• Journal of the Korea Institute of Information and Communication Engineering
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• v.9 no.2
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• pp.307-315
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• 2005

We have studied to obtain the SAW filter for the passband was formed on the Langasite substrate and was evaporated by Aluminum-Copper alloy and then we performed computer-simulated by simulator. We can fabricate that the block weighted type IDT as an input transducer of the filter and the withdrawal weighted type IDT as an output transducer of the filter from the results of our computer-simulation. Also, we have performed to obtain the properly design conditions about phase shift of the SAW filter for WCDMA. We have employed that the number of pairs of the input and output IDT are 50 pairs and the thickness and the width of reflector are 5000$\AA$ and 3.6$mu$m, respectively. Frequency response of the fabricated SAW filter has the property that the center frequency is about 190MHz and bandwidth at the 3dB is probably 8.2MHz. And we could obtain that return loss is less then 16dB, ripple characteristics is probably 4dB and triple transit echo is less then 18dB after when we have matched impedance.

• Journal of the Korea Institute of Information and Communication Engineering
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• v.9 no.3
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• pp.602-608
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• 2005

We have studied to obtain the SAW filter for the Single Phase Unidirectional Transduce. (SPUDT), was formed on the Langasite substrate and was evaporated by Aluminum-Copper alloy and then we performed computer-simulated by simulator. We can fabricate that the block weighted type IDT as an input transducer of the filter and the withdrawal weighted type IDT as an output transducer of the filter from the results of our computer-simulations. Also, we have performed to obtain the properly conditions about impedance matching of the SAW filter for SPUDT. We have employed that the number of pairs of the input and output IDT are 50 pairs and the thickness and the width of reflector are 5000A and $3.6{\mu}m$, respectively. And the width of IDT' fingers is $2.4{\mu}m$, and the space between IDT' finger and reflector is $2.0{\mu}m$. Frequency response of the fabricated SAW filter has the property that the center frequency is about 190MHz and bandwidth at the 3dB is probably 7.7MHz after when we have matched impedance. Also, we could obtain that ripple characteristics is less than 0.4dB and standing wave ratio is probably 1.5 after when we have matched impedance.

• Journal of the Korea Institute of Information and Communication Engineering
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• v.11 no.12
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• pp.2374-2381
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• 2007

.We have studied to obtain the properly conditions about impedance matching of the SAW filter for the SPUDT type and the bidirectional transducer type later. And we have studied to obtain the SAW filter for the Slanted Finger Interdigital Transducer(SFIT), was formed on the Langasite substrate and was evaporated by Aluminum-Copper alloy and then we performed computer-simulated by simulator In case the SPUDT, we have employed that the number of pairs of the input and output IDT are 50 pairs and the thickness and the width of reflector are $5000{\AA}$ and $3.6{\mu}m$, respectively. And the of the bidirectional transducer, the width of IDT' fingers and the space between IDT' finger and reflector is $1.8{\mu}m$, respectively. Also, we have performed to series connected the SPUDT type with the bidirectional transducer type filter. The frequency response of the fabricated SAW filter has the property that the center frequency is about 190MHz and bahdwidth at the 3dB is probably 5.3MHz after when we have matched impedance. Also, we could obtain that ripple characteristics is less than 0.3dB and insert loss is probably -20dB after when we have matched impedance.

• Journal of the Korean Society for Nondestructive Testing
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• v.14 no.4
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• pp.237-243
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• 1995

We have studied methods of detecting attenuation of solid materials such as silicon wafer and piezoelectric $LiTaO_3$ by means of optical probing techniques. We have performed measurements of surface acoustic waves(SAW) generated from 90 degree wedge type transducer and also from inter-digital transducers(IDT). SAW of 20.0 MHz was generated on a silicon wafer from the 90 degree wedge type transducer and those of 20.8 and 14.5 MHz are generated on a $LiTaO_3$ from the IDT. Then any surface-corrugation resulted from the above SAW was investigated by He-Ne laser beams. We projected laser beams, which were modulated by an optical chopper, on the SAW of the same frequency and then measured the scattered beam by the lock-in amplifier. We modulated and synchronized both SAW and the incident laser beam as well as the phase sensitive detector(PSD) to the same frequency in order to simplify our measurement system. We obtained the attenuation coefficients of SAW to be $0.62{\sim}0.75dB/mm$(from IDT1, 20.8 MHz), and $0.60{\sim}0.72dB/mm$(from IDT2, 14.5 MHz), $0.83{\sim}1.28dB/mm$(from the wedge type), respectively.

• The Journal of the Acoustical Society of Korea
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• v.18 no.1
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• pp.10-15
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• 1999

We have studied a method to design and fabricate the Intermediate Frequency(IF) band pass filter with low shape factor which is used for CDMA base station on the 35°Y-cut X-propagation Quartz substrate. In order to fabricate a device of the low shape factor for the IF SAW filter on this substrate, we employed apodization weighted type interdigital transducer(IDT) as an input and withdrawal weighted type IDT as an output by using impulse modelling method. Also, using the Kaiser-Bessel window function, we have adopted 2200pairs and 1000pairs of input and oueut IDT respectively to minimize the effect of ripple. Furthermore, the width and the space of IDT finger are 3.6 ㎛ and 3.5 ㎛ respectively. Thus, we can have optimal results when the IDT thickness is 6000Å in consideration of the ratio of SAW's wavelength while it's aperture is 2mm for impedance matching. The fabricated SAW filter for CDMA had the property of almost 115.2MHz of a center frequency, less then 1.27MHz of bandwidth, less than 1.3 of shape factor, - l5dB of out band attenuation insertion loss and -45dB of rejection band.

• The Journal of the Acoustical Society of Korea
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• v.19 no.2
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• pp.33-39
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• 2000

We have studied to obtain the frequency characteristics of the Surface Acoustic Wave(SAW) bandpass filter, having low shape factor, it's interdigital transducer(IDT) was formed on the 35° Y-cut X-propagation Quartz substrate and was evaporated by Aluminium. And then, we performed computer-simulation by a simulator. And, we can design that the apodization weighted type IDT as an input transducer of the filter and the withdrawal weighted type IDT as an output transducer of the filter from the results of our computer-simulation. Also, we have employed that the number of pairs of the input and output IDT are 2200 pairs and 1000pairs, respectively and used the Kaiser-Bessel window function in order to minimize the effect of ripple. And, while the width and the space of IDT's finger are 6㎛ m and 5.75㎛, respectively and we could obtain the resonable results when the IDT thickness was 6000Å in consideration of the ratio of SAW's wavelength, and IDT aperture is 2mm. Frequency response of the fabricated SAW bandpass filter has the property that the center frequency is about 70MHz, shape factor is less than 1.3, bandwidth at the 1.5dB is probably 1.3MHz, out-band attenuation is almost -45dB, insertion loss is 19dB and ripple in the width of bandpass is 1dB approximately. Therefore, these frequency characteristics of the fabricated SAW bandpass filter are agreed well with the designed values.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.04b
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• pp.13-16
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• 2009

In this study, AlN thin films were deposited on a polycrystalline (poly) 3C-SiC buffer layer for surface acoustic wave (SAW) applications using a pulsed reactive magnetron sputtering system. AFM, XRD and FT-IR were used to analyze structural properties and preferred orientation of the AlN/3C-SiC thin film. Suitability of the film in SAW applications was investigated by comparing the SAW characteristics of an interdigital transducer (IDT)/AlN/3C-SiC structure with the IDT/AIN/Si structure at 160 MHz in the temperature range $30-150^{\circ}C$. These experimental results showed that AlN films on the poly 3C-SiC layer were highly (002) oriented. Furthermore, the film showed improved temperature stability for the SAW device, $TCF\;=\;-18\;ppm//^{\circ}C$. The change in resonance frequency according to temperature was nearly linear. The insertion loss decrease was about $0.033dB/^{\circ}C$. However, some defects existed in the film, which caused a slight reduction in SAW velocity.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2004.05a
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• pp.563-567
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• 2004

In this paper, a remote temperature sensor based on surface acoustic wave is introduced and the issues on design, manufacturing, and test of the sensor are addressed. SAW sensors having single and double electrode are prepared on the 128$^{\circ}$ YX-LiNbO$_3$ Substrate. The frequency responses of SAW sensors on the temperature change are compared. To measure the change of center frequency, two center frequencies on the 3dB and 20dB are measured and compared. Since the center frequency on the temperature change from -30$^{\circ}C$ to 80$^{\circ}C$ is linearly changed, the SAW sensor is applicable to the temperature sensor.

• Journal of the Korean Society for Nondestructive Testing
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• v.10 no.2
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• pp.56-62
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• 1990

Surface Acoustic Waves(SAW) are generated on silicon wafer and $YZ-LiTaO_3$ substrate and are detected by noncontact method. As wave sources two kinds of transducers are used : the wedge-type of 20.0 MHz and fabricated Interdigital Transducer(IDT) of 20.8 MHz. SAW are modulated by the optical chopper frequency and are syncronized with a laser beam. In signal processing, intensity variations of light due to the intensity of SAW are analyzed using lock- in amplifier. From the results, corresponding to the applied input power, the intensity variations of a deflected light by corrugations on the substrates are increased and saturation phenomenon is observed.

• Journal of the Microelectronics and Packaging Society
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• v.16 no.1
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• pp.13-19
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• 2009

A 440MHz wireless and passive surface acoustic wave (SAW) based chemical sensor was developed on a $41^{\circ}YX\;LiNbO_3$ piezoelectric substrate for simultaneous measurement of $CO_2$ gas and relative humidity (RH) using a reflective delay line pattern as the sensor element. The reflective delay line is composed of an interdigital transducer (IDT) and several shorted grating reflectors. A Teflon AF 2400 and a hydrophilic $SiO_2$ layer were used as $CO_2$ and water vapor sensitive films. The coupling of mode (COM) modeling was conducted to determine optimal device parameters prior to fabrication. According to simulation results, the device was fabricated and then wirelessly measured using the network analyzer. The measured reflective coefficient $S_{11}$ in the time domain showed high signal/noise (S/N) ratio, small signal attenuation, and few spurious peaks. In the $CO_2$ and humidity testing, high sensitivity ($2^{\circ}/ppm$ for $CO_2$ detection and $7.45^{\circ}/%$RH for humidity sensing), good linearity and repeatability were observed in the $CO_2$ concentration ranges of $75{\sim}375ppm$ and humidity levels of $20{\sim}80%$RH. Temperature and humidity compensations were also investigated during the sensitivity evaluation process.