• Title/Summary/Keyword: Laser

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Laser Micromachining of Submicron Aperture for Electronbeam Microcolumn Application using Piezo Q-Switched Nd:YAG Laser

  • S.J. Ahn;Kim, D.W.;Park, S.S.
    • Proceedings of the Korean Vacuum Society Conference
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    • 1999.07a
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    • pp.78-78
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    • 1999
  • Experimental studies of laser micromachining on Mo metal using piezo Q-switched Nd:YAG laser have been performed. Miniaturized microcolumn electron gun arrays as a potential electron beam lithography or portable mini-scanning electron microscope application have recently extensively examined. For these purpose, the electro-static electron lens and deflector system called microcolumn has to be assembled. The conventional microcolumn fabrication technique would gave a limitation on the minimization of aberration. The current technique of a 1 $\mu$m misalignment would lead to ~1.3 nm coma. In order to reduce aberration, assembling the microcolumn component followed by laser drilling should be very beneficial. In this report, we will address the preliminary report of laser micromachining on Mo substrate using piezo Q-switched Nd:YAG laser. The geometrical figures, such as the diameter and the depth of the frilled aperture are dependent upon the total energy of the laser pulse train, laser pulsewidth, and the diameter of laser beam in addition to the materials-dependent parameters.

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Laser-Heating Characteristics of CuO-Incorporating Glasses

  • Lee, Jungki;Kim, Jongwoo;Kim, Hyungsun
    • Journal of the Korean Ceramic Society
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    • v.52 no.2
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    • pp.119-122
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    • 2015
  • Laser sealing with glass frits appears a promising technology for sealing various electronic devices (e.g., solar cells, displays) due to its several advantages. The purpose of this study is to understand the relationship between the composition of glasses and their laser-heating conditions. To allow glass to be sealed using laser heating, CuO was added to two different glass systems, in different amounts. The optical absorptivity of the glass samples was related directly to their CuO content. The laser-heating temperature and the CuO content exhibited a proportional relationship. Furthermore, the heating temperature increased linearly with the laser power used. From these results, we could determine the appropriate laser-heating conditions and CuO content for sealing electronic devices using laser-sealing technology.

Effects of Process Parameters on Laser Ablation Based Machining and Measurements (레이저 어블레이션 기반 가공 및 계측에서 공정변수의 영향)

  • Jeong, Sung-Ho;Lee, Seok-Hee
    • Journal of the Korean Society for Precision Engineering
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    • v.28 no.12
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    • pp.1359-1365
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    • 2011
  • The changes of ablation characteristics with respect to laser parameters and material parameters during pulsed laser ablation of solids were discussed with experimental results. Although laser wavelength, laser pulse width, and laser pulse energy are the primary factors to be considered, it is shown that other parameters such as laser spot size and material properties also critically influence on the ablation results. It is further demonstrated that the microstructural characteristics of the target can lead to completely different ablation rate and surface morphology.

A Study on Sapphire Wafer Scribing Using Picosecond Pulse laser (피코초 펄스 레이저를 이용한 사파이어 웨이퍼 스크라이빙에 관한 연구)

  • Moon, Jae-Won;Kim, To-Hoon
    • Laser Solutions
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    • v.8 no.2
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    • pp.7-12
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    • 2005
  • The material processing of UV nanosecond pulse laser cannot be avoided the material shape change and contamination caused by interaction of base material and laser beam. Nowadays, ultra short pulse laser shorter than nanosecond pulse duration is used to overcome this problem. The advantages of this laser are no heat transfer, no splashing material, no left material to the adjacent material. Because of these characteristics, it is so suitable for micro material processing. The processing of sapphire wafer was done by UV 355nm, green 532nm, IR 1064nm. X-Y motorized stage is installed to investigate the proper laser beam irradiation speed and cycles. Also, laser beam fluence and peak power are calculated.

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A Study on the Ablation of AZ5214 and SU-8 Photoresist Processed by 355nm UV Laser (355nm UV 레이저를 이용한 AZ5214와 SU-8 포토레지스트 어블레이션에 관한 연구)

  • Oh, J.Y.;Shin, B.S.;Kim, H.S.
    • Laser Solutions
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    • v.10 no.2
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    • pp.17-24
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    • 2007
  • We have studied a laser direct writing lithography(LDWL). This is more important to apply to micro patterning using UV laser. We demonstrate the possibility of LDWL and construct the fabrication system. We use Galvano scanner to process quickly micro patterns from computer data. And laser beam is focused with $F-{\theta}$ lens. AZ5214 and SU-8 photoresist are chosen as experimental materials and a kind of well-known positive and negative photoresist respectively. Laser ablation mechanism depends on the optical properties of polymer. In this paper, therefore we investigate the phenomenon of laser ablation according to the laser fluence variation and measure the shape profile of micro patterned holes. From these experimental results, we show that LDWL is very useful to process various micro patterns directly.

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Damage Analysis of CCD Image Sensor Irradiated by Continuous Wave Laser (연속발진 레이저에 의한 CCD 영상센서의 손상 분석)

  • Yoon, Sunghee;Jhang, Kyung-Young;Shin, Wan-Soon
    • Journal of the Korea Institute of Military Science and Technology
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    • v.19 no.6
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    • pp.690-697
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    • 2016
  • EOIS(electro-optical imaging system) is the main target of the laser weapon. Specially, the image sensor will be vulnerable because EOIS focuses the incident laser beam onto the image sensor. Accordingly, the laser-induced damage of the image sensor needs to be identified for the counter-measure against the laser attack. In this study, the laser-induced damage of the CCD image sensor irradiated by the CW(continuous wave) NIR(near infrared) laser was experimentally investigated and mechanisms of those damage occurrences were analyzed. In the experiment, the near infrared CW fiber laser was used as a laser source. As the fluence, which is the product of the irradiance and the irradiation time, increased, the permanent damages such as discoloration and breakdown appeared sequentially. The discoloration occurred when the color filter was damaged and then the breakdown occurred when the photodiode and substrate were damaged. From the experimental results, LIDTs(laser-induced damage thresholds) of damages were roughly determined.

Dynamic Quasi-Elastic Light Scattering Measurement of Biological Tissue

  • Youn, Jong-In;Lim, Do-Hyung
    • Journal of Biomedical Engineering Research
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    • v.28 no.2
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    • pp.169-173
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    • 2007
  • During laser irradiation, mechanically deformed cartilage undergoes a temperature dependent phase transformation resulting in accelerated stress relaxation. Clinically, laser-assisted cartilage reshaping may be used to recreate the underlying cartilaginous framework in structures such as ear, larynx, trachea, and nose. Therefore, research and identification of the biophysical transformations in cartilage accompanying laser heating are valuable to identify critical laser dosimetry and phase transformation of cartilage for many clinical applications. quasi-elastic light scattering was investigated using Ho : YAG laser $(\lambda=2.12{\mu}m\;;\;t_p\sim450{\mu}s)$ and Nd:YAG Laser $(\lambda=1.32{\mu}m\;;\;t_p\sim700{\mu}s)$ for heating sources and He : Ne $(\lambda=632.8nm)$ laser, high-power diode pumped laser $(\lambda=532nm)$, and Ti : $Al_2O_3$ femtosecond laser $(\lambda=850nm)$ for light scattering sources. A spectrometer and infrared radiometric sensor were used to monitor the backscattered light spectrum and transient temperature changes from cartilage following laser irradiation. Analysis of the optical, thermal, and quasi-elastic light scattering properties may indicate internal dynamics of proteoglycan movement within the cartilage framework during laser irradiation.

Wide Beam Optical System for the Laser Materials Processing (레이저 재료 가공을 위한 광폭빔 광학 장치)

  • 김재도;조응산;전병철
    • Laser Solutions
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    • v.1 no.1
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    • pp.24-29
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    • 1998
  • A new wide laser beam optical system for the laser materials processing has been developed with a polygonal mirror. It consists of polygonal mirror and cooling part that prevents the surface of rotating polygonal mirror from damage by heat. The polygonal minors have been designed and made as 24 and 30 facets in pyramid type. This system provides a uniform linear laser heat source with the surface scanning width from 15 to 50mm according to the scanning height To examine the wide laser beam, He-Ne laser is used. Also, Acryl is used to confirm the laser beam pattern by bum-pattern print To analyze the energy distribution of the wide laser ben empirical values and theoretical values are compared and discussed. To improve the efficiency of the wide laser beam optical system, methods are suggested by the optical theories. For larger area processing like turbine blade, drawing blade, cold roller and guide plate, optimal overlapping locations have been calculated and analyzed by geometric and optical theories.

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Laser Peening Process and Its Application Technique (레이저 피닝 처리 및 적용 기술)

  • Kim, Jong-Do;KUTSUNA, Muneharu;SANO, Yuji
    • Journal of Welding and Joining
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    • v.33 no.4
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    • pp.1-6
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    • 2015
  • Advances in laser technology have yielded a multitude of innovative processes and applications in various industries. Laser peening is a typical example invented in the mid-1990s as a surface technology, which converted residual stress from tension to compression by just irradiating successive laser pulses to metallic materials under aqueous environment without any surface preparation. The effects of laser peening have been experimentally studied on residual stress, stress corrosion cracking(SCC) susceptibility and fatigue properties with water-penetrable frequency-doubled Nd:YAG laser. In addition, laser peening has been widely used in aviation and aerospace industries, automobile manufacturing and nuclear plant. One of the most important causes to improve the above-mentioned properties is the deeper compressive residual stress induced by laser peening. Taking advantage of the process without reacting force against laser irradiation, a remote operating system was developed to apply laser peening to nuclear power reactors as a preventive maintenance measure against SCC.

MAGNETIC RESONANCE IMAGING AND HISTOPATHOLOGIC CORRELATIONS OF FOCAL LESIONS INDUCED BY LASER (레이저 조사후 자기공명영상과 조직학적 소견의 상호일치도)

  • 이정구;정필상;정필섭;조정석;김상준
    • Korean Journal of Bronchoesophagology
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    • v.2 no.2
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    • pp.194-199
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    • 1996
  • Laser therapy is becoming an accepted procedure for tissue coagulation and ablation and is especially useful in treating tumors. The laser energy is applied to the tissue of interest through various delivery systems which are introduced percutaneously, via blood vessels, through body openings, or during surgical exposure of the tissue. One of the major obstacles to effective application of lasers has been the lack of reliable method to determine the extent of tissue involvement in real time. Several methods have been proposed for monitoring the tissue response and controlling the laser in real time during laser therapy. Among them, magnetic resonance imaging(MRI) has been introduced to monitor laser-tissue interactions because laser irradiation induces changes not only in the thermal motions of the hydrogen protons within the tissue but also in the distribution and mobility of water and lipids. The buttocks of New Zealand rabbits were treated by KTP and $CO_2$laser(power : 10 watts, exposure time:10 seconds). m images were taken at immediately after lasering, 1 week later, 2 weeks later, and at the same time, tissues were harvested for histopathologic study. We analyzed MR images and histopathologic findigs of laser-treated tissues. The MR images taken immediately after laser treatment showed 3 layer pattern and which was correlated with histopathologic changes. We suggest MRI may become a useful monitoring tools for laser-tissue interaction.

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