• Journal of the Korea Society for Simulation
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• v.14 no.4
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• pp.55-68
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• 2005

The advancement in semiconductor technology is leading toward smaller critical dimension designs and larger wafer manufactures. Due to such phenomena, semiconductor industry is in need of an accurate control of the process. Photolithography is one of the key processes where the pattern of each layer is formed. In this process, precise superposition of the current layer to the previous layer is critical. Therefore overlay parameters of the semiconductor photolithography process is targeted for this research. The complex relationship among the input parameters and the output metrologies is difficult to understand and harder yet to model. Because of the superiority in modeling multi-nonlinear relationships, neural networks is used for the simulator modeling. For training the neural networks, conjugate gradient method is employed. An experiment is performed to evaluate the performance among the proposed neural network simulator, stepwise regression model, and the currently practiced prediction model from the test site.

• International Journal of Fuzzy Logic and Intelligent Systems
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• v.1 no.1
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• pp.87-94
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• 2001

Silicon nitride films grown by plasma-enhanced chemical vapor deposition (PECVD) are useful for a variety of applications, including anti-reflecting coatings in solar cells, passivation layers, dielectric layers in metal/insulator structures, and diffusion masks. PECVD systems are controlled by many operating variables, including RF power, pressure, gas flow rate, reactant composition, and substrate temperature. The wide variety of processing conditions, as well as the complex nature of particle dynamics within a plasma, makes tailoring SiN film properties very challenging, since it is difficult to determine the exact relationship between desired film properties and controllable deposition conditions. In this study, SiN PECVD modeling using optimized neural networks has been investigated. The deposition of SiN was characterized via a central composite experimental design, and data from this experiment was used to train and optimize feed-forward neural networks using the back-propagation algorithm. From these neural process models, the effect of deposition conditions on film properties has been studied. A recipe synthesis (optimization) procedure was then performed using the optimized neural network models to generate the necessary deposition conditions to obtain several novel film qualities including high charge density and long lifetime. This optimization procedure utilized genetic algorithms, hybrid combinations of genetic algorithm and Powells algorithm, and hybrid combinations of genetic algorithm and simplex algorithm. Recipes predicted by these techniques were verified by experiment, and the performance of each optimization method are compared. It was found that the hybrid combinations of genetic algorithm and simplex algorithm generated recipes produced films of superior quality.

• Korean Management Science Review
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• v.9 no.1
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• pp.17-30
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• 1992

This paper is organized as follows. Section 2 illustrates several applications of neural networks. Section 3 presents the theoretical aspects of the major neural network paradigms as well as the structure of the back -propagation network used in the study. Section 4 describes the experiment including data analysis, modeling, and the performance criteria followed by the detailed discussion of the experimental results. Future research avenues including advantages and limitations of neural network are presented in the last section.

• Korean Journal of Biological Psychiatry
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• v.4 no.2
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• pp.194-197
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• 1997

Neural network models, also known as connectionist models or PDP models, simulate some functions of the brain and may promise to give insight in understanding the cognitive brain functions. The models composed of neuron-like elements that are linked into circuits can learn and adapt to its environment in a trial and error fashion. In this article, the history and principles of the neural network modeling are briefly reviewed, and its applications to psychiatry are discussed.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.27 no.7
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• pp.1110-1119
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• 2003

This paper deals with the synthesis of the 3-dimensional grasp planning for unknown objects. Previous studies have many problems, which the estimation time for finding the grasping points is much long and the analysis used the not-perfect 3-dimensional modeling. To overcome these limitations in this paper new algorithm is proposed, which algorithm is achieved by two steps. First step is to find the whole 3-dimensional geometrical modeling for unknown objects by using stereo matching. Second step is to find the optimal grasping points for unknown objects by using the neural network trained by the result of optimization using genetic algorithm. The algorithm is verified by computer simulation, comparing the result between neural network and optimization.

• Journal of Intelligence and Information Systems
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• v.1 no.1
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• pp.91-109
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• 1995

This paper compared four knowledge acquisition methods (namely, neural network, case-based reasoning, discriminant analysis, and covariance structure modeling) for allergic rhinitis. The data were collected from 444 patients with suspected allergic rhinitis who visited the Otorlaryngology Deduring 1991-1993. Among four knowledge acquisition methods, the discriminant model had the best overall diagnostic capability (78%) and the neural network had slightly lower rate(76%). This may be explained by the fact that neural network is essentially non-linear discriminant model. The discriminant model was also most accurate in predicting allergic rhinitis (88%). On the other hand, the CSM had the lowest overall accuracy rate (44%) perhaps due to smaller input data set. However, it was most accuate in predicting non-allergic rhinitis (82%).

• Proceedings of the KIEE Conference
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• 1999.07g
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• pp.2863-2865
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• 1999

In this paper we present the modeling of ozone prediction system using polynomial neural network. The Polynomial Neural Network is a useful tool for data learning, nonlinear function estimation and prediction of dynamic system. The mechanism of ozone concentration is highly complex, nonlinear, nonstationary. The purposed method shows that the prediction to the ozone concentration based upon a polynomial neural network gives us a good performance for ozone prediction with ability of superior data approximation.

• Proceedings of the KIPE Conference
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• 2002.11a
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• pp.36-39
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• 2002

This paper presents a simulation results of sensorless control of Switched Reluctance Motor(SRM) using neural network. The basic algorithm of this scheme is based on the flux linkage characteristic according to the phase current and the rotor position. A sufficient simulation data was used for neural network training. Through measurement of the phase flux linkage and phase currents the neural network is able to estimate the rotor position. The simulation result shows some good results, and possibility of this algorithm.

• 제어로봇시스템학회:학술대회논문집
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• 2001.10a
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• pp.30.2-30
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• 2001

As the era of the human friendly robot looms, the intelligent autonomous mobile robots have obtained tremendous interests in recent years. The robots may be service robots for serving human or industrial robots for replacing human. For the coexistance with human, the robots must be able to feel and recognize three dimensional space that human live. In this paper, we propose three dimensional environmental modeling method based on a neural network technique called Growing Neural Gas Network. The purpose of this neural network is to generate a graphical structure which reflects the topology of the input space. Through this method, the robots´ surroundings are autonomously segmented ...

• Journal of the Semiconductor & Display Technology
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• v.21 no.4
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• pp.110-115
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• 2022

Accurate current-voltage modeling of solar cell systems plays an important role in power prediction. Solar cells have nonlinear characteristics that are sensitive to environmental conditions such as temperature and irradiance. In this paper, the output characteristics of photovoltaic module are accurately predicted by combining the artificial neural network and physical model. In order to estimate the performance of PV module under varying environments, the artificial neural network model is trained with randomly generated temperature and irradiance data. With the use of proposed model, the current-voltage and power-voltage characteristics under real environments can be predicted with high accuracy.