• Transactions of the Korean Society of Mechanical Engineers A
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• v.30 no.2 s.245
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• pp.157-163
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• 2006

Our research dealt with micro fabrication using micro forming process. The goal of the research was to establish the limit of forming process concerning the size of forming material and formed shape. Flat-rolled ultra thin metallic foils of pure copper(3.0 and $1.0{\mu}m$ in thickness)and stainless steel($2.5{\mu}m$ in thickness) were used for forming material. We obtained the various shapes of micro channels as using designed forming process. $12-14{\mu}m$ wide and $9{\mu}m$ deep channels were made on $3.0{\mu}m$ thick foil and $6{\mu}m$ wide and $3{\mu}m$deep channels were made on $1.0{\mu}m$ thick foil. Si wafer die for forming was fabricated by using etching technique. And the relation of etching time and die dimension was investigated for fabricating precisely die groove. For the forming, die and metal foil were vacuum packed and the forming was conducted with a cold isostatic press. The formed channels were examined in terms of their dimension, surface qualities and potential for defects. Base on the examinations, formability of ultra thin metallic foil was also discussed. Finally, we compared the forming result with simulation. The result of research showed that metal forming technology is promising to produce micro parts.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2005.09a
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• pp.49-53
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• 2005

The objective of this research was to establish the size limitation of micro metal forming and analyze the formability of foil. Flat-rolled ultra thin metallic copper foil($3{\mu}m$ in thickness) was used as a forming material and foil was annealed to improve the formability at the temperature of $385^{\circ}C$. Forming die was fabricated by using etching technique of DRIE(deep reactive ion etching) and HNA isotropic etching. For the forming die and coupe. foil were vacuum packed and the forming was conducted as applying hydrostatic pressure of 250MPa to the vacuum packed unit. We successfully obtained the micro channels of $12\~14{\mu}m$ width and $9{\mu}m$ depth from micro forming process we designed. We also investigated the thickness strain distribution of foil from experiment and FE simulation result. Micro channels had a good formability of smooth surface and size accuracy. We expect that micro metal forming technology will be applied to production of micro parts.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.10a
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• pp.589-592
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• 2005

Micro-forming is a suited technology to manufacture very small metallic parts(several $mm{\sim}{\mu}m$). Micro-forming of $Zr_{62}Cu_{17}Ni_{13}Al_8$ bulk metallic glass(BMG) as a candidate material for this developing process are feasible at a relatively low stress in the supercooled liquid state without any crystallization during hot deformation. In this study, micro-formability of a representative bulk metallic glass, $Zr_{62}Cu_{17}Ni_{13}Al_8$, was investigated for micro-forging of U-shape pattern. Micro-formability was estimated by comparing $R_f$ values $(=A_f/A_g)$, where Ag is cross-sectional area of U groove, and $A_f$ the filled area by material. Microforging process was simulated and analyzed by applying finite element method. FEM simulation results should reasonable agreement with the experimental results when the material properties and simulation conditions such as top die speed, remeshing criteria and boundary conditions tightly controlled. The micro-formability of $Zr_{62}Cu_{17}Ni_{13}Al_8$ was increased with increasing load and time in the temperature range of the supercooled liquid state. Also, FEM Simulation using DEFORM was confirmed to be applicable for the micro-forming process simulation.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2010.11a
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• pp.493-494
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• 2010

• Journal of the Korean Society for Precision Engineering
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• v.23 no.4 s.181
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• pp.153-161
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• 2006

Micro-forming is a suited technology to manufacture very small metallic parts(several $mm{\sim}{\mu}m$). Micro-forming of $Zr_{62}Cu_{17}Ni_{13}Al_8$ bulk metallic glass(BMG) as a candidate material for this developing process are feasible at a relatively low stress in the supercooled liquid state without any crystallization during hot deformation. In this study, micro- formability of a representative bulk metallic glass, $Zr_{62}Cu_{17}Ni_{13}Al_8$. was investigated for micro-forging of U-shape pattern. Micro-formability was estimated by comparing $R_f$ values ($=A_f/A_g$), where $A_g$ is cross-sectional area of U groove, and $A_f$ the filled area by material. Micro-forging process was simulated and analyzed by applying finite element method. FEM simulation results showed reasonable agreement with the experimental results when the material properties and simulation conditions such as top die speed, remeshing criteria and boundary conditions were tightly controlled. The micro-formability of $Zr_{62}Cu_{17}Ni_{13}Al_8$ was increased with increasing load and time in the temperature range of the supercooled liquid state. Also, FEM simulation using a commercial software, DEFORM was confirmed to be applicable for the optimization of micro-forming process.

• Proceedings of the KSME Conference
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• 2000.11a
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• pp.754-758
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• 2000

Milli-structure components are classified as component group whose size is between macro and micro scale. that is, about less than 20mm and larger than 1mm. The forming of these components has a typical phenomenon of bulk deformation with thin sheets because of the forming size. In order to conventional metal forming, where numerical process simulation is already fully applied, the micro-forming process is characterized by some scale effects which have to be considered in an advanced process simulation. milli-structure rectangular cup drawing is analyzed and designed using the finite element method and experiment. The result of the finite element analysis is confirmed by a series of experiments.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2009.10a
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• pp.53-56
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• 2009

Roll forming process is one of important metal processing technology because the process is simple and economical. These days, roll forming process is tried to be employed in manufacturing the circuit board, barrier ribs and solar cell plate for productivity. However, it is difficult to apply to the forming of micro scale or sub-micro scale pattern. In this study, the roll forming processing for the micro scale is designed and analyzed. In this study, the forming of micro pattern for solar cell plate by incremental roll forming process is analyzed. The solar cell plate may have thousands of patterns, and the analysis of forming considering all the patterns is impossible due to the computational costs. In this study, analyses are carried out for various numbers of patterns and the results are compared. It is shown that the analyses results with four row patterns and twelve row patterns are same. So, it is considered that the analysis can be carried out for only four rows of pattern for the design of incremental roll forming process. Also experiment is carried out process that is designed through simulation.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2000.10a
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• pp.101-104
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• 2000

Milli-structure components are classified as component group whose size is between macro and micro scale. that is, about less than 20mm and larger than 1mm. The forming of these components has a typical phenomenon of bulk deformation with thin sheets because of the forming size. In order to conventional metal forming, where numerical process simulation is already idly applied, the micro-forming process is characterized by some scale effects which have to be considered in an advanced process simulation. milli-structure rectangular cup drawing is analyzed and designed using the finite element method and experiment. The result of the finite element analysis is confirmed by a series of experiment.

• Korean Journal of Metals and Materials
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• v.49 no.2
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• pp.104-111
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• 2011

An ultrafine grained Mg-9Al-1Zn magnesium alloy with the mean grain size less than $1{\mu}m$ was produced by using high-ratio differential speed rolling. The processed alloy exhibited excellent superplasticity at relatively low temperatures. The micro-forming tests were carried out using a micro-forging apparatus with micro V-grooved shaped dies made of silicon and the micro-formability was evaluated by means of micro-formability index, $R_f$ ($=A_f/A_g$, $A_f$: formed and inflowed area into the V-groove, $A_g$: area of the V-groove). The $R_f$ value increased with temperature up to $280^{\circ}C$ and then decreased beyond $300^{\circ}C$. The decrease of the $R_f$ value at $300^{\circ}C$ was attributed to the accelerated grain coarsening. Increasing the micro-forging pressure increased the $R_f$ values. At a given die geometry, die filling ability decreased as the die position moved away from the die center to the end. FEM simulation predicted this behavior and a method of improving this problem was proposed.

• 제어로봇시스템학회:학술대회논문집
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• 2004.08a
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• pp.301-306
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• 2004

In this study, Dual servo mechanism with VCM(Voice Coil Motor) and PZT is designed for a high precision force and position control. We designed the VCM actuator and dual servo mechanism with leaf spring. VCM actuators, with their high linearity, simple structure, low weight, and high efficiency, are increasingly being used in micro-positioning applications. There are many kinds of VCM with a structure. VCM actuators are divided into two types by moving parts. One is moving magnet type and the other moving coil type. We described the properties of these two types of VCM. Design parameters of VCM are defined through the FEM simulation analysis of magnetic field and dynamic model of dual servo mechanism. These researches help to for decreasing loss in the air gap of VCM. We present dual servo mechanism is effective mechanism for a force control in hi h precision, properties of designed VCM.