• Transactions of the Korean Society of Mechanical Engineers A
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• v.28 no.12
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• pp.1937-1941
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• 2004

We present lateral actuated piezoelectric actuator using U-shaped PZT strip and lever structure for the RF switch application. In the previous study of RF switch, they used horizontal contact switch fabricated by thin film metals. However, thin film metals could not generate large contact force due to low stiffness. In this work, we suggest lateral contact switch which makes large contact force by increasing stiffness. In addition, we use PZT actuator for the high force actuation. Generally actuator using thin film PZT moves to the vertical direction due to the neutral axis shift. Therefore we need lateral motion generation mechanism based on the thin film PZT actuator. In order to increase lateral motion of thin film PZT actuator, we use U-shaped PZT actuator using residual stress control. Also, thin film PZT actuator can generate very small lateral motion of 120${\times}$10$^{-6}$ ${\mu}{\textrm}{m}$/V for d$_{31}$ mode, thus we suggest lever structure to increase stroke amplification. From the experimental study, fabricated PZT actuator shows maximum lateral displacement of 1 ${\mu}{\textrm}{m}$, and break down voltage of the thin film PZT actuator is above 16V.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.250-253
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• 2004

This study deals with the microvalve, which is composed of the multilayer bender type PZT actuator, actuator controller and microvalve body. The object of this study is to develope the microvalve with multilayer bender type PZT actuator. In order to achieve this object, prototype PZT actuator and microvalve were suggested and manufactured. Also, the performance of this model was evaluated through the experiments.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.664-669
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• 2003

This paper proposes a swing-arm type dual-stage actuator, which consists of a PZT actuator for fine motion and a VCM(Voice Coil Motor) for coarse motion, for SFF ODD(Small Form Factor Optical Disk Drive), in order to achieve fast access speed and precise track following control. We focus our attention on the design and control of the PZT actuator, because there have been a lot of previous researches related to the VCM and dual-stage actuators. Due to the dual cantilever structure, the PZT actuator can generate precise translational tracking motion at its tip where optical pickup is attached at, and the effect of hysteric behavior of the PZT element is reduced. The dynamic model of the PZT actuator is derived by using the Hamilton's principle, and verified by comparing with the experimental frequency response. The sliding mode control is designed in order to be robust against modeling uncertainties. Simulations and experimental results confirm the effectiveness of the suggested control scheme.

• Proceedings of the KSME Conference
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• 2004.11a
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• pp.951-955
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• 2004

Piezoelectric(PZT) actuator can substitute for solenoid which is used in fluid control field because it has faster response times and no possibility of explosion. Besides, it is available in a high temperature and it has low energy consumption. In this study, pneumatic micro valve, bimorph type PZT actuator using the softner type PZT, carbon plate as a shim and its controller circuit were suggested and investigated. Performance tests and characteristics analysis, such as displacement, force, hysteresis and frequency properties, were carried out. The displacement of the actuator measured at the end point was 63 ${\mu}m$., force of the actuator was 0.052 N and maximum operating frequency was 15Hz. Also, characteristics of the micro valve with PZT actuator were evaluated in a testing system. The results show that the suggested PZT actuator is suitable for micro valve.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.14 no.5
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• pp.385-393
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• 2004

This paper proposes a swing-arm type dual-stage actuator, which consists of a PZT actuator for fine motion and a VCM(voice coil motor) for coarse motion, for an SFF ODD(small form factor optical disk drive), in order to achieve fast access speed and precise track-following control. Over the past few decades there have been a lot of researches related to the VCM and dual-stage actuator. In this paper, we focus our attention on the design and control of the PZT actuator. Due to the dual cantilever structure. the PZT actuator can generate precise translational tracking motion at its tip to which an optical pickup is attached. and the effect of hysteric behavior of the PZT element is reduced. The dynamic model of the PZT actuator is derived by using the Hamilton's principle, and verified by comparing it with the experimental frequency response. The sliding mode control is designed in order to be robust against modeling uncertainties. Simulations and experimental results confirm the effectiveness of the suggested control scheme.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 1997.04a
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• pp.413-417
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• 1997

Distributed piezoelectric sensor and actuator have been designed for efficient vibration control of a cantilevered beam. Both PZT and PVDF are used in this study, the former as an actuator and the latter as a sensor for our integrated structure. For the PZT actuator, the position and size have been optimized. Optimal electrode shape of the PVDF sensor has been determined. For multi-mode vibration control, we have used two PZT actuators and a PVDF sensor. Electrode shading of PVDF is more powerful for modal force adjustment than the sizing and positioning of PZT. Finite element method is used to model the structure that includes the PZT actuator and the PVDF sensor. By deciding on or off of each PZT segment, the length and the location of the PZT actuator are optimize. Considering both of the host structure and the optimized actuators, it is designed that the active electrode width of PVDF sensor along the span of the beam. Actuator design is based on the criterion of minimizing the system energy in the control modes under a given initial condition. Sensor is designed to minimize the observation spill-over. Modal control forces for the residual(uncontrolled) modes have been minimized during the sensor design. Genetic algorithm, which is suitable for this kind of discrete problems, has been utilized for optimization. Discrete LQG control law has been applied to the integrated structure for real time vibration control. Performance of the sensor, the actuator, and the integrated smart structure has been demonstrated by experiments.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.10a
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• pp.106-106
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• 2003

• 연구논문집
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• s.33
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• pp.81-88
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• 2003

A metal jet printing system based on ink jet printing technique is one of the effective equipments for manufacturing elements of display devices, electrical devices, information processing systems, and so on. In order to develop an actuator of the metal jet printing system, bimorph type PZT actuator(length 25.2mm, width 7.2mm, thickness 0.5mm, shim thickness 0.2mm) and its controller(voltage range $\pm24v$, built-in fast recovery diode) were suggested and investigated. Performance tests and characteristic analysis, such as displacement, force, hysteresis and frequency, were carried out. The results show that the suggested actuator and controller are suitable for the metal jet printing system.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2003.11a
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• pp.424-429
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• 2003

This paper proposes a swing-arm type dual-stage actuator, which consists of a PZT actuator for fine motion and a VCM(Voice Coil Motor) for coarse motion, for SFF ODD(Small Form Factor Optical Disk Drive), in order to achieve fast access speed and precise track following control. We focus our attention on the design and control of the PZT actuator, because there have been a lot of previous researches related to the VCM and dual-stage actuators. Due to the dual cantilever structure, the PZT actuator can generate precise translational tracking motion at its tip where optical pickup is attached at, and the effect of hysteric behavior of the PZT element is reduced. The dynamic model of the PZT actuator is derived by using the Hamilton's principle, and verified by comparing with the experimental frequency response. The sliding mode control is designed in order to be robust against modeling uncertainties. Simulations and experimental results confirm the effectiveness of the suggested control scheme.

• Journal of Power System Engineering
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• v.9 no.4
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• pp.162-167
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• 2005

The purpose of this paper is to improve the hysteresis characteristics of a stack type piezoelectric actuator using system identification and tracking control. Recently, several printing methods that are cost less and faster than previous semiconductor processes have been developed for the production of electric paper and RFID(Radio Frequency IDentification). The system proposed in this study prints by spraying the molten metal. And this system consist of a nozzle, heating furnace, operating actuator and an XYZ 3-axis stage. As an operating system, the piezoelectric(PZT) actuator is a very useful tool for position control of the metal printing system. However, the PZT actuator has a hysteresis nonlinearity due to the ferroelectric characteristics of the PZT element. This hysteresis causes problem position control characteristics in the system and deteriorates the performance of the system. In this study, an investigation was conducted to improve the hysteresis characteristics of the PZT actuator that has an output displacement for the input voltage. In order to reduce the hysteresis nonlinearity of the PZT actuator, this proposed a inverse hysteresis model and a mathematic modeling method that can express the geometric relationship between voltage and displacement. In addition, system identification and PID control methods were examined. Also, it was confirmed that the proposed control strategy gives good tracking performance.