• Proceedings of the KSME Conference
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• 2003.04a
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• pp.1645-1650
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• 2003

A numerical and experimental study is made of thermal behavior of a hot chuck which is specially designed for flip-chip bonders. The hot chuck consists of radiant heat sources and a heated plate of very high conductivity, which is for achievement of high-speed heat-up. A simplified numerical model is developed to simulate unsteady thermal behavior of the heated plate. Parallel experimental work is also conducted for a prototype of the hot chuck. Based on the experimental data, the numerical model is tuned to improve the reliability and accuracy. Design analysis using the numerical model is conducted. The results of numerical computations illustrate that the radiant heater system adopted in this study satisfies the key design requirements for a high-performance hot chuck.

• Proceedings of the KSME Conference
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• 2008.11b
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• pp.2110-2115
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• 2008

In this study, We disigned and manufactured the Hot Chuck which can be operated until $120^{\circ}C$. Its shape is circular, wide is 300mm and depth is 15mm. Two types working fluid was used as working fluid(distilled water, 0.1%-$TiO_2$ nanofluid). The experimental results were compared to each working fluid. The effect of various working fluid, charging volume ratio was investigated. Also we investigated heat transfer rate against each working fluid. By using nanofluid, heat transfer rate can be enhanced and the wick structure can be constructed automatically on smooth surface. The experiment of 40% charged 0.1%-$TiO_2$ nanofluid showed the best performance of thermal accuracy and uniformity. To improve performance of Hot Chuck, more study is needed.

• Proceedings of the KSME Conference
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• 2008.11b
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• pp.2369-2374
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• 2008

In the precision hot plate for wafer processing, the temperature uniformity of upper plate surface is one of the key factors affecting the quality of wafers. Precision hot plates require temperature variations less than ${\pm}1.5%$ during heating to $120^{\circ}C$. In this study, we have manufactured the flat plate heat pipe hot chuck of circle type(300mm) and investigated the operating characteristics of flat plate heat pipe hot chuck experimentally. Various liquids(aceton, FC-40, water) were used as the working fluid and charging ratio was changed($14{\sim}36\;vol.%$). Several cases were tested to improve temperature uniformity. Major working fluid to be investigated was water. Using water, various parameters such as charging ratio, wafer operation on-off time, different working fluids. In case of water, the temperature uniformity was ${\pm}1.5%$, response time of wafer were investigated.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.30 no.10 s.253
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• pp.957-965
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• 2006

A high-performance hot chuck is designed as a heating device for an ultra-precision flip-chip bonder with infrared alignment system. Analysis of design requirements for thermal performance leads to a radiative heating mechanism employing two halogen lamps as heating source. The heating tool is made of silicon carbide characterized by high thermal diffusivity and small thermal expansion coefficient. Experimental tests are performed to assess heat-up performance and temperature uniformity of the heating tool. It is revealed that the initial design of hot chuck results in a good heat-up speed but there exist a couple of troubles associated with control and integrity of the device. As a means to resolve the raised issues, a revised version of heating tool is proposed, which consists of a working plate made of silicon carbide and a supporting structure made of stainless steel. The advantages of this two-body heating tool are discussed and the improved features are verified experimentally.

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2003.12a
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• pp.207-211
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• 2003

In this study, the geometric modeling has been conducted for a new model of 12 inch hot-cold chuck using three-dimensional solid modeler, SolidWorks. Then, the heat transfer analysis and the thermal deformation analysis using FEM have been performed. The results of the analysis show the temperature distribution and the deformed shape of a new model of 12 inch hot-cold chuck. The evaluation for the surface flatness of a new model has been performed based on the deformed shape obtained from ANSYS.

• Journal of computational fluids engineering
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• v.8 no.4
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• pp.41-49
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• 2003

This study presents a numerical model to analyze dynamic thermal behavior of a hot chuck designed for flip-chip bonders. The hot chuck of concern is a heater which has been specifically developed for accomplishing high-speed and ultra-precision soldering. The characteristic features are radiative heat source and the heating tool made of a material of high thermal diffusivity. A physical modeling has been conducted for the network of heat transport. A simplified finite volume model is deviced to simulate time-dependent thermal behavior of the heating tool on which soldering is achieved. The reliability of the proposed numerical model is verified experimentally. A series of numerical tests illustrate the usefulness of the numerical model in design analysis.

• Proceedings of the KIEE Conference
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• 2003.10a
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• pp.42-44
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• 2003

The paper presents the method and apparatus for conformal photoresist spray coating on the 3D structured substrate. The system consists of a high-temperature-rotational chuck, ultrasonic spray nozzle module, angle control module and nozzle moving module. The coating uniformity is acquired by controlling the moving speed of the ultrasonic spray nozzle across the substrate which is rotated constantly. To coat the photoresist conformally the spray angle of the nozzle and the temperature of the substrate are controlled during spray coating. The rotational chuck can be heated up by hot air or $N_2$. The photoresist (AZ1512) has been coated on the 3D structured wafer by spray coating system and the characteristics have been evaluated.

• 제어로봇시스템학회:학술대회논문집
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• 1993.10a
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• pp.981-986
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• 1993

A fast algorithm based upon geometry to measure the wafer center and the position of a wafer fiducial mark is developed and implemented on a single-axis aligner. Design issues for a controller when a National Semiconductor's LM629 is used as a PID controller of an aligner are discussed. Performance of an aligner with the algorithm and a LM629 was measured in experiments. The result shows that it takes about 4.1 seconds on average to align a hot wafer supported by metal pins on the chuck.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2000.05a
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• pp.882-885
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• 2000

The machinability of material was evaluated using high speed steel drill on hot-rolled high strength steel. Cutting resistance and tool wear were investigated by drilling experimentation. When the steel-board specimens were drilled in industrial condition, the relationship between average of thrust and cutting resistance was random because of slip of chuck and strain of workpiece. The primary objective of this study is to develop the strategy of analysis that can detect drilling states in industrial condition and such strategy is programmed with visual C++. The developed program can analyze thrust of initial rising zone. The result is obtained that thrust of rising zone is closely related to tool wear in despite of industrial condition.

• Nuclear Engineering and Technology
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• v.53 no.6
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• pp.1887-1892
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• 2021

The effect of gadolinium and boron on the texture development and magnetic properties of the texture controlled 23Cr-10NiCu duplex stainless steels were studied to develop a high performance neutron and electromagnetic shielding material. The 23Cr-10NiCu base alloy is composed of 60% of austenite and 40% of ferrite, whereas, the 23Cr-10NiCu-0.5Gd-0.8B modified alloy is composed of 66% of austenite, 27% of ferrite and 7% of CrFeB intermetallic compounds. The gadolinium and boron addition to the 23Cr-10NiCu base alloy increased mechanical properties. Microstructure observation showed that the small addition of 0.5 wt% gadolinium and 0.8 wt% boron to the alloy retarded to form texture at the same hot rolling conditions, and improved the maximum magnetism, residual magnetism and coercive force about 3%, 122% and 120%, respectively.