• KSBB Journal
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• v.13 no.5
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• pp.477-482
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• 1998

A biosensor with PZT piezoelectric ceramic crystal was developed for the detection of formaldehyde gas. Poled PZT piezoelectric ceramic disk was made from ZrO2, TiO2 and Nb2O5, together with the addition of PbO and polyvinyl alcohol, through various processes of mixing, calcination drying, crushing, forming, sintering, polishing, ion coating and poling. Oscillator circuit of sensor was made of operational amplifier(AD811AN). Formaldehyde dehydrogenase was immobilized onto a piezoelectic ceramic crystal, together with the cofactors, reduced glutathione and nicotinamide adenine dinucleotide. The effect of flow rate on the sensitivity was determined by varing the flow rate of carrier gas from 24.7mL/min to 111.7mL/min through detector cell. The results indicated that as the flow rate was increased, the recovery rate was increased. And a significant increase in the sensitivity was observed in enhanced flow rate of carrier gas. Frequency difference(ΔF) of immobilized PZT piezoelectic disk increased proportionally to the concentration gas and reproduced to repeated exposures of formaldehyde gas(28ppm, Δ68Hz).

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.53 no.2
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• pp.116-122
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• 2004

A micromachined self-exited piezoelectric cantilever has been fabricated using PZT(52/48) thin film. For the application to biosensor using antigen-antibody interaction, electromechanical properties such as resonant frequency and quality factor of micromachined piezoelectric cantilever were important factors. Electromechanical properties and resonant behaviors of microfabricated cantilever were simulated by FEA (Finite Element Analysis) using Coventorware$^{TM}$2003. And these characterization of microcantilever were measured by using LDV(Laser Doppler Vibrometer) to compare with FEA data. We present the resonant frequency shift of micromachined piezoelectric cantilevers due to combination of mass loading and change of spring constant by gold deposition. Experimental mass sensitivities of microcantilever were characterized by Au deposition on the backside of microcantilever. Mass sensitivities with $100{\times}300$ ${\mu}{\textrm}{m}$ dimension cantilever from simulation and experimental were 5.56 Hz/ng and 16.8 Hz/ng respectively.y.

• Journal of the Korean Ceramic Society
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• v.38 no.7
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• pp.634-638
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• 2001

본 연구에서는 마이크로 내시경용 바이오 센서로 응용하기 위한 Al/PZT/RuO$_2$로 이루어진 마이크로 캔틸레버를 제작하였으며, 공진 특성 및 병원체의 흡착에 따른 공진 특성 그리고 검출 감도(sensitivity)에 미치는 구조적인 영향을 전산모사를 통하여 알아보았다. 길이 100$mu extrm{m}$, 폭 50$\mu\textrm{m}$, 두께 0.3$\mu\textrm{m}$/0.25$\mu\textrm{m}$/0.7$\mu\textrm{m}$ (Al/PZT/RuO$_2$)의 크기의 제작된 마이크로 캔틸레버는 89kHz의 공진주파수를 가지고 있음을 전산모사를 통해 알 수 있었다. 바이오 센서로 응용될 때의 검출 감도는 흡착 질량의 증가에 비례하여 향상되었으며, 5% 이상의 검출 감도를 갖기 위해서는 흡착 질량이 약 5 나노그램 이상이 되어야 함을 확인할 수 있었다. 캔틸레버의 크기를 결정하는 길이, 폭, 두께중 사용 주파수 대역은 길이의 조절을 통하여 결정할 수 있고, 검출 감도의 향상을 위해서는 가능한 한 두께를 얇게 해야 함을 알 수 있었다. 반면에 폭의 변화는 공진주파수나 검출 감도에 거의 영향을 미치지 않았다.

• Journal of Biosystems Engineering
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• v.34 no.4
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• pp.260-268
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• 2009

As a basic study to develop a high sensitive biosensor using film bulk acoustic resonator, the mathematical model for analyzing the resonance characteristics of bulk acoustic resonator with acoustic Bragg reflectors was investigated. The simulation results due to the number of acoustic Bragg reflectors with low and high acoustic impedance materials were compared with the experimental results for 1, 2.25 and 5 MHz of PZT based bulk acoustic resonators with various acoustic Bragg reflectors. At the fabricated bulk acoustic resonator with an odd number of acoustic Bragg reflectors, low and high acoustic impedance materials in sequence under the bottom electrode showed better resonance characteristics than even number of acoustic Bragg reflectors. The changes of resonance frequencies due to the increase of number of acoustic Bragg reflectors by simulation and experiment, respectively showed approximately similar tendency but some differences in input impedance between the experiment and simulation were found. The derived mathematical model for describing the resonance characteristics of the bulk acoustic resonator with acoustic Bragg reflector will be available for analyzing the design parameters for development of biosensor using bulk acoustic resonator.