• Journal of the Semiconductor & Display Technology
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• v.9 no.4
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• pp.31-37
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• 2010

In this paper, optical deflection of laser scattering has been investigated based on Rayleigh criterion for crystalline silicon wafer in solar cell. A laser scattering mechanism is newly designed using light scattering properties in silicon wafer. Intensity distributions of laser scattering are different, depending on the incident angle of laser computed from Rayleigh criterion. In case of the incident angle satisfied with the criterion, they are asymmetric. Also, their specular reflection angle is shifted to unpredicted ones. These phenomena are in accordance with previous theories of laser scattering. The optical deflection of laser scattering is experimentally identified with the designed laser scattering mechanism. Its mathematical model is presented from the geometric relationship of laser scattering. It is shown that the optical deflection of laser scattering agree with the presented model, exclusive of grazing angles which is satisfied with Rayleigh criterion.

• Journal of the Korean Society for Precision Engineering
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• v.28 no.5
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• pp.606-613
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• 2011

In this paper, patterns of laser scattering and detection of micro defects have been investigated based on Rayleigh criterion for silicon wafer in solar cell. Also, a new laser scattering mechanism is designed using characteristics of light scattering against silicon wafer surfaces. Its parameters are to be optimally selected to obtain effective and featured patterns of laser scattering. The optimal parametric ranges of laser scattering are determined using the mean intensity of laser scattering. Scattering patterns of micro defects are investigated at the extracted parameter region. Among a lot of pattern features, both maximum connected area and number of connected component in patterns of laser scattering are regarded as the important information for detecting micro defects. Their usefulness is verified in the experiment.

• Journal of the Korean Society for Precision Engineering
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• v.26 no.7
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• pp.58-64
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• 2009

In this paper, an inspection mechanism based on laser scattering has been developed for the surface evaluation of infrared cut-off filters, and optimum conditions of laser scattering are determined using the design of experiment. First of all, attributes and influence factors of laser scattering are investigated and then a laser scattering inspection mechanism is newly designed based on analyses of laser scattering parameters. Also, Taguchi method, one of experimental designs, is used for the optimum condition selection of laser scattering parameters and the optimum condition is determined in order to maximize the detection capability of surface defects. Experiments show that the proposed method is useful in a consistent and effective defect detection and can be applied to surface evaluation processes in manufacturing.

• Journal of the Semiconductor & Display Technology
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• v.10 no.2
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• pp.7-12
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• 2011

In this paper, a laser scattering mechanism are designed to detect micro defects such as dent, scratch, pinhole, etc. Its influential parameters are experimentally selected and scattering patterns of micro defects have been analyzed for silicon wafer in solar cell. As a result of experiments, scattered lights are rather increased in wafer surface with micro defects, in comparison to no micro ones. Scattering parameters are optimally selected for obtaining robust and high quality laser scattering images of micro defects. It is shown that scattered light components are linearly increased according to the increase of micro defect sizes, and the depth of micro-defects give a large influence on optical deflection.

• Laser Solutions
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• v.15 no.4
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• pp.6-11
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• 2012

Laser beam can be either absorbed or scattered in porous ceramic material and its optical characteristics need to be understood. Electro-magnetic multiphysics software was used to simulate and understand the actual scattering phenomena in porous materials. 785nm femtosecond laser was irradiated on the surface of ceramic material and strong scattering occurred in drilling process. The computer results showed the scattering and absorption phenomena of Aluminum oxide were a mixture of dielectric and metallic material. The computer simulation showed the laser beam was almost extinct at the aspect rate of 5 approximately.

• Journal of Biomedical Engineering Research
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• v.28 no.2
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• pp.169-173
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• 2007

During laser irradiation, mechanically deformed cartilage undergoes a temperature dependent phase transformation resulting in accelerated stress relaxation. Clinically, laser-assisted cartilage reshaping may be used to recreate the underlying cartilaginous framework in structures such as ear, larynx, trachea, and nose. Therefore, research and identification of the biophysical transformations in cartilage accompanying laser heating are valuable to identify critical laser dosimetry and phase transformation of cartilage for many clinical applications. quasi-elastic light scattering was investigated using Ho : YAG laser $(\lambda=2.12{\mu}m\;;\;t_p\sim450{\mu}s)$ and Nd:YAG Laser $(\lambda=1.32{\mu}m\;;\;t_p\sim700{\mu}s)$ for heating sources and He : Ne $(\lambda=632.8nm)$ laser, high-power diode pumped laser $(\lambda=532nm)$, and Ti : $Al_2O_3$ femtosecond laser $(\lambda=850nm)$ for light scattering sources. A spectrometer and infrared radiometric sensor were used to monitor the backscattered light spectrum and transient temperature changes from cartilage following laser irradiation. Analysis of the optical, thermal, and quasi-elastic light scattering properties may indicate internal dynamics of proteoglycan movement within the cartilage framework during laser irradiation.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.34 no.1
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• pp.35-41
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• 2010

In this paper, surface roughness has been experimentally identified using laser scattering images. The parameters and optical deflected rays of laser scattering are investigated on laser scattering system, and then their optimum parameters on grinding surfaces are selected using design of experiment. The application of the optimum parameters results in featured laser scattering images, in which the mean of vertical scattering distributions is regarded as a feature. It is shown that the feature of laser scattering distributions is linearly increased according to grinding surface roughness and so the information can be used as important factor for the measurement and evaluation of various surface roughness. In the future, the performance of the proposed laser scattering method will be evaluated using AFM.

• Journal of the Korean Society for Precision Engineering
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• v.24 no.11
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• pp.76-83
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• 2007

The dark-field laser scattering system has been developed to inspect surface defects in infrared cut-off filters and then laser scattering characteristics against the defects are investigated. The qualitative analysis for the reliable and accurate detection performance is described through the correlation between incident angles of a laser and viewing ones of a camera. In this paper, reliable and important information with laser scattering is given for the surface defect inspection of IR filters. Its performance has been verified through various experiments.

• Journal of the Korean Society of Visualization
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• v.2 no.1
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• pp.52-56
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• 2004

Several visualization techniques of laser diagnostics are presented for combustion phenomena, including Mie scattering for flow, Rayleigh and Raman scattering spectroscopy for major species, laser-induced fluorescence for minor species, and laser-induced incandescence for soot. These techniques have been applied to understand the various combustion phenomena more clearly, including buoyancy-dominant flow system, diffusion flam oscillation, laminar and turbulent lifted flames, flame propagation along a vortex ring, and soot zone characteristics. The usefulness of laser diagnostics on a better understanding of physical mechanism is demonstrated.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.35 no.1
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• pp.107-114
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• 2011

In this study, a correlation between the roughness of nanoscale lapping surface and its laser scattering pattern has been identified experimentally. The characteristics of laser scattering on a reflected surface are investigated, and a laser scattering mechanism is newly designed by adopting the dark-field method. Laser scattering patterns resulting from nanoscale lapping shape are in the shape of crossed irregular lattice. In addition, optimum laser scattering images are obtained by the design of experiment, and the roughness of nanoscale lapping surface is estimated using regression analysis certain useful features of the laser scattering patterns. The results of fifty experiments on three types of nanoscale lapping surfaces show that the roughness of nanoscale lapping surfaces can be accurately estimated by the proposed mathematical modeling method.