• Proceedings of the Korean Society of Precision Engineering Conference
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• 2000.11a
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• pp.55-59
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• 2000

Nonlinearity is one of the primary causes of error in precision length measurement using laser interferometer. It arises periodically. The periodical nonlinearity usually ranges from sub-naometre to several namertres. In the homodyne interferometer, it results from a number of factors including polarization mixing, imperfect optical clement, unequal gain of detectors, misalignment of axes between input beam and beam splitter. In this paper, we described a method for measuring and compensating the nonlinearity of homodyne interferometer using the elliptical least-square fitting technique associated with electric method and experimental results in one frequency polarization interferometer.

• Journal of the Korean Society for Precision Engineering
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• v.18 no.9
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• pp.171-178
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• 2001

The nonlinearity of a laser interferometer usually ranges from sub-nanometer to several manometers. This nonlinearity, which has periodic characteristics, limits the accuracy of the interferometer at the sub-nanometer level. The nonlinearity error of the one-frequency homodyne interferometer with quadrature fringe detection results from a number of factors including polarization mixing by imperfect optical elements, unequal gain of photo detectors, lack of quadrature between two signals and misalignment. In this paper, we described a method for measuring and compensating the nonlinearity of homodyne interferometer using the elliptical fitting technique with least-square method. Experimental results demonstrate that $^\pm$3.5 nm nonlinearity can be reduced to $^\pm$0.2 nm level.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2003.05a
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• pp.397-402
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• 2003

The FM demodulation method for a bulk homodyne laser interferometer is presented. The Doppler frequency that represents the surface velocity of a vibrating object is obtained by using the bulk homodyne laser interferometer, and converted to the voltage signal by using the proposed analogue FM demodulation circuit. The DC offsets of the interferent signals that are obtained from the bulk homodyne interferometer are eliminated by using a simple subtraction. The new method for compensation of the asymmetry of each channels is presented. The light power variation of the interferometer is normalized by using the Auto Gain Controller(AGC). The proposed FM demodulation algorithm is proved by the theoretical method, and validated by the experimental results. In experiments, the proposed FM demodulation algorithm is compared with the conventional demodulation methods.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2007.05a
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• pp.373-378
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• 2007

On the homodyne interferometers, high pass filter(HPF) is usually used to remove the electrical noise in the interferent signal. Heterodyne interferometer has modulating frequency is shifted in the frequency region where the electrical noise effect is minimized by HPF effect. However, on the homodyne interferometer, the interferent DC-component of homodyne interferometer is unfortunately eliminated by using a HPF because its shifted frequency does not exist. Moreover, this effect is more serious the vibration amplitude is smaller. So, when unstable interferent signals via HPF are demodulated, a velocity is distorted. In this work, the mathematical explanation for the distortion of the homodyne interferent signal using the HPF is given. New synthetic heterodyne LDV based on the homodyne interferometer by exciting the reference mirror is proposed for the cancellation of the distortion. The optimum excitation condition of the mirror to compensate the distortion is discussed. The numerical simulation using the commercial MATLAB code is provided to show the effect of the proposed synthetic heterodyne LDV. The experimental results are also given and the effect of the proposed LDV is discussed.

• International Journal of Precision Engineering and Manufacturing
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• v.8 no.2
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• pp.80-84
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• 2007

We propose a new displacement measurement method using a phase modulation homodyne interferometer and a tunable laser diode as a light source to determine an arbitrary length with a resolution in the order of 10 pm. In the proposed instrument, the displacement of a movable mirror in the interferometer can be converted to a frequency shift of the tunable laser diode. We discuss the principles of the proposed method, the instrumentation, and the experimental results, and compare the proposed method with two commercial displacement sensors. The commercial sensors used are a heterodyne interferometer, the interpolation error of which is also measured, and a capacitive sensor.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.10a
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• pp.367-368
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• 2006

• Proceedings of the KSME Conference
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• 2008.11a
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• pp.1778-1783
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• 2008

A compact and two-dimensional atomic force microscope (AFM) using an orthogonal sample scanner, a calibrated homodyne laser interferometer and a commercial AFM head was developed for use in the nanometrology field. The x and y position of the sample with respect to the tip are acquired by using the laser interferometer in the open-loop state, when each z data point of the AFM head is taken. The sample scanner which has a motion amplifying mechanism was designed to move a sample up to $100{\times}100{\mu}m^2$ in orthogonal way, which means less crosstalk between axes. Moreover, the rotational errors between axes are measured to ensure the accuracy of the calibrated AFM within the full scanning range. The conventional homodyne laser interferometer was used to measure the x and y displacements of the sample and compensated via an X-ray interferometer to reduce the nonlinearity of the optical interferometer. The repeatability of the calibrated AFM was measured to sub-nm within a few hundred nm scanning range.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2008.06a
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• pp.297-298
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• 2008

• 제어로봇시스템학회:학술대회논문집
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• 2003.10a
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• pp.1225-1230
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• 2003

In this study, Real-time estimation and compensation procedure are developed for the laser interferometer. This system is designed with homodyne quadrature-phase detection method using the Laser interferometer. The errors in this system are due to noise, disturbance and undefined model dynamics. DSP(Digital Signal Processor) is applied for real time compensation of these errors. This estimator and compensation is verified with measurement test.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2007.11a
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• pp.249-250
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• 2007