• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.10a
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• pp.698-701
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• 2005

We have investigated experimentally a nano patterning using electron beam lithography for the nickel stamper fabrication. Recently, DVD and Blu-ray disk(BD) have nano-scale patterns in order to increase the storage density. Specially, BD has 100nm-scale patterns which are generally fabricated by electron beam lithography. In this paper, we found optimum condition of electron-beam lithography for 100nm-scale patterning. We controlled various conditions of EHP(acceleration voltage), beam current, dose and aperture size in order to obtain optimum conditions. We used 100nm-thick PMMA layer on a silicon wafer as photoresist. We found that EHP was the most dominant factor in electron-beam lithography.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.632-635
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• 2003

As a process technology of nano pattern with a new conception for economic and practical technology of alternative nano process. process technologies such as Embossing, Imprinting. Molding and Inking are beginning to make its appearance. Among these alternative processes, nano mold process is a process that is of benefit to mass production and keeps excellency of reproduction and high quality of parts. In this study, we experienced micro precision machining technology of nano stamper for the injection mold of optical disk with big capacity. Especially, Flatness and uniformity are important for nano stamper with global area, for the purpose of developing polishing technology of micro precision of Back polishing only being used for nano stamper, we carried out a basic study to secure flatness standards

• Journal of the Korean Society for Precision Engineering
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• v.27 no.6
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• pp.17-23
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• 2010

Recent research topics of ultra-precision micro, nano machining using femtosecond lasers are described in the paper.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2012.05a
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• pp.1017-1018
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• 2012

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.10a
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• pp.220-223
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• 2005

The rapid prototyping (RP) technology has been advanced for various applications such as verification of design, functional test. However, many RP machines still have low accuracy and limitation of applications for various materials. In this research, a hybrid RP system was developed to improve precision of micro parts. This hybrid system consists of deposition and material removal process by mechanical micro machining to fabricate nano composites using photo-curable polymer resin with various nano particles. In this work, using hybrid RP process with Multi-Walled Carbon Nano Tube (MWCNT) and hydroxyapatite, micro parts were fabricated. The precision of parts was evaluated based on the original CAD design, and to see the effect of nano particles on mechanical properties, tensile strength was measured. From the results of experiments, it was confirmed that the part made by hybrid process had higher precision, and the addition of nano particles improved mechanical properties.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.240-245
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• 2005

In order to implement nano-level accuracy of precision equipments, a nano control system is one of the key components. The control system consists of a controller, actuators and sensors having nano-level resolution. In this paper, application area and technical trend on the nano control system are introduced. Some required techniques for realizing nano-level resolution of a controller or actuator are presented. Technical innovation of a control system by IT-fusion and its effect are also described. Finally, domestic research activities for development of the IT-based nano control system are introduced.

• Journal of the Korean Society for Precision Engineering
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• v.21 no.2
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• pp.210-217
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• 2004

In this study, a new process, named as nano replication printing(nRP) process, is developed for printing any figure in the range of several micrometers by using voxel matrix scanning scheme. In this newly developed process, a femto-second laser is scanned on a photosensitive monomer resin in order to induce polymerization of the liquid resin according to a voxel matrix which is transformed from bitmap format file. After the polymerization, a droplet of ethanol is dropt to remove the unnecessary remaining liquid resin and then the polymerized figures with nano-scaled precision are only remaining on the glass plate. By the nRP process, any figure file of bitmap format could be reproduced as nano-scaled precision replication in the range of several micrometers. Also, nano/micro-scaled patterns for an extremely wide range of applications would become a technologically feasible reality. Some of figures with nano-scaled precision were printed in scaled replication as examples to prove the usefulness of this study.

• Journal of the Korean Society for Precision Engineering
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• v.15 no.10
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• pp.15-26
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• 1998

The role of the Engineer in the era of nano-technology is explored, a trend in manufacture which is expected to yield a ＄20-30 billion per annum business throughout the world by the year 2020. The engineers who will be working in this subject will be required to have broadly based experience, over a range of traditional disciplines, such as physics. electronics, software engineering, control and mechanical engineering. As well as having an appreciation of other disciplines such as air conditioning, vibration analysis and its minimisation, the selection of materials for maximum stability and minimal thermal distortion as well as an understanding of ultra precision design and nano tribology. In other words the engineer who is to be successful in this new and emerging field, will have to be broader based than engineers of the past, where it was traditional to break up the elements of a discipline to smaller subsets. But as nano-technology advances and the subject brings about the evolution of nanotronics to provide a successful solution to emerging problems, it will be essential for a breed of engineers to develop who can consider the subject in a holistic manner. This paper therefore considers the emergence of nano-technology, predicts the subsets of the development and places them in context of the new engineer which will be required in increasing numbers. The paper summarises the skills of the proposed nanotronics engineer and provides a basis for their training and development.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2013.05a
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• pp.1101-1102
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• 2013

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2010.05a
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• pp.545-546
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• 2010