• Journal of Sensor Science and Technology
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• v.14 no.2
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• pp.85-90
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• 2005

In this study, we have fabricated a three branches vertical Hall sensor for detecting three phases rotation informations of miniaturized brushless motor. The sensor gives three position signals phase shifted by $120^{\circ}$, corresponding to the motor driving signals. The branch has one Hall output and one input each other. The central part acts as common driving input. Sensor has branch width of $150{\mu}m$ and distance from central electrode to Hall electrode of $100{\mu}m$. The sensitivity of sensor is 250 V/$A{\cdot}T$ at magnetic field of 0.1 T. It has also showed three sine waves of Hall voltages with $120^{\circ}$ phase over a $360^{\circ}$ rotation. A packaged sensing part are $2{\times}2mm^{2}$ and has been successfully tested on a motor rotation at a speed up to 60,000 rpm.

• Proceedings of the KIEE Conference
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• 2001.07b
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• pp.1239-1241
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• 2001

This research addresses a new vehicle detecting scheme which uses MR(Megneto Resistive) sensor. A vehicle detector which includes two MR sensors for detecting car presence and speed, sensor voltage amplifiers, signal processor, microprocessor, RF data transceiver and a simple car moving simulator is constructed. From experimental results with the vehicle detector the proposed vehicle detecting scheme was verified.

• Journal of Sensor Science and Technology
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• v.32 no.4
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• pp.232-237
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• 2023

This paper presents a system for estimating the position of a magnet using a magnetic sensor. An algorithm is presented to analyze the waveform and output voltage values of the magnetic field generated at each position when the magnet moves and to estimate the position of the magnet based on the analyzed data. Here, the magnet is sufficiently small to be inserted into a blood vessel and has a micro-magnetic field of hundreds of nanoteslas owing to the small size and shape of the guide wire. In this study, a highly sensitive magneto-impedance (MI) sensor was used to detect these micro-magnetic fields. Nine MI sensors were arranged in a 3×3 configuration to detect a magnetic field that changes according to the position of the magnet through the MI sensor, and the voltage value output was polynomially regressed to specify a position value for each voltage value. The accuracy was confirmed by comparing the actual position value with the estimated position value by expanding it from a 1D straight line to a 3D space. Additionally, we could estimate the position of the magnet within a 3% error.

• Journal of Sensor Science and Technology
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• v.8 no.4
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• pp.308-313
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• 1999

This paper will present an anisotropic etching in TMAH technique used in the fabrication of three-dimensional magnetic field vector sensor based on angled Hall plate structure. This sensor design relies on simultaneously detecting all magnetic field vector components using Hall plates that are imbedded into the silicon [111] sloped-surface of bulk micromachined cavity by the anisotropic etching of [100] silicon. The fabricated Hall elements has relatively improved sensitivity compare to convensional Hall elements for three-dimensional magnetic field sensing. The product sensitivity of 547V/AT at the supply current of 1.0mA was achived. The corresponding limit in the detection of magnrtic field is 0.07G that calculated by measured power spectral density(PSD) in magnetic sensor output.

• Journal of Institute of Control, Robotics and Systems
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• v.12 no.4
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• pp.358-363
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• 2006

This paper demonstrates a new non-contact electronic joystick using single hall sensor which detects a horizontal vector of the magnetic field. Furthermore, in this paper, it is mathematically modeled that nonlinear characteristics between the output of hall sensor and the movement of joystick bar. The dynamic horizontal vector of magnetic flux is detected by the hall sensor while a permanent magnet is rotated with the joystick bar, which has two dimension detecting area. Using the nonlinear adjustment equations, the output signals of hall sensor have been linearized to give higher accuracy in the two dimension movement. Finally, through the real experiments, it is showed that the single hall sensor structure mechanism is superior to the dual sensor structure in sensing the two-dimensional motion without offset.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2002.11a
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• pp.132-135
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• 2002

MI(Magneto-Impedance) sensor which is made by thin films has significantly high detecting sensitivity in weak magnetic field. It also has a merit to be able to build in the low power system. Its structure is simple, which makes it easier to prepare a miniature. In this study, its magnetic permeability and anisotropy field($H_{k}$) as a function of a thickness of sputtered amorphous CoZrNb films with zero-magnetostriction and soft magnetic property are investigated. In order to make a uniaxial anisotropy, film was subjected to the post annealing in a static magnetic field with 1KOe intensity at 250, 300, and $320^{\circ}C$ respectively for 2 hours. Magnetic properties of film are measured by using a MH loop tracer. Its magnetic permeability of a film is measured over the frequency range 1 MHz to 750MHz. And, it was examined on the permeability and impedance to design the MI sensor which acts at 50MHz by thickening a CoZrNb film relatively, and fabricated the MI sensor which acts at the 50MHz.

• 제어로봇시스템학회:학술대회논문집
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• 2004.08a
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• pp.1689-1693
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• 2004

This paper proposes a vehicle detector with a magnetoresistive (MR) sensor. The detector consists of a MR sensor and mechanical and electronic apparatuses. Composed of six magnetically variable resistors, the MR sensor senses disturbance of the earth's magnetic field caused by a moving vehicle over itself and then produces an output indicative of the moving vehicle. Experiments have been carried out with three stages. At the first stage, the outputs of the sensor have been analyzed to show the validity of the detector's circuit and the detecting method. At the second stage, the detector has been tested on a local highway in Korea. Through the field tests, the outputs of the detector in response to various kinds of moving vehicles have been collected and analyzed. At the final stage, to verify the performance of the detector, traffic volumes on the highway have been measured with the detector and compared with the exact traffic volumes in a highly congested traffic.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2002.07b
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• pp.778-781
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• 2002

MI(Magneto-Impedance) sensor which is made by thin films has significantly high detecting sensitivity in weak magnetic field. It also has a merit to be able to build in the low power system. Its structure is simple, which makes it easier to prepare a miniature. In this study, its magnetic permeability and anisotropy field$(H_k)$ as a function of a thickness of sputtered amorphous CoZrNb films with zero-magnetostriction and excellent soft magnetic property are investigated. In order to make a uniaxial anisotropy, film was subjected to the post annealing in a static magnetic field with 1KOe intensity at 250, 300, and $320^{\circ}C}$ respectively for 2 hours. Anisotropy field$(H_k)$ of film is measured by using a MH loop tracer. Its magnetic permeability of a film is measured over the frequency range from 1 MHz to 750MHz. It has shown that the magnetic permeability of amorphous CoZrNb film is decreased due to the skin effect with increasing a thickness of the CoZrNb film, and hence its driving frequency is lowered. And, it was examined on the permeability and impedance to fabricate the MI sensor which acts at a low frequency by thickening a CoZrNb film relatively.

• Journal of Magnetics
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• v.12 no.1
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• pp.40-44
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• 2007

The Planar Hall effect in a spin valve structure has been applied as a biosensor being capable of detecting $Dynabeads^{(R)}$ M-280. The sensor performance was tested under the application of a DC magnetic field where the output signals were obtained from a nanovoltmeter. The sensor with the pattern size of $50{\times}100{\mu}m^2$ has produced high sensitivity; especially, the real-time profiles by using that sensor revealed significant performance at external applied magnetic field of around 7.0 Oe with the resolution of 0.04 beads per $\mu m^2$. Finally, a successful array including 24 patterns with the single sensor size of $3{\times}3{\mu}m^2$ has shown the uniform and stable signals for single magnetic bead detection. The comparison of this sensor signal with the others has proved feasibility for biosensor application. This, connecting with the advantages of more stable and high signal to noise of PHR sensor's behaviors, can be used to detect the biomolecules and provide a vehicle for detection and study of other molecular interaction.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2001.07a
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• pp.443-446
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• 2001

MI(Magneto-Impedance) sensor which is made by thin films has significantly high detecting sensitivity in weak magnetic field. It also has a merit to be able to build in low power system. Its structure is simple, which makes it easier to prepare a miniature. In this study, its magnetic permeability and anisotropy field(H$\sub$k/) as a function of a thickness of sputtered amorphous CoZrNb thin film with high saturation magnetostriction and excellent soft magnetic property are investigated. In order to make a uniaxial anisotropy, thin film was subjected to post annealing with a static magnetic field with 1KOe intensity at 250, 300, and 320$^{\circ}C$ for 2 hour. Anisotropy field(H$\sub$k/)of thin film is measured by using MH loop tracer. Its magnetic permeability of thin film is measured over the frequency range from 1 MHz to 750MHz. It has shown that the magnetic permeability of amorphous CoZrNb thin film is decreased due to the skin effect with increasing a thickness of CoZrNb thin film, and hence its driving frequency is lowered.