격으로 촬영한 결과 멜라닌과립은 길쭉한 타원형의 형태로 크기가 다양하게 관찰되었다. 과립의 크기는 단축 직경이 $0.3-0.6{\mu}m$이고, 장축 직경은 $0.5-1{\mu}m$로 측정되었다. 결론적으로 초고압전자현미경은 일반 투과전자현미경보다 높은 해상도와 투과력을 가져서 두꺼운 절편의 생물 시료 구조분석에 용이하다.

• Applied Microscopy
• /
• 제42권2호
• /
• pp.105-109
• /
• 2012

Electron tomography (ET) of biological specimens is performed from a series of images obtained over a range of tilt angles in a transmission electron microscope. When using the high voltage electron microscope (HVEM), various noises appear in EM images acquired from thick sections by high voltage electron beam. In order to obtain an adequate result in electron tomograms that allow visualization of rather complex and mega-cellular structure such as brain tissue, it is necessary to remove the noise in each original tilt images of thick section. Using band-pass filtering of original tilt images, the filtered images are obtained and used to assemble a reconstructed tomogram. The qualified 3D tomogram from filtered images results in a considerable reduction of the noises compared to conventional tomogram. In conclusion, this study suggests that band-pass filtering is effective to improve the brightness and intensity of HVEM produced tomograms acquired from micron-thick sections of biological specimens.

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2005년도 춘계학술대회 논문집
• /
• pp.1875-1878
• /
• 2005

It is not efficient and scarcely out of the question to use commercial expensive electron beam lithography system widely used for semiconductor fabrication process for the manufacturing application field of various devices in the small business scope. Then scanning electron microscope based electron beam machining system is maybe regarded as a powerful model can be used for it simply. To get a complete suite of thus proper system, column unit build up with electron beam gun head unit is necessarily required more than anything else to modify scanning electron microscope. In this study, various components included ceramic isolation plate and main body which are essentially constructed for electron beam gun head unit are designed and manufactured. And this electron beam gun head unit will be used for next connected study in the development step of scanning electron microscope based electron beam machining system.

• Applied Microscopy
• /
• 제46권4호
• /
• pp.244-252
• /
• 2016

This paper describes a new design of carbon nanotube tip. $Nanocly^{TM}$ NC 7000 Thin Multiwall Carbon Nanotubes of carbon purity (90%) and average diameter tube 9.5 nm with a high aspect-ratio (>150) were used. These tips were manufactured by employing a drawing technique using a glass puller. The glass microemitters with internal carbon nanotubes show a switch-on effect to a high current level (1 to $20{\mu}A$). A field electron microscope with a tip (cathode)-screen (anode) separation at ~10 mm was used to characterize the electron emitters. The system was evacuated down to a base pressure of ${\sim}10^{-9}$ mbar when baked at up to ${\sim}200^{\circ}C$ overnight. This allowed measurements of typical Field Electron Emission characteristics; namely the current-voltage (I-V) characteristics and the emission images on a conductive phosphorus screen (the anode). Fowler-Nordheim plots of the current-voltage characteristics show current switch-on for each of these emitters.

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2006년도 춘계학술대회 논문집
• /
• pp.459-460
• /
• 2006

Electron beam manufacturing system can be used to make patterns that are smaller than can a photolithography. In this system, High voltage generator is a fundamental element for stable beam. We used high voltage with transformer. However, this instrument has several problems (for examples, dimensions, buying parts, simplicity of control circuit). For solving these problems, a commercial product is considered. This is developed for SEM(Scanning Electron Microscope). In this paper, we designed a control circuit for a commercial product and analyzed performance.

• 한국전자현미경학회:학술대회논문집
• /
• 한국현미경학회 2001년도 제32차 춘계학술대회
• /
• pp.16-19
• /
• 2001

• 한국전자현미경학회:학술대회논문집
• /
• 한국현미경학회 2001년도 제32차 추계학술대회
• /
• pp.18-22
• /
• 2001

A technique to characterize specific site of materials using a combination of a dedicated focused ion beam system(FIB), and Intermediate-voltage scanning transmission electron microscope(STEM) or transmission electron microscope(TEM) equipped with a scanning electron microscope(SEM) unit has been developed. The FIB system is used for preparation of electron transparent thin samples, while STEM or TEM is used for localization of a specific site to be milled in the FIB system. An FIB-STEM(TEM) compatible sample holder has been developed to facilitate thin sample preparation with high positional accuracy Positional accuracy of $0.1{\mu}m$ or better can be achieved by the technique. In addition, an FIB micro-sampling technique has been developed to extract a small sample directly from a bulk sample in a FIB system These newly developed techniques were applied for the analysis of specific failure in Si devices and also for characterization of a specific precipitate In a metal sample.

• Applied Microscopy
• /
• 제37권2호
• /
• pp.143-146
• /
• 2007

The objects of the nature have three dimensional (3-D) parameters. The 3-D profiles are embedded on the photographs and microscopic images. To understand 3-D configuration, stereo pair image with thick section is frequently employed. The perception of 3-D images is possible with the aid of stereoscopic glasses, although the expert can perceive 3-D images without the glasses. Anaglyphic stereo images are constructed by various softwares from commercial and freeware. Here we would like to present an easy anaglyphs construction method with Adobe $Photoshop^{(R)}$ based on tilting paired images from high voltage electron microscope. The anaglyphic stereo images constructed revealed the same 3-D perception with conventional stereoscopy. We could zoom in/out the anaglyph image digitally to investigate the detail configuration by real time. This method is expected to contribute to understanding complex structures 3 dimensionally.