Evaluation of the Residual Stress of Thin Film Based on the Nanoindentation and Finite Element Analysis. (유한요소해석과 나노인덴테이션을 활용한 박막의 잔류응력 평가)
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- Proceedings of the Korean Society for Technology of Plasticity Conference
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- 2003.10a
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- pp.355-358
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- 2003